IC Technology for the 2nm Node

Informazioni relative al progetto

IT2

ID dell’accordo di sovvenzione: 875999

DOI 10.3030/875999

Progetto chiuso

Data della firma CE 19 Maggio 2020

Data di avvio 1 Giugno 2020

Data di completamento 30 Settembre 2023

Finanziato da

• INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies - Information and Communication Technologies (ICT)

Costo totale € 91 272 624,88

Contributo UE € 20 831 383,11

Coordinato da

ASML NETHERLANDS B.V.
Netherlands

Pubblicazioni

Peer reviewed articles (23)

B and Ga Co-Doped Si1−xGex for p-Type Source/Drain Contacts

Autori: Gianluca Rengo, Clement Porret, Andriy Hikavyy, Erik Rosseel, Mustafa Ayyad, Richard J. H. Morris, Rami Khazaka, Roger Loo, and André Vantomme
Pubblicato in: ECS Journal of Solid State Science and Technology, Numero 2022 11 024008, 2022, Pagina/e 24008 (10 pages), ISSN 2162-8769
Editore: Electrochemical Society, Inc.
DOI: 10.1149/2162-8777/ac546e

Scan-Free GEXRF in the Soft X-ray Range for the Investigation of Structured Nanosamples

Autori: Staeck, S.; Andrle, A.; Hoenicke, P.; Baumann, J.; Groetzsch, D.; Weser, J.; Goetzke, G.; Jonas, A.; Kayser, Y.; Foerste, F.; Mantouvalou, I.; Viefhaus, J.; Soltwisch, V.; Stiel, H.; Beckhoff, B.; Kanngiesser, B.
Pubblicato in: Nanomaterials, Vol 12, Iss 21, p 3766 (2022), Numero 1, 2022, Pagina/e 3766, ISSN 2079-4991
Editore: MDPI
DOI: 10.3390/nano12213766

Systematic Study on the Amorphous, C-Axis-Aligned Crystalline, and Protocrystalline Phases in In–Ga–Zn Oxide Thin-Film Transistors

Autori: Anastasia V. Glushkova, Harold F. W. Dekkers, Manoj Nag, Jose Ignacio del Agua Borniquel, Jothilingam Ramalingam, Jan Genoe, Paul Heremans, and Cedric Rolin
Pubblicato in: 2021 ACS Applied Electronic Materials, Numero 26376113, 2021, Pagina/e pp. 1268 - 1278, ISSN 2637-6113
Editore: American Chemical Society
DOI: 10.1021/acsaelm.0c01091

Sequential Error Disentanglement of Three-Phase Current Sensor for AC Machine in Standstill Conditions

Autori: Darian Verdy Retianza, Juris Arrozy, Jeroen van Duivenbode, Henk Huisman, Bas Vermulst
Pubblicato in: IEEE Access, Numero Volume 10, 2022, Pagina/e 113902 - 113914, ISSN 2169-3536
Editore: Institute of Electrical and Electronics Engineers Inc.
DOI: 10.1109/access.2022.3218311

Experimental determination of the gadolinium L subshells fluorescence yields and Coster-Kronig transition probabilities

Autori: Yves Kayser, Philipp Hönicke, Malte Wansleben, André Wählisch, Burkhard Beckhoff
Pubblicato in: X-ray spectromtry, Numero 52, 2023, Pagina/e 235-246, ISSN 1097-4539
Editore: John Wiley & Sons Ltd
DOI: 10.1002/xrs.3313

Joining Caffeic Acid and Hydrothermal Treatment to Produce Environmentally Benign Highly Reduced Graphene Oxide

Autori: A. Barra, O.A. Lazar, A.G. Pantazi, M.J. Hortiguela, G.O. Irurueta, M. Enachescu, E.R. Hitzky, C. Nunes, P. Ferreira
Pubblicato in: Nanomaterials, Numero 20794991, 2021, Pagina/e 732, ISSN 2079-4991
Editore: MDPI Publishing Services
DOI: 10.3390/nano11030732

Experimental determination of the hafnium L-subshell fundamental parameters using the holistic approach

Autori: Nils Wauschkuhn, Heiko Gundlach and Philipp Hönicke
Pubblicato in: New Journal of Physics, Numero 26, 2024, Pagina/e 033017, ISSN 1367-2630
Editore: Institute of Physics Publishing
DOI: 10.1088/1367-2630/ad2fff

On the growth of copper oxide nanowires by thermal oxidation near the threshold temperature at atmospheric pressure

Autori: C.C. Moise, L.B. Enache, V. Anastasoaie, O.A. Lazar, G.V. Mihai, S.P. Rosoiu, M. Bercu, M. Enachescu
Pubblicato in: Journal of Alloys and Compounds, Numero 09258388, 2021, Pagina/e 161130, ISSN 0925-8388
Editore: Elsevier BV
DOI: 10.1016/j.jallcom.2021.161130

Microsecond non-melt UV laser annealing for future 3D-stacked CMOS

Autori: Toshiyuki Tabata, Fabien Rozé, Louis Thuries, Sebastien Halty, Pierre-Edouard Raynal, Karim Huet, Fulvio Mazzamuto, Abhijeet Joshi, Bulent Basol, Pablo Acosta Alba, Sébastien Kerdilès
Pubblicato in: Applied Physics Express, 2022, ISSN 1882-0778
Editore: Japan Soc of Applied Physics
DOI: 10.35848/1882-0786/ac6e2a

Experimental and theoretical approaches for determining the K-shell fluorescence yield of carbon

Autori: Philipp Hönicke, Rainer Unterumsberger, Mauro Guerra, Nils Wauschkuhn, Markus Krämer, Jorge Sampaio, Fernando Parente, Paul Indelicato, José Pires Marques, José Paulo Santos, Burkhard Beckhoff
Pubblicato in: Radiation Physics and Chemistry, Numero 0969806X, 2022, Pagina/e 110501, ISSN 0969-806X
Editore: Pergamon Press Ltd.
DOI: 10.1016/j.radphyschem.2022.110501

On Improved Commutation for Moving-Magnet Planar Actuators

Autori: Yorick Broens;Hans Butler; Roland Tóth
Pubblicato in: IEEE Control Systems Letters, Numero Volume 7, 2023, Pagina/e 2593 - 2598, ISSN 2475-1456
Editore: IEEE
DOI: 10.1109/lcsys.2023.3288076

The Water-Based Synthesis of Platinum Nanoparticles Using KrF Excimer Laser Ablation

Autori: Lazar, O.A.; Moise, C.C.; Nikolov, A.S.; Enache, L.-B.; Mihai, G.V.; Enachescu, M.
Pubblicato in: Nanomaterials, Numero 20794991, 2022, Pagina/e 348, ISSN 2079-4991
Editore: MDPI Publishing Services
DOI: 10.3390/nano12030348

Challenges of grazing emission X-ray fluorescence (GEXRF) for the characterization of advanced nanostructured surfaces

Autori: Dieter Skroblin; Analía Fernández Herrero; Thomas Siefke; Konstantin Nikolaev; Anna Andrle; Philipp Hönicke; Yves Kayser; Michael Krumrey; Christian Gollwitzer; Victor Soltwisch
Pubblicato in: Nanoscale, Numero 14, 2022, Pagina/e 15475-15483, ISSN 2040-3372
Editore: Royal Society of Chemistry
DOI: 10.1039/d2nr03046b

Solid Phase Recrystallization in Arsenic Ion-Implanted Silicon-On-Insulator by Microsecond UV Laser Annealing

Autori: Toshiyuki Tabata, Fabien Rozé, Pablo Acosta Alba, Sebastien Halty, Pierre-Edouard Raynal, Imen Karmous, Sébastien Kerdilés, Fulvio Mazzamuto
Pubblicato in: IEEE Journal of the Electron Devices Society, Numero Early Access, 2021, ISSN 2168-6734
Editore: Institute of Electrical and Electronics Engineers Inc.
DOI: 10.1109/jeds.2021.3131911

Characterization of an RF excited broad beam ion source operating with inert gases

Autori: Erik Rohkamm, Daniel Spemann, Frank Scholze, Frank Frost
Pubblicato in: Journal of Applied Physics, Numero 129/22, 2021, Pagina/e 223305, ISSN 0021-8979
Editore: American Institute of Physics
DOI: 10.1063/5.0052758

Recent Progresses and Perspectives of UV Laser Annealing Technologies for Advanced CMOS Devices

Autori: Toshiyuki Tabata, Fabien Rozé, Louis Thuries, Sébastien Halty, Pierre-Edouard Raynal, Imen Karmous and Karim Huet
Pubblicato in: Electronics, Numero 20799292, 2022, Pagina/e 2636, ISSN 2079-9292
Editore: MDPI
DOI: 10.3390/electronics11172636

Electrochemical Deposition of Ferromagnetic Ni Nanoparticles in InP Nanotemplates Fabricated by Anodic Etching Using Environmentally Friendly Electrolyte

Autori: C.C. Moise, G.V. Mihai, L. Anicai, E.V. Monaico, V.V. Ursaki, M. Enachescu, I.M. Tiginyanu
Pubblicato in: Nanomaterials, Numero 12(21) 2022, 2022, ISSN 2079-4991
Editore: MDPI Publisher Services
DOI: 10.3390/nano12213787

Experimental determination of tantalum L-shell fluorescence yields and Coster–Kronig transition probabilities

Autori: Nils Wauschkuhn, Katja Frenzel, Burkhard Beckhoff and Philipp Hönicke
Pubblicato in: J. Anal. At. Spectrom., Numero 38, 2023, Pagina/e 197-203, ISSN 1364-5544
Editore: Royal Society of Chemistry
DOI: 10.1039/d2ja00325b

Fabrication of Pt nanoparticles by nanosecond pulsed laser ablation in aqueous solution of ethanol using KrF excimer laser

Autori: Lazar, O.A.; Nikolov, A.S.; Moise, C.C.; Rosoiu, S.; Prodana, M.; Enachescu, M.
Pubblicato in: Applied Surface Science, Numero 2022, 2022, ISSN 1873-5584
Editore: Elsevier B.V. All
DOI: 10.1016/j.apsusc.2022.155289

KrF excimer laser for Pt–NPs synthesis by PLAL in isopropanol solution and their use in a SERS application

Autori: O.A. Lazar, A.S. Nikolov, C.C. Moise, G.V. Mihai, M. Prodana, M. Enachescu
Pubblicato in: Journal of Materials Research and Technology, Numero (24), 2023, 2023, Pagina/e 7135-7152, ISSN 2214-0697
Editore: Elsevier B.V.
DOI: 10.1016/j.jmrt.2023.04.268

A novel and holistic approach for experimental x-ray fundamental parameter determination—the Ru L-shell

Autori: Philipp Hönicke
Pubblicato in: New Journal of Physics, Numero 25, 2023, Pagina/e 073012, ISSN 1367-2630
Editore: Institute of Physics Publishing
DOI: 10.1088/1367-2630/ace3ec

Dopant Redistribution and Activation in Ga Ion-Implanted High Ge Content SiGe by Explosive Crystallization during UV Nanosecond Pulsed Laser Annealing

Autori: Toshiyuki Tabata, Huet Karim, Fabien Rozé, Fulvio Mazzamuto, Bernard Sermage, Petros Kopalidis, Dwight Roh
Pubblicato in: ECS Journal of Solid State Science and Technology, Numero 10/2, 2021, Pagina/e 023005, ISSN 2162-8769
Editore: Electrochemical Society, Inc.
DOI: 10.1149/2162-8777/abe2ee

Experimental determination of ruthenium L-shell fluorescence yields and Coster–Kronig transition probabilities

Autori: Nils Wauschkuhn, Katja Frenzel, Burkhard Beckhoff and Philipp Hönicke
Pubblicato in: J. Anal. At. Spectrom., 2023, ISSN 1364-5544
Editore: Royal Society of Chemistry
DOI: 10.1039/d3ja00085k

Conference proceedings (23)

Demonstration of 3D sequential FD-SOI on CMOS FinFET stacking featuring low temperature Si layer transfer and top tier device fabrication with tier interconnection

Autori: A. Vandooren et al.
Pubblicato in: VLSI Symposium, Numero June 2022, 2022
Editore: VLSI
DOI: 10.1109/vlsitechnologyandcir46769.2022.9830400

LPV sequential loop closing for high-precision motion systems

Autori: Yorick Broens; Hans Butler; Roland Tóth
Pubblicato in: 2022 IEEE (ACC) American control conference, 2022
Editore: IEEE
DOI: 10.23919/acc53348.2022.9867621

Copper Large-Scale Grain Growth by UV Nanosecond Pulsed Laser Annealing

Autori: Toshiyuki Tabata, Pierre-Edouard Raynal, Fabien Roze, Sebastien Halty, Louis Thuries, Fuccio Cristiano, Emmanuel Scheid, Fulvio Mazzamuto
Pubblicato in: 2021 IEEE International Interconnect Technology Conference (IITC), Numero 6-9 July 2021, 2021, Pagina/e 1-3, ISBN 978-1-7281-7632-1
Editore: IEEE
DOI: 10.1109/iitc51362.2021.9537312

Failure Mode Analysis in Microsecond UV Laser Annealing of Cu Thin Films

Autori: Remi Demoulin, Richard Daubriac, Louis Thuries, Emmanuel Scheid, Fabien Rozé, Fuccio Cristiano, Toshiyuki Tabata, Fulvio Mazzamuto
Pubblicato in: 2022 IEEE International Interconnect Technology Conference (IITC), 2022
Editore: IEEE

Exploring the use of deep learning in task-flexible ILC

Autori: Anantha Sai Hariharan Vinjarapu; Yorick Broens; Hans Butler; Roland Tóth
Pubblicato in: American Control Conference (ACC), Numero 2023, 2023, ISBN 979-8-3503-2806-6
Editore: IEEE
DOI: 10.23919/acc55779.2023.10156467

Microsecond UV laser annealing annihilating Ru grains smaller than electron mean free path

Autori: Lu Lu; Nicolas Jourdan; Richard Daubriac; Toshiyuki Tabata; Fabien Roze; Louis Thuries; Fuccio Cristiano; Zsolt Tokei
Pubblicato in: 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM), 2023
Editore: IEEE

Reference Model based Data-driven Control of Power Amplifiers for High-precision Motion Systems

Autori: Duo Xu; Mihai-Serban Popescu; Mircea Lazar
Pubblicato in: 2023 Conference on Control Technology and Applications, Numero 2023, 2023, ISBN 979-8-3503-3544-6
Editore: IEEE
DOI: 10.1109/ccta54093.2023.10252583

NS-Pulsed Melt Laser Annealing for Advanced CMOS Contacts

Autori: Toshiyuki Tabata, Karim Huet, Fulvio Mazzamuto, Jean-Luc Everaert, Edward Moore, Leonard M. Rubin, and Dwight Roh
Pubblicato in: The 23rd International Conference on Ion Implantation Technology (IIT 2022), Numero 2022/09/28, 2022, Pagina/e WE2.01
Editore: MRS

On the steady-state behavior of finite-control-set MPC with an application to high-precision power amplifiers

Autori: Duo Xu, Sander Damsma, Mircea Lazar
Pubblicato in: 2022 European Control Conference, 2022
Editore: IEEE
DOI: 10.23919/ecc55457.2022.9838191

Learning-based feedforward augmentation for steady state rejection of residual dynamics on a nanometer accurate planar actuator system

Autori: Ioannis Proimadis; Yorick Broens; Hans Butler; Roland Tóth
Pubblicato in: Proceedings of Machine Learning Research, 2021
Editore: MLResearch Press

Solid Phase Recrystallization and Dopant Activation in Arsenic Ion-Implanted Silicon-On-Insulator by UV Laser Annealing

Autori: Toshiyuki Tabata, Fabien Rozé, Pablo Acosta Alba, Sébastien Halty, Pierre-Edouard Raynal, Imen Karmous, Sébastien Kerdilès, Fulvio Mazzamuto
Pubblicato in: The 20th International Workshop on Junction Technology (IWJT2021), Numero 10-11 June 2021, 2021, Pagina/e S4-1
Editore: JSAP

On finite-control-set MPC for switched-mode power converters: Improved tracking cost function and fast policy iteration solver

Autori: Duo Xu, Mircea Lazar
Pubblicato in: IEEE Conference on Control Technology and Applications, CCTA 2022, Numero 2022, 2022, Pagina/e 1129-1134, ISBN 978-1-6654-7338-5
Editore: IEEE
DOI: 10.1109/ccta49430.2022.9965987

Investigation of generalized ellipsometry applications for the detection of structural asymmetries in Gate-all-around FET architectures.

Autori: Dávid Egri, Emeric Balogh, Attila Sütő, Péter Basa, Miklós Tallián
Pubblicato in: 18th International Conference on Thin Films & 18th Joint Vacuum Conference, Numero 22–26 November 2020, 2020
Editore: Emeric Balogh

SMART CUT TECHNOLOGY: FROM SUBSTRATE ENGINEERING TO ADVANCED 3D INTEGRATION

Autori: G. Besnard et al.
Pubblicato in: ICICDT conference, 2022
Editore: ICICDT conference

Fast model predictive control of power amplifiers for nanometer precision motion systems

Autori: Duo Xu; Mircea Lazar
Pubblicato in: European Control Conference (ECC), Numero 2023, 2023, ISBN 978-3-907144-08-4
Editore: IEEE
DOI: 10.23919/ecc57647.2023.10178259

Analysis of Power Amplifier Contribution to the Precision of Motion Systems

Autori: Marziyeh Hajiheidari; Duo Xu; Jeroen van Duivenbode; Bas Vermulst; Mircea Lazar
Pubblicato in: 2022 IEEE 17th International Conference on Advanced Motion Control (AMC), Numero 18-20 Feb. 2022, 2022
Editore: IEEE
DOI: 10.1109/amc51637.2022.9729291

An Ultra Fast Short Circuit Protection for Three-Phase GaN Electric Drives

Autori: Darian Verdy Retianza, Luc Spooren, Jeroen van Duivenbode, Henk Huisman
Pubblicato in: 2021 IEEE Energy Conversion Congress and Exposition (ECCE), Numero 16 nov 2021, 2021
Editore: IEEE
DOI: 10.1109/ecce47101.2021.9595029

An Objective Evaluation of Redundant High Precision Amplifier

Autori: Darian Verdy Retianza, Jeroen van Duivenbode, Henk Huisman
Pubblicato in: 2021 IEEE 12th Energy Conversion Congress & Exposition - Asia (ECCE-Asia), Numero 13 July 2021, 2021
Editore: IEEE
DOI: 10.1109/ecce-asia49820.2021.9479055

Potential benefits of S/D HDD activation by melt laser annealing in 3D-inte-grated top-tier FDSOI FETs

Autori: Anne Vandooren, Toshiyuki Tabata, Pierre Eyben, Erik Roseel, A. Hikavyy, Karim Huet, Fulvio Mazzamuto, Eugenio Dentoni Litta, Naoto Horiguchi
Pubblicato in: 2021 International Conference on Solid State Devices and Materials, Numero 6-9 September 2021, 2021, Pagina/e 45-46
Editore: The Japan Society of Applied Physics

On modal observers for beyond rigid body H∞ control in high-precision mechatronics

Autori: Yorick Broens; Hans Butler; Roland Tóth
Pubblicato in: Conference on Decision and Control, Numero 61, 2022, ISBN 978-1-6654-6761-2
Editore: IEEE
DOI: 10.1109/cdc51059.2022.9993406

Impact of the buried oxide thickness in UV laser heated 3D stacks

Autori: Pierre Morin, Toshiyuki Tabata, Fabien Rozé, Mohamed Saib, Hilde Thielens, Louis Thuries, Karim Huet, and Fulvio Mazzamuto
Pubblicato in: 2021 International Conference on Solid State Devices and Materials, Numero 6-9 September 2021, 2021, Pagina/e 47-48
Editore: The Japan Society of Applied Physics

High Bandwidth Power Amplifier with A Shunt Correction Cell

Autori: Marziyeh Hajiheidari; Bas Vermulst; Jeroen van Duivenbode; Henk Huisman
Pubblicato in: 11th International Conference on Power Electronics and ECCE Asia (ICPE 2023 - ECCE Asia), Numero 11th, 2023, Pagina/e 2105-2111, ISBN 978-89-5708-350-5
Editore: IEEE
DOI: 10.23919/icpe2023-ecceasia54778.2023.10213825

Top down spectroscopic techniquesfor fast characterization of nanosheet and forksheet devices

Autori: J. Bogdanowicz, Y. Oniki, K. Kenis, T. Nuytten, S. Sergeant, A. Franquet, V. Spampinato, T. Conard, I. Hoflijk, D. Van den Heuvel, A. L. Charley, P. Leray B. Shamieh, J. Van der Meer, Y. Leon, M. Wormington, Bruker Tech. Ltd J. Hung, R. Koret, D. Fishman, Y. Katz, N. Meir, Nova Measuring Instruments
Pubblicato in: Proceedings Volume PC12053, Metrology, Inspection, and Process Control XXXVI; PC120530G (2022), 2022
Editore: IMEC, NOVA, BRUKER
DOI: 10.1117/12.2626316