3D Advanced Metrology and materials for advanced devices

Información del proyecto

3DAM

Identificador del acuerdo de subvención: 692527

DOI 10.3030/692527

Proyecto cerrado

Fecha de la firma de la CE 14 Abril 2016

Fecha de inicio 1 Abril 2016

Fecha de finalización 31 Marzo 2019

Financiado con arreglo a

• INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies - Information and Communication Technologies (ICT)

Coste total € 23 055 897,50

Aportación de la UE € 6 463 826,63

Coordinado por

FEI ELECTRON OPTICS BV
Netherlands

Resultado final

Websites, patent fillings, videos etc. (3)

Workshops year 2 and publication of presented material

•Program: Review of the R&D activities on stand-alone techniques of the first two 3DAM years •Authors: specialists of the 3DAM partner companies, academia and research institutes. •Timing: April 2018, right after the imec Partner Technical Week •Place: imec premises •Publication: => HD video recording of the lecturer, synchronized with a HD screen-recording of the presentation slides => PDF versions of the presentations will also be available => The result is a set of technical/scientific presentations open to the public, and on-line accessible on any device (laptop, tablet) through the Imec Academy streaming facilities •Participants: open to the public after registration at Imec Academy

Workshops year 1 and publication of presented material

•Program: reviews of the 2016 state-of-the-art of metrology and characterization techniques relevant for 3DAM •Authors: specialists from the 3DAM partner companies. •Timing: April 2017, right after the imec Partner Technical Week •Place: imec premises •Publication: => HD video recording of the lecturer, synchronized with a HD screen-recording of the presentation slides => PDF versions of the presentations will also be available => The result is an e-learning package which can be used as a tutorial on HVM metrology, open to the public, and on-line accessible on any device (laptop, tablet) through the Imec Academy streaming facilities •Participants: open to the public after registration at Imec Academy

Workshops year 3 and publication of presented material

•Program: Review of the hybrid/correlative techniques as from the results obtained during 3DAM •Authors: specialists from the 3DAM partner companies. •Timing: March 2019 •Place: MINATEC Grenoble •Publication: => PDF versions of the presentations will be available for the participant at the workshop •Participants: open to the public after registration

Publicaciones

Peer reviewed articles (7)

Electrical characterization of single nanometer-wide Si fins in dense arrays

Autores: Steven Folkersma, Janusz Bogdanowicz, Andreas Schulze, Paola Favia, Dirch H Petersen, Ole Hansen, Henrik H Henrichsen, Peter F Nielsen, Lior Shiv, Wilfried Vandervorst
Publicado en: Beilstein Journal of Nanotechnology, Edición 9, 2018, Página(s) 1863-1867, ISSN 2190-4286
Editor: Beilstein-Institut Zur Forderung der Chemischen Wissenschaften
DOI: 10.3762/bjnano.9.178

Quality assessment of terahertz time-domain spectroscopy transmission and reflection modes for graphene conductivity mapping

Autores: David M. A. Mackenzie, Patrick R. Whelan, Peter Bøggild, Peter Uhd Jepsen, Albert Redo-Sanchez, David Etayo, Norbert Fabricius, Dirch Hjorth Petersen
Publicado en: Optics Express, Edición 26/7, 2018, Página(s) 9220, ISSN 1094-4087
Editor: Optical Society of America
DOI: 10.1364/oe.26.009220

Quality assessment of graphene: Continuity, uniformity, and accuracy of mobility measurements

Autores: David M. A. Mackenzie, Jonas D. Buron, Patrick R. Whelan, José M. Caridad, Martin Bjergfelt, Birong Luo, Abhay Shivayogimath, Anne L. Smitshuysen, Joachim D. Thomsen, Timothy J. Booth, Lene Gammelgaard, Johanna Zultak, Bjarke S. Jessen, Peter Bøggild, Dirch H. Petersen
Publicado en: Nano Research, Edición 10/10, 2017, Página(s) 3596-3605, ISSN 1998-0124
Editor: Tsinghua Univ Press
DOI: 10.1007/s12274-017-1570-y

Breakthrough in current-in-plane tunneling measurement precision by application of multi-variable fitting algorithm

Autores: Alberto Cagliani, Frederik W. Østerberg, Ole Hansen, Lior Shiv, Peter F. Nielsen, Dirch H. Petersen
Publicado en: Review of Scientific Instruments, Edición 88/9, 2017, Página(s) 095005, ISSN 0034-6748
Editor: American Institute of Physics
DOI: 10.1063/1.4989994

Qualitative analysis of scanning gate microscopy on epitaxial graphene

Autores: David M A Mackenzie, Vishal Panchal, Héctor Corte-León, Dirch H Petersen, Olga Kazakova
Publicado en: 2D Materials, Edición 6/2, 2019, Página(s) 025023, ISSN 2053-1583
Editor: IOP Publishing Ltd
DOI: 10.1088/2053-1583/ab0572

Electrical Homogeneity Mapping of Epitaxial Graphene on Silicon Carbide

Autores: Patrick R. Whelan, Vishal Panchal, Dirch H. Petersen, David M. A. Mackenzie, Christos Melios, Iwona Pasternak, John Gallop, Frederik W. Østerberg, Peter U. Jepsen, Wlodek Strupinski, Olga Kazakova, Peter Bøggild
Publicado en: ACS Applied Materials & Interfaces, Edición 10/37, 2018, Página(s) 31641-31647, ISSN 1944-8244
Editor: American Chemical Society
DOI: 10.1021/acsami.8b11428

Anisotropic stress in narrow sGe fin field-effect transistor channels measured using nano-focused Raman spectroscopy

Autores: T. Nuytten, J. Bogdanowicz, L. Witters, G. Eneman, T. Hantschel, A. Schulze, P. Favia, H. Bender, I. De Wolf, W. Vandervorst
Publicado en: APL Materials, Edición 6/5, 2018, Página(s) 058501, ISSN 2166-532X
Editor: APL Materials
DOI: 10.1063/1.4999277

Derechos de propiedad intelectual

Patent (2)

Multi mode system with a dispersion x-ray detector

Número de solicitud/publicación: USPTO for US20180012728A1 Application for US20180012728A1
Fecha: 2018-01-11
Solicitante(s): APPLIED MATERIALS ISRAEL LTD

Xray shielding with improved vacuum conductivity

Número de solicitud/publicación: US US 16/106,914
Fecha: 2018-08-21
Solicitante(s): FEI ELECTRON OPTICS BV