Objective
Reducing resource consumption and waste production are essential to allowing future growth of the semiconductor industry.
Wolfram (WF6) is a product used as source gas in W-CVD (Chemical Vapour Deposition) processing, an important step in the processing of submicron CMOS circuits. At least 50 % of this gas ends up unused in exhaust. Until now, destructive abatement techniques, based on incineration of the waste gas stream with or without subsequent water spray, have been implemented to avoid emitting this gas into the atmosphere. No effort has yet been done to develop a recycling system to recover the excess of WF6.
The project's objective is to demonstrate a new, on line, cost effective method for the reduction of the waste gas stream to air escaping from CVD process equipment used in semiconductormanufacturing. This is to be done by means of a recovery technique (dry plasma scrubsper) of the valuable Tungsten out of W-CVD processing, where WF6 is used as a source gas.The project will also include the construction of a Cost of Ownership model of the demonstrated recovery technique that will be compared to the models of the classical abatement techniques.
The expected impact of the project is to provide the European semiconductor industry with a cost-effective tool for the treatment of the waste gas of a W-CVD processing tool. If this system shows to be technically viable, it will result in a more efficient usage of raw materials and at the same time reduce the impact of WF6 on the environment, especially in view of the expected strong increase in IC production volumes. An additional advantage is the high market value of the recycled Tungsten : for a medium-sized wafer fabrication the 'yield' theoretically amounts to 50 000 Ecu per week.
Fields of science (EuroSciVoc)
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Programme(s)
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Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
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Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
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Funding Scheme
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Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
3001 LEUVEN
Belgium
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.