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Recyling of rinse waters from metal finishing facilities elimination of organics by catalytic oxidation

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Verwertbare Ergebnisse

The electronic industry uses large amounts of rinse water for the production of printed circuit boards (PCBs) and semiconductors. The development of a new water recycling process based on advanced oxidation was studied within a European Research Project coordinated by Anjou Recherche. Typical organic compounds found in rinse waters from printed circuit boards (PCB) production were treated in a lab-scale test rig by catalytic ozonation followed by biological degradation. Ozonation in presence of a transition metal supported catalyst allowed a 25% TOC removal with acceptable ozone doses (3-4 g O3/g TOC). A pilot scale prototype combining catalytic ozonation, biological granular activated carbon and reverse osmosis was then built and installed in a semiconductor plant located in France. This prototype is a fully automated, mobile unit designed for a 1 m3/hr throughput.. The pilot scale results fully validated the results obtained at the lab scale : a TOC and conductivity abatement of about 96% were routinely obtained.

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