Periodic Reporting for period 3 - MADEin4 (Metrology Advances for Digitized ECS industry 4.0)
Berichtszeitraum: 2021-04-01 bis 2022-09-30
With the introduction of new, ever more demanding processes into advanced manufacturing, reaching a sufficiently high and competitive productivity level in highly customized High-Volume-Manufacturing (HVM) is becoming the number one challenge for manufacturing as well as for equipment sectors.
The objective of the MADEin4 project is to demonstrate Industry 4.0 manufacturing productivity improvement by developing advanced, highly productive and connected metrology cyber physical systems which combine metrology data analysis and design with machine learning methodologies and digital twinning.
The MADEin4 project scope includes the establishment of an advanced ECS ‘Industry 4.0 predictive yield and tools performance’ pilot line that is centric to IMEC. Around that center are grouped the metrology, design, diagnostics and computing equipment and modules manufacturers whose strategies and methodological approaches are interpreted and localized by semiconductors and automotive end users in Europe. In addition, the MADEin4 project includes ‘Industry 4.0’ ‘digitization of manufacturing’ and demonstrations by those European end users.
The societal impact of the project is related to the improvement of next generation ECS and Automotive technologies and manufacturing productivity which will increase Europe’s competitive edge vs. other regions and by that it will support economic growth and increase employment.
By the end of the project the consortium achieved fully its key performance indicators targets and created a comprehensive exploitation plan which includes the releases of next generation equipment, sensors and smart algorithms.
The objective of the MADEin4 project is to demonstrate Industry 4.0 manufacturing productivity improvement by developing advanced, highly productive and connected metrology cyber physical systems which combine metrology data analysis and design with machine learning methodologies and digital twinning.
The MADEin4 project scope includes the establishment of an advanced ECS ‘Industry 4.0 predictive yield and tools performance’ pilot line that is centric to IMEC. Around that center are grouped the metrology, design, diagnostics and computing equipment and modules manufacturers whose strategies and methodological approaches are interpreted and localized by semiconductors and automotive end users in Europe. In addition, the MADEin4 project includes ‘Industry 4.0’ ‘digitization of manufacturing’ and demonstrations by those European end users.
The societal impact of the project is related to the improvement of next generation ECS and Automotive technologies and manufacturing productivity which will increase Europe’s competitive edge vs. other regions and by that it will support economic growth and increase employment.
By the end of the project the consortium achieved fully its key performance indicators targets and created a comprehensive exploitation plan which includes the releases of next generation equipment, sensors and smart algorithms.
In WP1, AMIL coordinates and is responsible for the technical, legal and financial operation and risk management of the project.
The activities in the second reporting period comprised two technical review meetings (month 18 and 24 meetings via TEAM due to the COVID-19 situation) and biweekly project management team meetings.
The PCA was signed by all by end of 2020. The financial reports submitted by partners and explanations about under and over spending were reviewed. The risks associated to the COVID-19 pandemic materialized as delays mostly related to samples preparations and other production related issues.
In WP2, imec and Leti have prepared advanced samples with design of experiments for WP3 and WP4 partners (a task which continues into the 3rd period) and measured them to produce a base line data set. In WP3, the metrology equipment and modules development made impressive progress while awaiting the samples from WP2 for qualification purposes and demonstration of beyond state-of-the-art key performance indicators. At the same time, the end users such ST-C and ST-I worked with their own samples and data to enhance their in-line metrology and predictive manufacturing technology. In WP4, the smart software, algorithm and hardware have continued to be developed and benchmarked in cooperation with the large manufacturer such GF and ST, academic institute such IMT and POLITO and commercial companies such OCTO and MENTOR, who also lead the work package. WP4 development in the 2nd year was based on the manufacturer data mostly, except for imec who already analyzed their pilot line samples data. imec’s data was shared with MENTOR and will become a base line for more extensive yield predictive model creation by MENTOR which will aggregate additional samples data from the various metrology partners. In WP5, demonstration task continued to progress with ST-I (semiconductor) and FCA (automotive) as the main beneficiaries of a collaboration with academic institutes and RTO such CNR, POLITO and CRF (linked 3rd party of FCA). The development of Industry4.0 enhancement in the production lines involved many partners from WP3 and WP4 such SEMIL for photoluminescence technology and BRILLIANETOR for robot’s social collaborative software module. In WP6, standard work made a significant progress with PTB designing and producing a 3D metrology sample, which is a candidate to become industrial standard, in cooperation with NFI. The dissemination and exploitation work received a significant boost from the creation of the new MADEin4 web site, by SEMIEU, containing rich content about By the project’s various publications and events. By the end of the project the consortium achieved fully its key performance indicators targets and created a comprehensive exploitation plan which includes the releases of next generation equipment, sensors and smart algorithms.
The activities in the second reporting period comprised two technical review meetings (month 18 and 24 meetings via TEAM due to the COVID-19 situation) and biweekly project management team meetings.
The PCA was signed by all by end of 2020. The financial reports submitted by partners and explanations about under and over spending were reviewed. The risks associated to the COVID-19 pandemic materialized as delays mostly related to samples preparations and other production related issues.
In WP2, imec and Leti have prepared advanced samples with design of experiments for WP3 and WP4 partners (a task which continues into the 3rd period) and measured them to produce a base line data set. In WP3, the metrology equipment and modules development made impressive progress while awaiting the samples from WP2 for qualification purposes and demonstration of beyond state-of-the-art key performance indicators. At the same time, the end users such ST-C and ST-I worked with their own samples and data to enhance their in-line metrology and predictive manufacturing technology. In WP4, the smart software, algorithm and hardware have continued to be developed and benchmarked in cooperation with the large manufacturer such GF and ST, academic institute such IMT and POLITO and commercial companies such OCTO and MENTOR, who also lead the work package. WP4 development in the 2nd year was based on the manufacturer data mostly, except for imec who already analyzed their pilot line samples data. imec’s data was shared with MENTOR and will become a base line for more extensive yield predictive model creation by MENTOR which will aggregate additional samples data from the various metrology partners. In WP5, demonstration task continued to progress with ST-I (semiconductor) and FCA (automotive) as the main beneficiaries of a collaboration with academic institutes and RTO such CNR, POLITO and CRF (linked 3rd party of FCA). The development of Industry4.0 enhancement in the production lines involved many partners from WP3 and WP4 such SEMIL for photoluminescence technology and BRILLIANETOR for robot’s social collaborative software module. In WP6, standard work made a significant progress with PTB designing and producing a 3D metrology sample, which is a candidate to become industrial standard, in cooperation with NFI. The dissemination and exploitation work received a significant boost from the creation of the new MADEin4 web site, by SEMIEU, containing rich content about By the project’s various publications and events. By the end of the project the consortium achieved fully its key performance indicators targets and created a comprehensive exploitation plan which includes the releases of next generation equipment, sensors and smart algorithms.
MADEin4 aims to bring production lines to a next level in productivity and predictability by focusing on two boosters, while fulfilling and/or exceeding also sensitivity, precision and accuracy requirements:
• Productivity booster 1: High throughput, next generation metrology and inspection tools development.
In the first reporting period, beyond state-of-the-art development has started such as: high throughput E-beam, optical and X-ray tools (e.g. AMIL, TUD, NOVA and BRUKER) and sensors (e.g. TOWER).
• Productivity booster 2: Development of combinations of Electronic Design Automation (EDA), Product/process Life Cycle Management (PLM), modelling, simulations and advanced metrology data analysis with Machine Learning (ML), Digital Twinning and predictive diagnostics of the process (predictive yield) and tools performance.
In the second reporting period, the metrology tools development made big progress toward achieving their key performance indicators such X time speed improvements for Optical, E-beams, X-ray and probe based technologies.
Accurate modeling based on design, metrology and sensors data, their initial data analysis and simulations with partners such GF and ST-Italy demonstrated promising predictive yield and maintenance results.
The yield improvements in consequence will allow maintaining the semiconductor and automotive products reliability while decreasing their average selling price, improving their ‘time to market’ and accelerating new technologies adaptation.
By the project’s various publications and events. By the end of the project the consortium achieved fully its key performance indicators targets and created a comprehensive exploitation plan which includes the releases of next generation equipment, sensors and smart algorithms and in consequence support significantly the societal impact is relation to Europe's economic zone growth and increase of employment.
• Productivity booster 1: High throughput, next generation metrology and inspection tools development.
In the first reporting period, beyond state-of-the-art development has started such as: high throughput E-beam, optical and X-ray tools (e.g. AMIL, TUD, NOVA and BRUKER) and sensors (e.g. TOWER).
• Productivity booster 2: Development of combinations of Electronic Design Automation (EDA), Product/process Life Cycle Management (PLM), modelling, simulations and advanced metrology data analysis with Machine Learning (ML), Digital Twinning and predictive diagnostics of the process (predictive yield) and tools performance.
In the second reporting period, the metrology tools development made big progress toward achieving their key performance indicators such X time speed improvements for Optical, E-beams, X-ray and probe based technologies.
Accurate modeling based on design, metrology and sensors data, their initial data analysis and simulations with partners such GF and ST-Italy demonstrated promising predictive yield and maintenance results.
The yield improvements in consequence will allow maintaining the semiconductor and automotive products reliability while decreasing their average selling price, improving their ‘time to market’ and accelerating new technologies adaptation.
By the project’s various publications and events. By the end of the project the consortium achieved fully its key performance indicators targets and created a comprehensive exploitation plan which includes the releases of next generation equipment, sensors and smart algorithms and in consequence support significantly the societal impact is relation to Europe's economic zone growth and increase of employment.