Publications Peer reviewed articles (24) B and Ga Co-Doped Si1−xGex for p-Type Source/Drain Contacts Author(s): Gianluca Rengo, Clement Porret, Andriy Hikavyy, Erik Rosseel, Mustafa Ayyad, Richard J. H. Morris, Rami Khazaka, Roger Loo, and André Vantomme Published in: ECS Journal of Solid State Science and Technology, Issue 2022 11 024008, 2022, Page(s) 24008 (10 pages), ISSN 2162-8769 Publisher: Electrochemical Society, Inc. DOI: 10.1149/2162-8777/ac546e Deposition, Characterization, and Performance of Spinel InGaZnO4 Author(s): Hendrik F. W. Dekkers, Michiel J. van Setten, Attilio Belmonte, Adrian V. Chasin, Subhali Subhechha, Nouredine Rassoul, Anastasia V. Glushkova, Romain Delhougne, and Gouri Sankar Kar Published in: 2022 ACS Applied Electronic Materials, Issue 26376113, 2022, Page(s) pp. 1238–1249, ISSN 2637-6113 Publisher: American Chemical Society DOI: 10.1021/acsaelm.1c01315 Scan-Free GEXRF in the Soft X-ray Range for the Investigation of Structured Nanosamples Author(s): Staeck, S.; Andrle, A.; Hoenicke, P.; Baumann, J.; Groetzsch, D.; Weser, J.; Goetzke, G.; Jonas, A.; Kayser, Y.; Foerste, F.; Mantouvalou, I.; Viefhaus, J.; Soltwisch, V.; Stiel, H.; Beckhoff, B.; Kanngiesser, B. Published in: Nanomaterials, Vol 12, Iss 21, p 3766 (2022), Issue 1, 2022, Page(s) 3766, ISSN 2079-4991 Publisher: MDPI DOI: 10.3390/nano12213766 Systematic Study on the Amorphous, C-Axis-Aligned Crystalline, and Protocrystalline Phases in In–Ga–Zn Oxide Thin-Film Transistors Author(s): Anastasia V. Glushkova, Harold F. W. Dekkers, Manoj Nag, Jose Ignacio del Agua Borniquel, Jothilingam Ramalingam, Jan Genoe, Paul Heremans, and Cedric Rolin Published in: 2021 ACS Applied Electronic Materials, Issue 26376113, 2021, Page(s) pp. 1268 - 1278, ISSN 2637-6113 Publisher: American Chemical Society DOI: 10.1021/acsaelm.0c01091 Sequential Error Disentanglement of Three-Phase Current Sensor for AC Machine in Standstill Conditions Author(s): Darian Verdy Retianza, Juris Arrozy, Jeroen van Duivenbode, Henk Huisman, Bas Vermulst Published in: IEEE Access, Issue Volume 10, 2022, Page(s) 113902 - 113914, ISSN 2169-3536 Publisher: Institute of Electrical and Electronics Engineers Inc. DOI: 10.1109/access.2022.3218311 Experimental determination of the gadolinium L subshells fluorescence yields and Coster-Kronig transition probabilities Author(s): Yves Kayser, Philipp Hönicke, Malte Wansleben, André Wählisch, Burkhard Beckhoff Published in: X-ray spectromtry, Issue 52, 2023, Page(s) 235-246, ISSN 1097-4539 Publisher: John Wiley & Sons Ltd DOI: 10.1002/xrs.3313 Joining Caffeic Acid and Hydrothermal Treatment to Produce Environmentally Benign Highly Reduced Graphene Oxide Author(s): A. Barra, O.A. Lazar, A.G. Pantazi, M.J. Hortiguela, G.O. Irurueta, M. Enachescu, E.R. Hitzky, C. Nunes, P. Ferreira Published in: Nanomaterials, Issue 20794991, 2021, Page(s) 732, ISSN 2079-4991 Publisher: MDPI Publishing Services DOI: 10.3390/nano11030732 Experimental determination of the hafnium L-subshell fundamental parameters using the holistic approach Author(s): Nils Wauschkuhn, Heiko Gundlach and Philipp Hönicke Published in: New Journal of Physics, Issue 26, 2024, Page(s) 033017, ISSN 1367-2630 Publisher: Institute of Physics Publishing DOI: 10.1088/1367-2630/ad2fff On the growth of copper oxide nanowires by thermal oxidation near the threshold temperature at atmospheric pressure Author(s): C.C. Moise, L.B. Enache, V. Anastasoaie, O.A. Lazar, G.V. Mihai, S.P. Rosoiu, M. Bercu, M. Enachescu Published in: Journal of Alloys and Compounds, Issue 09258388, 2021, Page(s) 161130, ISSN 0925-8388 Publisher: Elsevier BV DOI: 10.1016/j.jallcom.2021.161130 Microsecond non-melt UV laser annealing for future 3D-stacked CMOS Author(s): Toshiyuki Tabata, Fabien Rozé, Louis Thuries, Sebastien Halty, Pierre-Edouard Raynal, Karim Huet, Fulvio Mazzamuto, Abhijeet Joshi, Bulent Basol, Pablo Acosta Alba, Sébastien Kerdilès Published in: Applied Physics Express, 2022, ISSN 1882-0778 Publisher: Japan Soc of Applied Physics DOI: 10.35848/1882-0786/ac6e2a Experimental and theoretical approaches for determining the K-shell fluorescence yield of carbon Author(s): Philipp Hönicke, Rainer Unterumsberger, Mauro Guerra, Nils Wauschkuhn, Markus Krämer, Jorge Sampaio, Fernando Parente, Paul Indelicato, José Pires Marques, José Paulo Santos, Burkhard Beckhoff Published in: Radiation Physics and Chemistry, Issue 0969806X, 2022, Page(s) 110501, ISSN 0969-806X Publisher: Pergamon Press Ltd. DOI: 10.1016/j.radphyschem.2022.110501 On Improved Commutation for Moving-Magnet Planar Actuators Author(s): Yorick Broens;Hans Butler; Roland Tóth Published in: IEEE Control Systems Letters, Issue Volume 7, 2023, Page(s) 2593 - 2598, ISSN 2475-1456 Publisher: IEEE DOI: 10.1109/lcsys.2023.3288076 The Water-Based Synthesis of Platinum Nanoparticles Using KrF Excimer Laser Ablation Author(s): Lazar, O.A.; Moise, C.C.; Nikolov, A.S.; Enache, L.-B.; Mihai, G.V.; Enachescu, M. Published in: Nanomaterials, Issue 20794991, 2022, Page(s) 348, ISSN 2079-4991 Publisher: MDPI Publishing Services DOI: 10.3390/nano12030348 Challenges of grazing emission X-ray fluorescence (GEXRF) for the characterization of advanced nanostructured surfaces Author(s): Dieter Skroblin; Analía Fernández Herrero; Thomas Siefke; Konstantin Nikolaev; Anna Andrle; Philipp Hönicke; Yves Kayser; Michael Krumrey; Christian Gollwitzer; Victor Soltwisch Published in: Nanoscale, Issue 14, 2022, Page(s) 15475-15483, ISSN 2040-3372 Publisher: Royal Society of Chemistry DOI: 10.1039/d2nr03046b Solid Phase Recrystallization in Arsenic Ion-Implanted Silicon-On-Insulator by Microsecond UV Laser Annealing Author(s): Toshiyuki Tabata, Fabien Rozé, Pablo Acosta Alba, Sebastien Halty, Pierre-Edouard Raynal, Imen Karmous, Sébastien Kerdilés, Fulvio Mazzamuto Published in: IEEE Journal of the Electron Devices Society, Issue Early Access, 2021, ISSN 2168-6734 Publisher: Institute of Electrical and Electronics Engineers Inc. DOI: 10.1109/jeds.2021.3131911 Characterization of an RF excited broad beam ion source operating with inert gases Author(s): Erik Rohkamm, Daniel Spemann, Frank Scholze, Frank Frost Published in: Journal of Applied Physics, Issue 129/22, 2021, Page(s) 223305, ISSN 0021-8979 Publisher: American Institute of Physics DOI: 10.1063/5.0052758 Recent Progresses and Perspectives of UV Laser Annealing Technologies for Advanced CMOS Devices Author(s): Toshiyuki Tabata, Fabien Rozé, Louis Thuries, Sébastien Halty, Pierre-Edouard Raynal, Imen Karmous and Karim Huet Published in: Electronics, Issue 20799292, 2022, Page(s) 2636, ISSN 2079-9292 Publisher: MDPI DOI: 10.3390/electronics11172636 Electrochemical Deposition of Ferromagnetic Ni Nanoparticles in InP Nanotemplates Fabricated by Anodic Etching Using Environmentally Friendly Electrolyte Author(s): C.C. Moise, G.V. Mihai, L. Anicai, E.V. Monaico, V.V. Ursaki, M. Enachescu, I.M. Tiginyanu Published in: Nanomaterials, Issue 12(21) 2022, 2022, ISSN 2079-4991 Publisher: MDPI Publisher Services DOI: 10.3390/nano12213787 Experimental determination of tantalum L-shell fluorescence yields and Coster–Kronig transition probabilities Author(s): Nils Wauschkuhn, Katja Frenzel, Burkhard Beckhoff and Philipp Hönicke Published in: J. Anal. At. Spectrom., Issue 38, 2023, Page(s) 197-203, ISSN 1364-5544 Publisher: Royal Society of Chemistry DOI: 10.1039/d2ja00325b Fabrication of Pt nanoparticles by nanosecond pulsed laser ablation in aqueous solution of ethanol using KrF excimer laser Author(s): Lazar, O.A.; Nikolov, A.S.; Moise, C.C.; Rosoiu, S.; Prodana, M.; Enachescu, M. Published in: Applied Surface Science, Issue 2022, 2022, ISSN 1873-5584 Publisher: Elsevier B.V. All DOI: 10.1016/j.apsusc.2022.155289 KrF excimer laser for Pt–NPs synthesis by PLAL in isopropanol solution and their use in a SERS application Author(s): O.A. Lazar, A.S. Nikolov, C.C. Moise, G.V. Mihai, M. Prodana, M. Enachescu Published in: Journal of Materials Research and Technology, Issue (24), 2023, 2023, Page(s) 7135-7152, ISSN 2214-0697 Publisher: Elsevier B.V. DOI: 10.1016/j.jmrt.2023.04.268 A novel and holistic approach for experimental x-ray fundamental parameter determination—the Ru L-shell Author(s): Philipp Hönicke Published in: New Journal of Physics, Issue 25, 2023, Page(s) 073012, ISSN 1367-2630 Publisher: Institute of Physics Publishing DOI: 10.1088/1367-2630/ace3ec Dopant Redistribution and Activation in Ga Ion-Implanted High Ge Content SiGe by Explosive Crystallization during UV Nanosecond Pulsed Laser Annealing Author(s): Toshiyuki Tabata, Huet Karim, Fabien Rozé, Fulvio Mazzamuto, Bernard Sermage, Petros Kopalidis, Dwight Roh Published in: ECS Journal of Solid State Science and Technology, Issue 10/2, 2021, Page(s) 023005, ISSN 2162-8769 Publisher: Electrochemical Society, Inc. DOI: 10.1149/2162-8777/abe2ee Experimental determination of ruthenium L-shell fluorescence yields and Coster–Kronig transition probabilities Author(s): Nils Wauschkuhn, Katja Frenzel, Burkhard Beckhoff and Philipp Hönicke Published in: J. Anal. At. Spectrom., 2023, ISSN 1364-5544 Publisher: Royal Society of Chemistry DOI: 10.1039/d3ja00085k Conference proceedings (23) Demonstration of 3D sequential FD-SOI on CMOS FinFET stacking featuring low temperature Si layer transfer and top tier device fabrication with tier interconnection Author(s): A. Vandooren et al. Published in: VLSI Symposium, Issue June 2022, 2022 Publisher: VLSI DOI: 10.1109/vlsitechnologyandcir46769.2022.9830400 LPV sequential loop closing for high-precision motion systems Author(s): Yorick Broens; Hans Butler; Roland Tóth Published in: 2022 IEEE (ACC) American control conference, 2022 Publisher: IEEE DOI: 10.23919/acc53348.2022.9867621 Copper Large-Scale Grain Growth by UV Nanosecond Pulsed Laser Annealing Author(s): Toshiyuki Tabata, Pierre-Edouard Raynal, Fabien Roze, Sebastien Halty, Louis Thuries, Fuccio Cristiano, Emmanuel Scheid, Fulvio Mazzamuto Published in: 2021 IEEE International Interconnect Technology Conference (IITC), Issue 6-9 July 2021, 2021, Page(s) 1-3, ISBN 978-1-7281-7632-1 Publisher: IEEE DOI: 10.1109/iitc51362.2021.9537312 Failure Mode Analysis in Microsecond UV Laser Annealing of Cu Thin Films Author(s): Remi Demoulin, Richard Daubriac, Louis Thuries, Emmanuel Scheid, Fabien Rozé, Fuccio Cristiano, Toshiyuki Tabata, Fulvio Mazzamuto Published in: 2022 IEEE International Interconnect Technology Conference (IITC), 2022 Publisher: IEEE Exploring the use of deep learning in task-flexible ILC Author(s): Anantha Sai Hariharan Vinjarapu; Yorick Broens; Hans Butler; Roland Tóth Published in: American Control Conference (ACC), Issue 2023, 2023, ISBN 979-8-3503-2806-6 Publisher: IEEE DOI: 10.23919/acc55779.2023.10156467 Microsecond UV laser annealing annihilating Ru grains smaller than electron mean free path Author(s): Lu Lu; Nicolas Jourdan; Richard Daubriac; Toshiyuki Tabata; Fabien Roze; Louis Thuries; Fuccio Cristiano; Zsolt Tokei Published in: 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM), 2023 Publisher: IEEE Reference Model based Data-driven Control of Power Amplifiers for High-precision Motion Systems Author(s): Duo Xu; Mihai-Serban Popescu; Mircea Lazar Published in: 2023 Conference on Control Technology and Applications, Issue 2023, 2023, ISBN 979-8-3503-3544-6 Publisher: IEEE DOI: 10.1109/ccta54093.2023.10252583 NS-Pulsed Melt Laser Annealing for Advanced CMOS Contacts Author(s): Toshiyuki Tabata, Karim Huet, Fulvio Mazzamuto, Jean-Luc Everaert, Edward Moore, Leonard M. Rubin, and Dwight Roh Published in: The 23rd International Conference on Ion Implantation Technology (IIT 2022), Issue 2022/09/28, 2022, Page(s) WE2.01 Publisher: MRS On the steady-state behavior of finite-control-set MPC with an application to high-precision power amplifiers Author(s): Duo Xu, Sander Damsma, Mircea Lazar Published in: 2022 European Control Conference, 2022 Publisher: IEEE DOI: 10.23919/ecc55457.2022.9838191 Learning-based feedforward augmentation for steady state rejection of residual dynamics on a nanometer accurate planar actuator system Author(s): Ioannis Proimadis; Yorick Broens; Hans Butler; Roland Tóth Published in: Proceedings of Machine Learning Research, 2021 Publisher: MLResearch Press Solid Phase Recrystallization and Dopant Activation in Arsenic Ion-Implanted Silicon-On-Insulator by UV Laser Annealing Author(s): Toshiyuki Tabata, Fabien Rozé, Pablo Acosta Alba, Sébastien Halty, Pierre-Edouard Raynal, Imen Karmous, Sébastien Kerdilès, Fulvio Mazzamuto Published in: The 20th International Workshop on Junction Technology (IWJT2021), Issue 10-11 June 2021, 2021, Page(s) S4-1 Publisher: JSAP On finite-control-set MPC for switched-mode power converters: Improved tracking cost function and fast policy iteration solver Author(s): Duo Xu, Mircea Lazar Published in: IEEE Conference on Control Technology and Applications, CCTA 2022, Issue 2022, 2022, Page(s) 1129-1134, ISBN 978-1-6654-7338-5 Publisher: IEEE DOI: 10.1109/ccta49430.2022.9965987 Investigation of generalized ellipsometry applications for the detection of structural asymmetries in Gate-all-around FET architectures. Author(s): Dávid Egri, Emeric Balogh, Attila Sütő, Péter Basa, Miklós Tallián Published in: 18th International Conference on Thin Films & 18th Joint Vacuum Conference, Issue 22–26 November 2020, 2020 Publisher: Emeric Balogh SMART CUT TECHNOLOGY: FROM SUBSTRATE ENGINEERING TO ADVANCED 3D INTEGRATION Author(s): G. Besnard et al. Published in: ICICDT conference, 2022 Publisher: ICICDT conference Fast model predictive control of power amplifiers for nanometer precision motion systems Author(s): Duo Xu; Mircea Lazar Published in: European Control Conference (ECC), Issue 2023, 2023, ISBN 978-3-907144-08-4 Publisher: IEEE DOI: 10.23919/ecc57647.2023.10178259 Analysis of Power Amplifier Contribution to the Precision of Motion Systems Author(s): Marziyeh Hajiheidari; Duo Xu; Jeroen van Duivenbode; Bas Vermulst; Mircea Lazar Published in: 2022 IEEE 17th International Conference on Advanced Motion Control (AMC), Issue 18-20 Feb. 2022, 2022 Publisher: IEEE DOI: 10.1109/amc51637.2022.9729291 An Ultra Fast Short Circuit Protection for Three-Phase GaN Electric Drives Author(s): Darian Verdy Retianza, Luc Spooren, Jeroen van Duivenbode, Henk Huisman Published in: 2021 IEEE Energy Conversion Congress and Exposition (ECCE), Issue 16 nov 2021, 2021 Publisher: IEEE DOI: 10.1109/ecce47101.2021.9595029 An Objective Evaluation of Redundant High Precision Amplifier Author(s): Darian Verdy Retianza, Jeroen van Duivenbode, Henk Huisman Published in: 2021 IEEE 12th Energy Conversion Congress & Exposition - Asia (ECCE-Asia), Issue 13 July 2021, 2021 Publisher: IEEE DOI: 10.1109/ecce-asia49820.2021.9479055 Potential benefits of S/D HDD activation by melt laser annealing in 3D-inte-grated top-tier FDSOI FETs Author(s): Anne Vandooren, Toshiyuki Tabata, Pierre Eyben, Erik Roseel, A. Hikavyy, Karim Huet, Fulvio Mazzamuto, Eugenio Dentoni Litta, Naoto Horiguchi Published in: 2021 International Conference on Solid State Devices and Materials, Issue 6-9 September 2021, 2021, Page(s) 45-46 Publisher: The Japan Society of Applied Physics On modal observers for beyond rigid body H∞ control in high-precision mechatronics Author(s): Yorick Broens; Hans Butler; Roland Tóth Published in: Conference on Decision and Control, Issue 61, 2022, ISBN 978-1-6654-6761-2 Publisher: IEEE DOI: 10.1109/cdc51059.2022.9993406 Impact of the buried oxide thickness in UV laser heated 3D stacks Author(s): Pierre Morin, Toshiyuki Tabata, Fabien Rozé, Mohamed Saib, Hilde Thielens, Louis Thuries, Karim Huet, and Fulvio Mazzamuto Published in: 2021 International Conference on Solid State Devices and Materials, Issue 6-9 September 2021, 2021, Page(s) 47-48 Publisher: The Japan Society of Applied Physics High Bandwidth Power Amplifier with A Shunt Correction Cell Author(s): Marziyeh Hajiheidari; Bas Vermulst; Jeroen van Duivenbode; Henk Huisman Published in: 11th International Conference on Power Electronics and ECCE Asia (ICPE 2023 - ECCE Asia), Issue 11th, 2023, Page(s) 2105-2111, ISBN 978-89-5708-350-5 Publisher: IEEE DOI: 10.23919/icpe2023-ecceasia54778.2023.10213825 Top down spectroscopic techniquesfor fast characterization of nanosheet and forksheet devices Author(s): J. Bogdanowicz, Y. Oniki, K. Kenis, T. Nuytten, S. Sergeant, A. Franquet, V. Spampinato, T. Conard, I. Hoflijk, D. Van den Heuvel, A. L. Charley, P. Leray B. Shamieh, J. Van der Meer, Y. Leon, M. Wormington, Bruker Tech. Ltd J. Hung, R. Koret, D. Fishman, Y. Katz, N. Meir, Nova Measuring Instruments Published in: Proceedings Volume PC12053, Metrology, Inspection, and Process Control XXXVI; PC120530G (2022), 2022 Publisher: IMEC, NOVA, BRUKER DOI: 10.1117/12.2626316 Searching for OpenAIRE data... There was an error trying to search data from OpenAIRE No results available
