Skip to main content
European Commission logo print header

Nanoresonators with Integrated circuitry for high sensitivity and high resolution mass detection

Article Category

Article available in the following languages:

Advancing biosensor research

Under the auspices of the NANOMASS project a new measurement system was realised for characterisation of miniature sensor devices.

Digital Economy icon Digital Economy

The combination of Complementary Metal Oxide Semiconductor (CMOS) technology with innovative nanotechnology processes and techniques was the primary focus of the NANOMASS project. By exploiting novel nanolithography methods, innovative technology was generated on the basis of an array of silicon cantilevers on the nanometre scale. Researchers aimed to realise extremely compact and ultra sensitive mechanical mass sensors for bio-, chemical and environmental applications. Once the prototypes were developed they underwent functional evaluation testing in a controlled ambient chamber. A measurement set up was built that allows characterisation of Micro- /Nano- Electro-Mechanical System (MEMS/NEMS) devices. The specific gas chamber operates under a wide range of pressure and temperature control as well as gas composition and state conditions. The system's features allow functionalisation of fragile devices, such as NEMS and offer reliable characterisation of extremely complex biosensor applications. The system was employed to run several functionality tests in order to demonstrate the performance of each the fabricated cantilevers. Thereby, tests resulted in the determination of cantilever mass sensor stability under air and vacuum operation conditions. The minimal mass sensitivity that was demonstrated was of the order of an attogram that is 10[-18] gram. The growing interest received from the bio-research community paves the way for the system's commercialisation. For more information on the project, click at:

Discover other articles in the same domain of application