Project description Next-Generation Nanoelectronics Components and Electronics IntegrationThe objective of CopPeR was to develop a seed-less copper deposition process and 300 mm wafer prototype equipment for sub-32 nm semiconductor interconnect manufacturing. Show the project objective Hide the project objective The CopPeR project will provide a novel copper deposition process based on the useof non-aqueous solvents to overcome the limitations of currently employedinterconnect formation processes enabling device scaling beyond the 32 nmtechnology node. This non-aqueous process will open novel routes to implementdirect on barrier plating, focussing on tantalum and ruthenium as diffusion barriers.As another main advantage the process developed and implemented within theCopPeR project will significantly improve the quality of the Cu metallization due to thefact that more space is available in trenches for high quality, low resistivity Cu, due tothe fact that the resistivity limiting seed-Cu will be eliminated and thinner barrier filmscan be applied, e.g. by ALD (atomic layer deposition).CopPeR will achieve the final goal through collaborations within a very strongconsortium based on a team with outstanding scientific, engineering andmanufacturing qualifications. In a first phase, electrolyte ingredients will be selectedand experimentally verified, a deposition cell designed through modelling andsimulation as well as new analytical techniques evaluated to enable adequateanalysis of the deposited films. The second phase will focus on the development ofthe copper deposition process based on the findings from phase one with theadditional support of micro-modelling and the process scaled and integrated into a300mm proof-of-concept. In the third and final phase, the process will be integratedinto a complete interconnect scheme, and optimized according to the industrial chipmanufacturer's needs. Fields of science natural scienceschemical sciencesinorganic chemistrytransition metals Programme(s) FP7-ICT - Specific Programme "Cooperation": Information and communication technologies Topic(s) ICT-2007.3.1 - Next-generation nanoelectronic components and electronics integration Call for proposal FP7-ICT-2007-1 See other projects for this call Funding Scheme CP - Collaborative project (generic) Coordinator TECHNIKON FORSCHUNGS- UND PLANUNGSGESELLSCHAFT MBH EU contribution € 251 016,00 Address BURGPLATZ 3A 9500 Villach Austria See on map Region Südösterreich Kärnten Klagenfurt-Villach Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Administrative Contact Klaus-Michael KOCH (Dr.) Links Contact the organisation Opens in new window Website Opens in new window Total cost No data Participants (7) Sort alphabetically Sort by EU Contribution Expand all Collapse all LAM RESEARCH AG Austria EU contribution € 779 351,00 Address SEZ-STRASSE 1 9500 Villach See on map Region Südösterreich Kärnten Klagenfurt-Villach Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Administrative Contact Fritz Pertl (Mr.) Links Contact the organisation Opens in new window Total cost No data TECHNISCHE UNIVERSITAET GRAZ Austria EU contribution € 525 452,00 Address RECHBAUERSTRASSE 12 8010 Graz See on map Region Südösterreich Steiermark Graz Activity type Higher or Secondary Education Establishments Administrative Contact Gerald Kothleitner (Prof.) Links Contact the organisation Opens in new window Website Opens in new window Total cost No data ELSYCA NV Belgium EU contribution € 359 502,00 Address VAARTDIJK 3 BUS 603 3018 Wijgmaal See on map Region Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Administrative Contact Tania Van Cauwenberghe (Ms) Links Contact the organisation Opens in new window Total cost No data KATHOLIEKE UNIVERSITEIT LEUVEN Belgium EU contribution € 641 930,00 Address OUDE MARKT 13 3000 Leuven See on map Region Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven Activity type Higher or Secondary Education Establishments Administrative Contact Marion Wolpers (Ms) Links Contact the organisation Opens in new window Website Opens in new window Total cost No data VRIJE UNIVERSITEIT BRUSSEL Belgium EU contribution € 158 841,00 Address PLEINLAAN 2 1050 Bruxelles / Brussel See on map Region Région de Bruxelles-Capitale/Brussels Hoofdstedelijk Gewest Région de Bruxelles-Capitale/ Brussels Hoofdstedelijk Gewest Arr. de Bruxelles-Capitale/Arr. Brussel-Hoofdstad Activity type Higher or Secondary Education Establishments Administrative Contact Martina Follet (Ms.) Links Contact the organisation Opens in new window Website Opens in new window Total cost No data INFINEON TECHNOLOGIES AG Germany EU contribution € 245 918,00 Address AM CAMPEON 1-15 85579 Neubiberg See on map Region Bayern Oberbayern München, Landkreis Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Administrative Contact Bernhard Scholz (Mr) Links Contact the organisation Opens in new window Website Opens in new window Total cost No data CORMET OY Finland EU contribution € 187 990,00 Address LUUTNANTINTIE 3 A 00410 HELSINKI See on map Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Administrative Contact Juha Piippo (Dr.) Links Contact the organisation Opens in new window Total cost No data
