Leistungen
Distributable document files eg VideosPDF Slideshows of teaching material either as textbook or PowerPoint Presentation on How to do quality control with XRDXRR and HSI accessible for Workshop attendees and through the NanoQI website after registration Task 72
Verification of performance of XRR and HSI as quality control in industrial R2R vacuum coatingSet of surface images of a roll 100 m x 06 m showing for each layer in a 3 layer stack the layer thickness and its deviation with accuracy of 1 nm after R2R processing at 2 mmin The demo systems at FEP are operational and a quality assessment and XRR calibration procedure has been established for vacuum coated samples with previously unknown properties The characterisation results for selected samples will be made available to the public as Case Study White Paperopen access scientific publication to advertise the NanoQI solution Task 63
White paper on Metadata and Data Formats and Data Exchange Protocols of NanoQI for EMCC clusteringGeneralized public description of D44 that includes relevant metadata that needs to be exchanged between multiple inline metrology units and between inline metrology and machine configuration D45 will as well include suggestions for standardized realtime communication interfaces between the systems eg TCPIP Task 43
Verification of in-situ observation of perovskite layer curing and quenching and surface imaging on > 20 x 20 cm² on moving substrate (0.5 m/min)The Insitu XRD at TNO is operational and has been used to characterise Perovskite layer samples with previously unknown properties The characterisation results for selected samples will be made available to the public CaseStudy WhitePaperopen access scientific publication to advertise the NanoQI solution Task 61
Verification of performance of HSI in evaluation of ALD coatings: Detection of deviations ≥ 1 monolayer in < 30 seconds on 15 x 15 cm² sample area; detection of changes in residual carbon through > 2% change in electron density.The inline HSI is operational and has been used to successfully characterise ultrathin ALD layer samples with previously unknown properties The characterisation results for selected samples will be made available to the public as CaseStudy WhitePaperopen access scientific publication to advertise the NanoQI solution Task 62
Common interface description for machine integration of in-line and in-situ metrologyTechnical description and construction drawings of a inlineinsitu measurement unit holder that allows integration of HSI and XRDXRR into coating machines the demo machines in NanoQI and common machine platforms D16 includes as well an initial description of the software interface between machine control software and the inline metrology systems Task 13
Description of the NanoQI workshop place and date agenda and attendee list Task 71
Project websiteReport on the website structure, screenshots and first contents published. Task 7.1
Whitepaper and teaching material on machine and radiation safety of inline-insitu X-ray + HSI unitsGeneralized public version of D17 containing widely applicable guidelines on what safety measures are required when XRD and or HSI are integrated to coating machines Task 14
Veröffentlichungen
Autoren:
Susanne Dogan-Surmeier, Florian Gruber, Steffen Bieder, Patrick Schlenz, Michael Paulus, Christian Albers, Eric Schneider, Nicola Thiering, Christian Maurer, Metin Tolan, Philipp Wollmann, Steffen Cornelius, Christian Sternemann
Veröffentlicht in:
Journal of Physics D: Applied Physics, 2023, ISSN 1361-6463
Herausgeber:
IOP Publishing
DOI:
10.1088/1361-6463/acd8c9
Autoren:
NEO
Veröffentlicht in:
2023
Herausgeber:
NEO
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