Final Report Summary - SMART (Scanning Microscopy using Active Resonating nanoTips)
The project SMART, Scanning Microscopy using Active nanoTips, ERC StG n°210078, aims at introducing a breakthrough in the technological concept of Atomic Force Microscopy (AFM) probes so as to enhance sensitivity and acquisition rate for in-liquid operation. More precisely, ring-shaped micro-electromechanical resonators (MEMS) have been designed and fabricated using silicon microtechnologies to be used as a new generation of AFM probes. Main advantages lie in much higher resonance frequencies and quality factors than those of conventional AFM probes based on flexural cantilevers. This paves the way for high speed AFM (HSAFM) imaging, and also for an easy use of AFM in liquids, thanks to a vertical configuration and integrated transducers for driving and sensing the mechanical vibration of the probe. At the end of the project, the concept of the MEMS AFM probes has been successfully demonstrated. The technological fabrication process has been developed to produce the probes. Based on silicon technologies, it is fully compatible for a future industrial transfer. Demonstration experiments using the probes have been achieved, allowing to assess the probe performances in terms of force resolution and to evaluate potential applications. As an example, 1-frame-per-second images of DNA origamis have been obtained with probes in the 10 to 20 MHz range, which established the state-of-the-art for AFM probe frequency. The project led to 17 communications in international peer-reviewed journals and conferences, 2 Ph.D. and 1 habilitation thesis defenses, 1 patent, and 13 invited talks in conferences or universities. Beyond the ERC Starting Grant, the activity continues following 2 directions. The first one concerns applications towards high speed imaging in the field of nanobiology and nanobiosciences. It is supported by a national grant (PIA Nanobiotechnologies, VIBBNANO project). The second one deals with the preparation of an industrial transfer in the field of the scientific instrumention market. This latter has been supported by the ERC PoC Grant PROMISING (2012-13) and by the national project ANR Emergence VIBRATIONS (2013-15).