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Semiconductor Equipment Assessment Leveraging Innovation

Projektbeschreibung


Nanoelectronics Technology
Seal is an EC-funded project covering semiconductor equipment assessment to strengthen the European semiconductor equipment industry.
SEAL is an integrated project consisting of 17 equipment assessment sub-projects in the area of semiconductor manufacturing equipment. The assessment themes are equally spread amongst processing and metrology equipment, heading beyond the current state-of-the-art both for More Moore and More than Moore applications. The strategic objective of SEAL is to effectively combine efforts, resources and expertise in the joint assessment of novel equipment supported by cross-cut R&D dedicated to the identified needs of the assessment sub-projects. For Lithography, the key areas of illumination systems for mask aligners, EUV mask manufacturing and intelligent overlay management are addressed as well as massively parallel e-beam lithography. In addition, three important processes are addressed: low temperature oxidation, cleaning of sensitive interconnect stacks/structures and ion implantation for ultra shallow junctions and defect engineering. For metrology and analysis, the main focus is on enabling innovative systems to efficiently contribute to at-line and in-line monitoring and control within semiconductor facilities. Without such equipment, it will not be possible to validate progressively advanced processes during development and manufacturing.Cross-cut R&D activities relating to all equipment assessment sub-projects are covered including APC, model based control, equipment simulation, enhanced wafer and equipment logistics, advanced communication and man machine-interfaces, and virtual equipment engineering. A common approach for the assessment activities will be utilised with specifications that will be refined for each equipment type for the progressively emerging technology nodes.Overall SEAL will strengthen the European equipment manufacturing industry in an ideal and sustainable way by combining advanced R&D topics in equipment sub-projects involving a wide community of users, research institutes and equipment suppliers with many SMEs.

Aufforderung zur Vorschlagseinreichung

FP7-ICT-2009-5
Andere Projekte für diesen Aufruf anzeigen

Finanzierungsplan

CP - Collaborative project (generic)

Kontakt Koordinator

Lothar Pfizner (Mr.)

Koordinator

FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Adresse
Hansastrasse 27C
80686 Munchen
Deutschland
Aktivitätstyp
Research Organisations
EU-Beitrag
€ 2 404 635
Kontakt Verwaltung
Andrea Zeumann (Ms.)

Beteiligte (38)

LAM RESEARCH AG

Beteiligung beendet

Österreich
EU-Beitrag
€ 0
Adresse
Sez-strasse 1
9500 Villach
Aktivitätstyp
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Kontakt Verwaltung
Harald Kraus (Mr.)
FACHHOCHSCHULE WIENER NEUSTADT FUR WIRTSCHAFT UND TECHNIK GMBH
Österreich
EU-Beitrag
€ 50 128
Adresse
Johannes Gutenbergstrasse 3
2700 Wiener Neustadt
Aktivitätstyp
Higher or Secondary Education Establishments
Kontakt Verwaltung
Helmut Pfeffer (Mr.)
AMS AG
Österreich
EU-Beitrag
€ 38 875
Adresse
Tobelbaderstrasse 30
8141 Unterpremstaetten
Aktivitätstyp
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Kontakt Verwaltung
Yasmine Pree (Ms.)
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgien
EU-Beitrag
€ 1 260 031
Adresse
Kapeldreef 75
3001 Leuven
Aktivitätstyp
Research Organisations
Kontakt Verwaltung
Christine Van Houtven (Ms.)
Reinhardt Microtech AG
Schweiz
EU-Beitrag
€ 68 078
Adresse
Aeulistrasse
CH - 7323 Wangs
Aktivitätstyp
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Kontakt Verwaltung
Wolfgang Tschanun (Dr.)
SUSS MICROOPTICS SA
Schweiz
EU-Beitrag
€ 145 232
Adresse
Rouges Terres 61
2068 Hauterive
Aktivitätstyp
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Kontakt Verwaltung
Kristina Schulz (Mrs.)
SUSS MicroTec Photomask Equipment GmbH & Co. KG
Deutschland
EU-Beitrag
€ 49 352
Adresse
Ferdinand-von-steinbeis-ring 10
75447 Sternenfels
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Private for-profit entities (excluding Higher or Secondary Education Establishments)
Kontakt Verwaltung
Peter Dreß (Dr.)
ICT Integrated Circuit Testing GmbH
Deutschland
EU-Beitrag
€ 108 000
Adresse
Ammerthalstrasse 20
85551 Heimstetten
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Private for-profit entities (excluding Higher or Secondary Education Establishments)
Kontakt Verwaltung
Marc Gurman (Mr.)
Jenoptik Automatisierungstechnik GmbH
Deutschland
EU-Beitrag
€ 81 412
Adresse
Konrad-zuse-strasse
07745 Jena
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Private for-profit entities (excluding Higher or Secondary Education Establishments)
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Hans-Ulrich Zuehlke (Dr.)
HQ-Dielectrics GmbH
Deutschland
EU-Beitrag
€ 361 400
Adresse
Dornstadter Weg 9/1
89160 Dornstadt
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Private for-profit entities (excluding Higher or Secondary Education Establishments)
Kontakt Verwaltung
Alexander Gschwandtner (Dr.)
Oxford Instruments GmbH
Deutschland
EU-Beitrag
€ 49 733
Adresse
Otto-von-guericke Ring
65205 Wiesbaden
Aktivitätstyp
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Kontakt Verwaltung
Rune Gehrlein (Mr.)
NANDA TECHNOLOGIES GMBH
Deutschland
EU-Beitrag
€ 376 100
Adresse
Lise-meitner-strasse
85716 Unterschleissheim
Aktivitätstyp
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Kontakt Verwaltung
Johannes von Borries (Mr.)
Landshut Silicon Foundry GmbH

Beteiligung beendet

Deutschland
EU-Beitrag
€ 31 800
Adresse
Jenaerstrasse 1
84034 Landshut
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Private for-profit entities (excluding Higher or Secondary Education Establishments)
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Elke Heilmeier (Ms.)
Fries Research & Technology GmbH
Deutschland
EU-Beitrag
€ 89 660
Adresse
Friedrich-ebert-straße
51429 Bergisch Gladbach
Aktivitätstyp
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Kontakt Verwaltung
Thomas Fries (Dr.)
SUSS MicroTec

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Deutschland
EU-Beitrag
€ 0
Adresse
Schleissheimerstrasse 90
85748 Garching
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Private for-profit entities (excluding Higher or Secondary Education Establishments)
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Markus Gabriel (Mr.)
INFINEON TECHNOLOGIES AG
Deutschland
EU-Beitrag
€ 274 985
Adresse
Am Campeon 1-15
85579 Neubiberg
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Private for-profit entities (excluding Higher or Secondary Education Establishments)
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Bernhard Scholz (Mr.)
Protec Carrier Systems GmbH
Deutschland
EU-Beitrag
€ 149 999
Adresse
Birlenbacher Strasse
57078 Siegen
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Private for-profit entities (excluding Higher or Secondary Education Establishments)
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Sebastian Wagner (Mr.)
SILTRONIC AG
Deutschland
EU-Beitrag
€ 103 516
Adresse
Einsteinstrasse 172
81677 Munchen
Aktivitätstyp
Private for-profit entities (excluding Higher or Secondary Education Establishments)
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Thomas Renner (Dr.)
GLOBALFOUNDRIES Dresden Module One LLC & Co. KG
Deutschland
EU-Beitrag
€ 114 420
Adresse
Wilschdorfer Landstrasse 101
01109 Dresden
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Private for-profit entities (excluding Higher or Secondary Education Establishments)
Kontakt Verwaltung
Petra Hetzer (Ms.)
ACP - ADVANCED CLEAN PRODUCTION GMBH
Deutschland
EU-Beitrag
€ 123 000
Adresse
Rontgenstrasse 30
73730 Esslingen
Aktivitätstyp
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Kontakt Verwaltung
Josef Gentischer (Mr.)
PVA TEPLA ANALYTICAL SYSTEMS GMBH
Deutschland
EU-Beitrag
€ 405 758
Adresse
Deutschordenstrasse 38
73463 Westhausen
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Private for-profit entities (excluding Higher or Secondary Education Establishments)
Kontakt Verwaltung
Peter Czurratis (Dr.)
SUSS MicroTec Lithography GmbH
Deutschland
EU-Beitrag
€ 180 533
Adresse
Schleissheimer Strasse 90
85748 Garching
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Private for-profit entities (excluding Higher or Secondary Education Establishments)
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Susanne Mölter (Ms.)
FUNDACIO INSTITUT CATALA DE NANOCIENCIA I NANOTECNOLOGIA
Spanien
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€ 50 555
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Campus De La Uab Edifici Q Icn2
08193 Bellaterra (Barcelona)
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Stella Veciana (Dr.)
COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
Frankreich
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€ 863 267
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Rue Leblanc 25
75015 Paris 15
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Marie-Laure Page (Ms.)
STMICROELECTRONICS CROLLES 2 SAS
Frankreich
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€ 202 401
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Rue Jean Monnet 850
38920 Crolles
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Dominique Goubier (Mr.)
PFEIFFER VACUUM
Frankreich
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€ 132 224
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98 Avenue De Brogny
74000 Annecy
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JACQUES DE SAINT TRIVIER (Mr.)
ION BEAM SERVICES
Frankreich
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€ 215 986
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Rue Gaston Imbert Prolongee
13790 Rousset
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Frank TORREGROSA (Dr.)
SOITEC SA

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Frankreich
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€ 0
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Chemin Des Franques - Parc Technologique Des Fontaines
38190 Bernin
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Robert Langer (Dr.)
TOPPAN PHOTOMASKS FRANCE SAS
Frankreich
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€ 85 437
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Rousset Parc Club, Avenue Francis Perrin 118
13106 Rousset
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MICHEL TISSIER (Dr.)
SEMILAB FELVEZETO FIZIKAI LABORATORIUM ZARTKORUEN MUKODO RESZVENYTARSASAG
Ungarn
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€ 93 250
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Prielle Kornelia Utca 4/A.
1117 Budapest
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Private for-profit entities (excluding Higher or Secondary Education Establishments)
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Anita Farkasinszki (Ms.)
APPLIED MATERIALS ISRAEL LTD
Israel
EU-Beitrag
€ 413 000
Adresse
Oppenheimer Street 9
76705 Rehovot
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Yoram Uziel (Mr.)
KLA-TENCOR CORPORATION (ISRAEL)
Israel
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€ 85 625
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Hatikshoret St.
23100 Migdal Haemek
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Daniel Kandel (Dr.)
MEMC ELECTRONIC MATERIALS SPA
Italien
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€ 22 500
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Viale Gherzi
28100 Novara
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Fabrizio Viker (Mr.)
Numonyx Italy Srl
Italien
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€ 55 720
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Via Camillo Olivetti 2
20864 Agrate Brianza
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MANUELA SEMINARA (Ms.)
MAPPER LITHOGRAPHY B.V.
Niederlande
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€ 81 675
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Computerlaan 15
2628 XK Delft
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Bert Jan Kampherbeek (Mr.)
Metryx Ltd
United Kingdom
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€ 331 668
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Unit 2 A, Manor Park, Nailsea Wall Lane
BS48 4DD Nailsea
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Mark Berry (Mr.)
THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK
Vereinigte Staaten
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€ 0
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State Street 35
12201 Albany Ny
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Other
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Michael Liehr (Prof.)
Intel Corporation
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€ 0
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Orange Street
19801 Wilmington New Castle De
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Gilroy Vandentop (Dr.)