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CORDIS

3D Silicon Micromachining with Infrared ultrafast LasErs

CORDIS provides links to public deliverables and publications of HORIZON projects.

Links to deliverables and publications from FP7 projects, as well as links to some specific result types such as dataset and software, are dynamically retrieved from OpenAIRE .

Publications

Femtosecond laser written waveguides deep inside silicon (opens in new window)

Author(s): I. Pavlov, O. Tokel, S. Pavlova, V. Kadan, G. Makey, A. Turnali, Ö. Yavuz, F. Ö. Ilday
Published in: Optics Letters, Issue 42/15, 2017, Page(s) 3028, ISSN 0146-9592
Publisher: Optical Society of America
DOI: 10.1364/OL.42.003028

In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon (opens in new window)

Author(s): Onur Tokel, Ahmet Turnalı, Ghaith Makey, Parviz Elahi, Tahir Çolakoğlu, Emre Ergeçen, Özgün Yavuz, René Hübner, Mona Zolfaghari Borra, Ihor Pavlov, Alpan Bek, Raşit Turan, Denizhan Koray Kesim, Serhat Tozburun, Serim Ilday, F. Ömer Ilday
Published in: Nature Photonics, Issue 11/10, 2017, Page(s) 639-645, ISSN 1749-4885
Publisher: Nature Pub. Group
DOI: 10.1038/s41566-017-0004-4

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