Project description
Advancing next-generation semiconductor technology
The semiconductor industry faces challenges as it strives to maintain the rapid pace of technological progress dictated by Moore’s Law. Advancing to smaller nodes requires breakthroughs in lithography, metrology, and transistor design to ensure performance, efficiency, and manufacturability. At the 14-angstrom scale, maintaining precision in fabrication, inspection, and quality control is crucial for next-generation computing, AI, and communication technologies. Moreover, sustainability concerns demand greener alternatives to traditional materials and processes. In this context, the EU-funded 14AMI project will develop cutting-edge solutions for the 14Å CMOS node. It focuses on refining extreme ultraviolet (EUV) lithography, pioneering holistic metrology methods, and integrating Complementary Field Effect Transistors (CFETs). The project also champions sustainability with PFAS-free photoresists and AI-driven efficiency enhancements.
Objective
The 14AMI project is about creating technological solutions for the 14 Angstrom CMOS technology node, including a fully integrated functional CFET (Complementary Field Effect Transistor) as new active CMOS device, and state-of-the-art holistic metrology techniques for both wafer and mask inspection and review. All is aimed to keep the pace in the industry to follow Moores law.
The project addresses the following 3 main pillars that are relevant in enabling manufacture of 14A technology, 1) lithography, 2) metrology and 3) process module integration.
In lithography the aim is to realize solutions for the 0.55NA EUV scanner platform to secure 14Angstrom node compliance in performance, that is, resolution, alignment, throughput and optics lifetime. In Metrology the objective is to cover wafer and mask metrology and quality control. The aim is to develop holistic metrology, tools & methods and data analytics to improve overlay, CD and focus measurement and quality control with a Precision to Tolerance, P/T, ratio between 0.1 and 0.3. In process module integration work covers the realization and demonstration of a CFET Complementary Field Effect Transistor - CMOS device. Three options will be investigated for integration; a monolithic, sequential and a hybrid solution. In addition, the partners will develop a PFAS-free photo resist to reduce the ecological footprint of photolithography processes, and a smart AI based sensor technology to improve vacuum chambers' efficiency and reduce waste.
At societal level the expected impact of the 14AMI project will support the partners and their supplier network to stay at the leading edge of high-tech developments, crucial to meet the digitization challenges of the European society. Moreover, 14AMI will boost industrial competitiveness, and attract talent in Europe, while enabling new application in areas such as security, communication and enabling of further automation in mobility, health and research.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: https://op.europa.eu/en/web/eu-vocabularies/euroscivoc.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: https://op.europa.eu/en/web/eu-vocabularies/euroscivoc.
- social sciencessociologyindustrial relationsautomation
- engineering and technologyelectrical engineering, electronic engineering, information engineeringelectronic engineeringsensors
- social scienceslaw
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Programme(s)
Funding Scheme
HORIZON-JU-IA - HORIZON JU Innovation ActionsCoordinator
5504DR Veldhoven
Netherlands
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Participants (36)
76705 Rehovot
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2306990 Migdal Haemek
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4782 St Florian Am Inn
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3001 Leuven
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3001 Leuven
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76100 REHOVOT
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74000 Annecy
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6600 Reutte
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7555 RJ Hengelo Ov
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
5651 GG Eindhoven
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060042 Bucharest
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7522 NB Enschede
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5651 GH Eindhoven
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31700 Blagnac
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
7521 PH Enschede
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.
5683 CR Best
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Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.
9747 AC GRONINGEN
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Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.
7521 PH Enschede
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Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.
7521PH Enschede
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.
7521 PH Enschede
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Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.
7521 PH Enschede
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Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.
7521 PH Enschede
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Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.
7521 PH Enschede
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2628 AK Delft
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
2628 CN Delft
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73447 Oberkochen
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23100 Migdal Haemek
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5667 KV Geldrop
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
52062 Aachen
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42119 Wuppertal
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80686 Munchen
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2595 DA Den Haag
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3047 AT Rotterdam
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
01109 DRESDEN
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5612 AE Eindhoven
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85551 Heimstetten
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Partners (2)
Partner organisations contribute to the implementation of the action, but do not sign the Grant Agreement.
2000 Neuchatel
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Partner organisations contribute to the implementation of the action, but do not sign the Grant Agreement.
1053 Cugy
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.