3D Advanced Metrology and materials for advanced devices

Informations projet

3DAM

N° de convention de subvention: 692527

DOI 10.3030/692527

Projet clôturé

Date de signature de la CE 14 Avril 2016

Date de début 1 Avril 2016

Date de fin 31 Mars 2019

Financé au titre de

• INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies - Information and Communication Technologies (ICT)

Coût total € 23 055 897,50

Contribution de l’UE € 6 463 826,63

Coordonné par

FEI ELECTRON OPTICS BV
Netherlands

Livrables

Websites, patent fillings, videos etc. (3)

Workshops year 2 and publication of presented material

•Program: Review of the R&D activities on stand-alone techniques of the first two 3DAM years •Authors: specialists of the 3DAM partner companies, academia and research institutes. •Timing: April 2018, right after the imec Partner Technical Week •Place: imec premises •Publication: => HD video recording of the lecturer, synchronized with a HD screen-recording of the presentation slides => PDF versions of the presentations will also be available => The result is a set of technical/scientific presentations open to the public, and on-line accessible on any device (laptop, tablet) through the Imec Academy streaming facilities •Participants: open to the public after registration at Imec Academy

Workshops year 1 and publication of presented material

•Program: reviews of the 2016 state-of-the-art of metrology and characterization techniques relevant for 3DAM •Authors: specialists from the 3DAM partner companies. •Timing: April 2017, right after the imec Partner Technical Week •Place: imec premises •Publication: => HD video recording of the lecturer, synchronized with a HD screen-recording of the presentation slides => PDF versions of the presentations will also be available => The result is an e-learning package which can be used as a tutorial on HVM metrology, open to the public, and on-line accessible on any device (laptop, tablet) through the Imec Academy streaming facilities •Participants: open to the public after registration at Imec Academy

Workshops year 3 and publication of presented material

•Program: Review of the hybrid/correlative techniques as from the results obtained during 3DAM •Authors: specialists from the 3DAM partner companies. •Timing: March 2019 •Place: MINATEC Grenoble •Publication: => PDF versions of the presentations will be available for the participant at the workshop •Participants: open to the public after registration

Publications

Peer reviewed articles (7)

Electrical characterization of single nanometer-wide Si fins in dense arrays

Auteurs: Steven Folkersma, Janusz Bogdanowicz, Andreas Schulze, Paola Favia, Dirch H Petersen, Ole Hansen, Henrik H Henrichsen, Peter F Nielsen, Lior Shiv, Wilfried Vandervorst
Publié dans: Beilstein Journal of Nanotechnology, Numéro 9, 2018, Page(s) 1863-1867, ISSN 2190-4286
Éditeur: Beilstein-Institut Zur Forderung der Chemischen Wissenschaften
DOI: 10.3762/bjnano.9.178

Quality assessment of terahertz time-domain spectroscopy transmission and reflection modes for graphene conductivity mapping

Auteurs: David M. A. Mackenzie, Patrick R. Whelan, Peter Bøggild, Peter Uhd Jepsen, Albert Redo-Sanchez, David Etayo, Norbert Fabricius, Dirch Hjorth Petersen
Publié dans: Optics Express, Numéro 26/7, 2018, Page(s) 9220, ISSN 1094-4087
Éditeur: Optical Society of America
DOI: 10.1364/oe.26.009220

Quality assessment of graphene: Continuity, uniformity, and accuracy of mobility measurements

Auteurs: David M. A. Mackenzie, Jonas D. Buron, Patrick R. Whelan, José M. Caridad, Martin Bjergfelt, Birong Luo, Abhay Shivayogimath, Anne L. Smitshuysen, Joachim D. Thomsen, Timothy J. Booth, Lene Gammelgaard, Johanna Zultak, Bjarke S. Jessen, Peter Bøggild, Dirch H. Petersen
Publié dans: Nano Research, Numéro 10/10, 2017, Page(s) 3596-3605, ISSN 1998-0124
Éditeur: Tsinghua Univ Press
DOI: 10.1007/s12274-017-1570-y

Breakthrough in current-in-plane tunneling measurement precision by application of multi-variable fitting algorithm

Auteurs: Alberto Cagliani, Frederik W. Østerberg, Ole Hansen, Lior Shiv, Peter F. Nielsen, Dirch H. Petersen
Publié dans: Review of Scientific Instruments, Numéro 88/9, 2017, Page(s) 095005, ISSN 0034-6748
Éditeur: American Institute of Physics
DOI: 10.1063/1.4989994

Qualitative analysis of scanning gate microscopy on epitaxial graphene

Auteurs: David M A Mackenzie, Vishal Panchal, Héctor Corte-León, Dirch H Petersen, Olga Kazakova
Publié dans: 2D Materials, Numéro 6/2, 2019, Page(s) 025023, ISSN 2053-1583
Éditeur: IOP Publishing Ltd
DOI: 10.1088/2053-1583/ab0572

Electrical Homogeneity Mapping of Epitaxial Graphene on Silicon Carbide

Auteurs: Patrick R. Whelan, Vishal Panchal, Dirch H. Petersen, David M. A. Mackenzie, Christos Melios, Iwona Pasternak, John Gallop, Frederik W. Østerberg, Peter U. Jepsen, Wlodek Strupinski, Olga Kazakova, Peter Bøggild
Publié dans: ACS Applied Materials & Interfaces, Numéro 10/37, 2018, Page(s) 31641-31647, ISSN 1944-8244
Éditeur: American Chemical Society
DOI: 10.1021/acsami.8b11428

Anisotropic stress in narrow sGe fin field-effect transistor channels measured using nano-focused Raman spectroscopy

Auteurs: T. Nuytten, J. Bogdanowicz, L. Witters, G. Eneman, T. Hantschel, A. Schulze, P. Favia, H. Bender, I. De Wolf, W. Vandervorst
Publié dans: APL Materials, Numéro 6/5, 2018, Page(s) 058501, ISSN 2166-532X
Éditeur: APL Materials
DOI: 10.1063/1.4999277

Droits de propriété intellectuelle

Patent (2)

Multi mode system with a dispersion x-ray detector

Numéro de demande/publication: USPTO for US20180012728A1 Application for US20180012728A1
Date: 2018-01-11
Demandeur(s): APPLIED MATERIALS ISRAEL LTD

Xray shielding with improved vacuum conductivity

Numéro de demande/publication: US US 16/106,914
Date: 2018-08-21
Demandeur(s): FEI ELECTRON OPTICS BV