Obiettivo
Microoptical systems increase their impact on our daily lives, e.g. in tele-communication, medical sensoring and in projection systems. This project aims to exploit the shortest wavelength of high power lasers (VUV 157nm F2 laser) to improve the resolution and quality of several microfabrication processes. The high (hard) photon energy will allow Bragg gratings in fibers and planar wave guides as well as direct removal processes with increased material flexibility, higher processing speed, finer pitches and better reproducibility compared to longer wavelengths. As investigations are focused on brittle materials like glass and silicon there will be an obvious exploitation effect by end-users coming from telecommunication and electronics industry.
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CSC - Cost-sharing contractsCoordinatore
OX5 1QU OXFORD, KIDLINGTON
Regno Unito