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3D Silicon Micromachining with Infrared ultrafast LasErs


Femtosecond laser written waveguides deep inside silicon

Author(s): I. Pavlov, O. Tokel, S. Pavlova, V. Kadan, G. Makey, A. Turnali, Ö. Yavuz, F. Ö. Ilday
Published in: Optics Letters, Issue 42/15, 2017, Page(s) 3028, ISSN 0146-9592
Publisher: Optical Society of America
DOI: 10.1364/OL.42.003028

In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon

Author(s): Onur Tokel, Ahmet Turnalı, Ghaith Makey, Parviz Elahi, Tahir Çolakoğlu, Emre Ergeçen, Özgün Yavuz, René Hübner, Mona Zolfaghari Borra, Ihor Pavlov, Alpan Bek, Raşit Turan, Denizhan Koray Kesim, Serhat Tozburun, Serim Ilday, F. Ömer Ilday
Published in: Nature Photonics, Issue 11/10, 2017, Page(s) 639-645, ISSN 1749-4885
Publisher: Nature Pub. Group
DOI: 10.1038/s41566-017-0004-4

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