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IMPROVED TARGET MATERIAL FOR HIGH-YIELD SPUTTERING DEPOSITION OF HIGH QUALITY ITO FILMS WITH LOW RESISTIVITY AND HIGH OPTICAL TRANSMISSION

Objective


For the manufacturing of flat panel display and electrochromic devices, an high density Indium Tin Oxide (ITO) material and an improved sputtering system have been developed then tested at the preindustrial scale. These material and equipment enable to increase the utilization rate of the ITO sputtering targets without deteriorating the performances of the ITO thin films. The origin of black nodules that grow on the target surface during a sputtering operation and that lead to premature shutdown of the sputtering process has also been elucidated.

The potential benefits that can be expected from this work are a reduction of the production costs of the flat panel display systems.

The problem for the recycling of the ITO targets has also been studied and two recycling routes (for new scraps and for old scraps) have been proposed. These two recycling routes will enable a better management of the indium worldwide resources.
For the manufacturing of flat panel displays, electrochromic glazings and other large area coating files, electrical conducting layers with a high degree of optical transmission are required. Indium-Tin-oxide (ITO) is the most commonly used material for such applications.

The will of the research programme is to improve the ITO coating requirement (resistivity below 1.5 10-4 _cm, transmittance up to 98%, point effect density <100 cm-2) and the material efficiency (increase from 20% to >30% of the weight of the target used for coating and recovery of the scrap ITO).

To comply with these objectives, the programme includes news:

- Powder raw material development and preparation.
- Target design and manufacturing.
- Basic research on the sputtering process.
- Magnetron study and design.
- Recycling route development.

Process scale up will be examinated and performances of pilot coated glass will te tested in end-products experimental devices.

Funding Scheme

CSC - Cost-sharing contracts
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Coordinator

Métaleurop Recherche SA
Address
1 Avenue Albert Einstein
78193 Trappes
France

Participants (3)

DEGUSSA AG
Germany
Address
Rodenbacher Chaussee 4
6450 Sigurd Hanau
LEYBOLD AG
Germany
Address
Siemens Straße 100
8755 Alzenau
SAINT GOBAIN
France
Address
39 Quai Lucien Lefranc
93303 Aubervilliers