Skip to main content
Przejdź do strony domowej Komisji Europejskiej (odnośnik otworzy się w nowym oknie)
polski polski
CORDIS - Wyniki badań wspieranych przez UE
CORDIS
CORDIScovery podcast 50th episode CORDIScovery podcast 50th episode
Zawartość zarchiwizowana w dniu 2024-06-18

Semiconductor Equipment Assessment Leveraging Innovation

Opis projektu


Nanoelectronics Technology
Seal is an EC-funded project covering semiconductor equipment assessment to strengthen the European semiconductor equipment industry.
SEAL is an integrated project consisting of 17 equipment assessment sub-projects in the area of semiconductor manufacturing equipment. The assessment themes are equally spread amongst processing and metrology equipment, heading beyond the current state-of-the-art both for More Moore and More than Moore applications. The strategic objective of SEAL is to effectively combine efforts, resources and expertise in the joint assessment of novel equipment supported by cross-cut R&D dedicated to the identified needs of the assessment sub-projects. For Lithography, the key areas of illumination systems for mask aligners, EUV mask manufacturing and intelligent overlay management are addressed as well as massively parallel e-beam lithography. In addition, three important processes are addressed: low temperature oxidation, cleaning of sensitive interconnect stacks/structures and ion implantation for ultra shallow junctions and defect engineering. For metrology and analysis, the main focus is on enabling innovative systems to efficiently contribute to at-line and in-line monitoring and control within semiconductor facilities. Without such equipment, it will not be possible to validate progressively advanced processes during development and manufacturing.Cross-cut R&D activities relating to all equipment assessment sub-projects are covered including APC, model based control, equipment simulation, enhanced wafer and equipment logistics, advanced communication and man machine-interfaces, and virtual equipment engineering. A common approach for the assessment activities will be utilised with specifications that will be refined for each equipment type for the progressively emerging technology nodes.Overall SEAL will strengthen the European equipment manufacturing industry in an ideal and sustainable way by combining advanced R&D topics in equipment sub-projects involving a wide community of users, research institutes and equipment suppliers with many SMEs.

SEAL is a project for an integrated project consisting of 17 equipment assessment sub-projects in the area of semiconductor manufacturing equipment. The assessment themes are equally spread amongst processing and metrology equipment, heading beyond the current state-of-the-art both for More Moore and More than Moore applications. The strategic objective of SEAL is to effectively combine efforts, resources and expertise in the joint assessment of novel equipment supported by cross-cut R&D dedicated to the identified needs of the assessment sub-projects.For Lithography, the key areas of illumination systems for mask aligners, EUV mask manufacturing and intelligent overlay management are addressed as well as massively parallel e-beam lithography. In addition, three important processes are addressed: low temperature oxidation, cleaning of sensitive interconnect stacks/structures and ion implantation for ultra shallow junctions and defect engineering. For metrology and analysis, the main focus is on enabling innovative systems to efficiently contribute to at-line and in-line monitoring and control within semiconductor facilities. Without such equipment, it will not be possible to validate progressively advanced processes during development and manufacturing.Cross-cut R&D activities relating to all equipment assessment sub-projects are covered including APC, model based control, equipment simulation, enhanced wafer and equipment logistics, advanced communication and man machine-interfaces, and virtual equipment engineering. A common approach for the assessment activities will be utilised with specifications that will be refined for each equipment type for the progressively emerging technology nodes.Overall SEAL will strengthen the European equipment manufacturing industry in an ideal and sustainable way by combining advanced R&D topics in equipment sub-projects involving a wide community of users, research institutes and equipment suppliers with many SMEs.

Dziedzina nauki (EuroSciVoc)

Klasyfikacja projektów w serwisie CORDIS opiera się na wielojęzycznej taksonomii EuroSciVoc, obejmującej wszystkie dziedziny nauki, w oparciu o półautomatyczny proces bazujący na technikach przetwarzania języka naturalnego. Więcej informacji: https://op.europa.eu/pl/web/eu-vocabularies/euroscivoc.

Aby użyć tej funkcji, musisz się zalogować lub zarejestrować

Program(-y)

Wieloletnie programy finansowania, które określają priorytety Unii Europejskiej w obszarach badań naukowych i innowacji.

Temat(-y)

Zaproszenia do składania wniosków dzielą się na tematy. Każdy temat określa wybrany obszar lub wybrane zagadnienie, których powinny dotyczyć wnioski składane przez wnioskodawców. Opis tematu obejmuje jego szczegółowy zakres i oczekiwane oddziaływanie finansowanego projektu.

Zaproszenie do składania wniosków

Procedura zapraszania wnioskodawców do składania wniosków projektowych w celu uzyskania finansowania ze środków Unii Europejskiej.

FP7-ICT-2009-5
Zobacz inne projekty w ramach tego zaproszenia

System finansowania

Program finansowania (lub „rodzaj działania”) realizowany w ramach programu o wspólnych cechach. Określa zakres finansowania, stawkę zwrotu kosztów, szczegółowe kryteria oceny kwalifikowalności kosztów w celu ich finansowania oraz stosowanie uproszczonych form rozliczania kosztów, takich jak rozliczanie ryczałtowe.

CP - Collaborative project (generic)

Koordynator

FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV
Wkład UE
€ 2 404 635,00
Adres
HANSASTRASSE 27C
80686 MUNCHEN
Niemcy

Zobacz na mapie
Region
Bayern Oberbayern München, Kreisfreie Stadt
Rodzaj działalności
Research Organisations
Linki
Koszt całkowity

Ogół kosztów poniesionych przez organizację w związku z uczestnictwem w projekcie. Obejmuje koszty bezpośrednie i pośrednie. Kwota stanowi część całkowitego budżetu projektu.
Brak danych

Uczestnicy (38)

Udostępnij tę stronę Udostępnij tę stronę w mediach społecznościowych

Pobierz Pobierz zawartość strony

Ostatnia aktualizacja: 1 Sierpnia 2019

Moja broszura

Permalink: https://cordis.europa.eu/project/id/257379/pl

European Union, 2025

Moja broszura 0 0