3D Silicon Micromachining with Infrared ultrafast LasErs

Project Information

SMILE

Grant agreement ID: 660769

DOI

10.3030/660769

Project closed

EC signature date 27 March 2015

Start date 30 September 2015

End date 29 September 2017

Funded under

• EXCELLENT SCIENCE - Marie Skłodowska-Curie Actions

Total cost

€ 145 845,60

EU contribution

€ 145 845,60

Coordinated by

BILKENT UNIVERSITESI VAKIF
Türkiye

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Publications

Peer reviewed articles (2)

Femtosecond laser written waveguides deep inside silicon

Author(s): I. Pavlov, O. Tokel, S. Pavlova, V. Kadan, G. Makey, A. Turnali, Ö. Yavuz, F. Ö. Ilday
Published in: Optics Letters, Issue 42/15, 2017, Page(s) 3028, ISSN 0146-9592
Publisher: Optical Society of America
DOI: 10.1364/OL.42.003028

In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon

Author(s): Onur Tokel, Ahmet Turnalı, Ghaith Makey, Parviz Elahi, Tahir Çolakoğlu, Emre Ergeçen, Özgün Yavuz, René Hübner, Mona Zolfaghari Borra, Ihor Pavlov, Alpan Bek, Raşit Turan, Denizhan Koray Kesim, Serhat Tozburun, Serim Ilday, F. Ömer Ilday
Published in: Nature Photonics, Issue 11/10, 2017, Page(s) 639-645, ISSN 1749-4885
Publisher: Nature Pub. Group
DOI: 10.1038/s41566-017-0004-4