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MAsk less lithoGraphy for IC manufacturing (MAGIC)

Projektbeschreibung


Next-Generation Nanoelectronics Components and Electronics Integration
MAGIC has supported the development of e-beam based maskless lithography technology in Europe: Two parallel lithography tool developments for 32nm CMOS and beyond and on lithography infrastructure.

In the CMOS manufacturing environment, the mask-based optical lithography technique is up to now driving solution to deal with all industry concerns. Nevertheless, this solution becomes less effective for each new technology node. Effectively, it requires more and more complex and expensive masks due to the introduction of optical proximity correction and phase shift techniques. The blow up of the tool prices play also an important role in the overall cost of ownership of this technique. This trend opens opportunity for the Mask-Less Lithography (ML2) technology, based on multi-beam principles and developped by the two European companies MAPPER and IMS Nanofabrication AG. The cost effective model of the ML2 option in association with the high resolution capability of the electron beam lithography and a reasonable throughput target represents an attractive alternative for lithography and is supported by some key CMOS manufacturers around the world, like TSMC, STMicroelectronics, QIMONDA, TOSHIBA, and Texas Instruments.

This project proposes to support the development of ML2 technology in Europe. It is composed of two linked poles. The first one will be focused on MAPPER and IMMS-NANO tools developments with the objective to deliver a first ML2 alpha platform compatible with 32 nm half pitch technology before 2010, aligned with the semiconductor manufacturer requirements. In relation with this activity, the program will develop the required infrastructure for the usage of this tools in an industrial environment. Among the tasks to be addressed, there is a delivery of a reliable software platform to treat the data base preparation and to provide solutions for ML2 related electron proximity effects. The last concern of this project will be to demonstrate the ability to integrate CMOS processes in real manufacturing conditions on the ML2 platform developpeed by the tool partners.

Aufforderung zur Vorschlagseinreichung

FP7-ICT-2007-1
Andere Projekte für diesen Aufruf anzeigen

Finanzierungsplan

CP - Collaborative project (generic)

Koordinator

COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
Adresse
Rue Leblanc 25
75015 Paris 15
Frankreich
Aktivitätstyp
Research Organisations
EU-Beitrag
€ 1 735 076
Kontakt Verwaltung
Marie-Laure Page (Ms)

Beteiligte (18)

FACHHOCHSCHULE VORARLBERG GMBH
Österreich
EU-Beitrag
€ 126 544
Adresse
Hochschulstrasse 1
6850 Dornbirn
Aktivitätstyp
Higher or Secondary Education Establishments
Kontakt Verwaltung
Johannes Edlinger (Dr.)
IMS NANOFABRICATION AG
Österreich
EU-Beitrag
€ 1 069 782
Adresse
Schreygasse 3
1020 Wien
Aktivitätstyp
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Kontakt Verwaltung
Hans Loeschner (Dr.)
DOW SILICONES BELGIUM
Belgien
EU-Beitrag
€ 0
Adresse
Rue Jules Bordet Parc Industriel Zone C
7180 Seneffe
Aktivitätstyp
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Kontakt Verwaltung
Gerard MARQUET (Mr.)
FUJIFILM ELECTRONIC MATERIALS (EUROPE) N. V.
Belgien
EU-Beitrag
€ 24 543
Adresse
Keetberglaan 1A, Havennummer 1061
2070 Zwijndrecht
Aktivitätstyp
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Kontakt Verwaltung
EDDY CEELEN (Mr.)
DELONG INSTRUMENTS AS
Tschechien
EU-Beitrag
€ 851 775
Adresse
Palackeho Tr. 3019/153B
61200 Brno
Aktivitätstyp
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Kontakt Verwaltung
Michal Drsticka (RNDr.)
FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Deutschland
EU-Beitrag
€ 1 856 498
Adresse
Hansastrasse 27C
80686 Munchen
Aktivitätstyp
Research Organisations
Kontakt Verwaltung
Walter KRAUSE (Mr)
GLOBALFOUNDRIES Dresden Module One LLC & Co. KG
Deutschland
EU-Beitrag
€ 43 113
Adresse
Wilschdorfer Landstrasse 101
01109 Dresden
Aktivitätstyp
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Kontakt Verwaltung
Stephan Krueger (Mr.)
INSTITUT FUER MIKROELEKTRONIK STUTTGART
Deutschland
EU-Beitrag
€ 1 000 176
Adresse
Allmandring Strasse 30A
70569 Stuttgart
Aktivitätstyp
Research Organisations
Kontakt Verwaltung
Manfred Salzmann (-)
QIMONDA DRESDEN GMBH & CO.OHG

Beteiligung beendet

Deutschland
EU-Beitrag
€ 199 543
Adresse
Koenigsbruecker Strasse 180
01099 Dresden
Aktivitätstyp
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Kontakt Verwaltung
Uwe Poepping (-)
ASELTA NANOGRAPHICS SA
Frankreich
EU-Beitrag
€ 110 892
Adresse
Parvis Louis Neel 7
38000 Grenoble
Aktivitätstyp
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Kontakt Verwaltung
Olivier PENY (Mr.)
STMICROELECTRONICS CROLLES 2 SAS
Frankreich
EU-Beitrag
€ 374 943
Adresse
Rue Jean Monnet 850
38920 Crolles
Aktivitätstyp
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Kontakt Verwaltung
Guilaine BOSC (Mrs)
SYNOPSYS INTERNATIONAL LIMITED
Irland
EU-Beitrag
€ 764 151
Adresse
Block 1 Blanchardstown Corporate Park
15 Dublin
Aktivitätstyp
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Kontakt Verwaltung
Watchorn Charles (Mr.)
KLA-TENCOR CORPORATION (ISRAEL)
Israel
EU-Beitrag
€ 194 006
Adresse
Hatikshoret St.
23100 Migdal Haemek
Aktivitätstyp
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Kontakt Verwaltung
Adrien Davidson (Mr)
MAPPER LITHOGRAPHY B.V.
Niederlande
EU-Beitrag
€ 3 398 957
Adresse
Computerlaan 15
2628 XK Delft
Aktivitätstyp
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Kontakt Verwaltung
Wim Hofland (Mr.)
Synopsys Armenia CJSC
Armenien
EU-Beitrag
€ 0
Adresse
Arshakunyats 41
0026 Yerevan
Aktivitätstyp
Private for-profit entities (excluding Higher or Secondary Education Establishments)
SYNOPSYS SWITZERLAND LLC
Schweiz
EU-Beitrag
€ 0
Adresse
Thurgauerstrasse 40
8050 Zurich
Aktivitätstyp
Private for-profit entities (excluding Higher or Secondary Education Establishments)
SYNOPSYS GMBH
Deutschland
EU-Beitrag
€ 0
Adresse
Karl Hammerschmidt Str
85609 Aschheim
Aktivitätstyp
Private for-profit entities (excluding Higher or Secondary Education Establishments)
SYNOPSYS NETHERLANDS BV
Niederlande
EU-Beitrag
€ 0
Adresse
St. Odgerusstraat 3
6045 Roermond
Aktivitätstyp
Public bodies (excluding Research Organisations and Secondary or Higher Education Establishments)