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A Complimentary Inspection Technique based on Computer Tomography and Plenoptic Camera for MEMS Components

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An Outline of a Complementary Inspection System for Micro-Electro-Mechanical System (MEMS) Devices Based on Radiography and Plenoptic Camera

Auteurs: Alvin CHONG, Guojin FENG, Jamil KANFOUD and Tat-Hean GAN
Publié dans: Advances in Transdisciplinary Engineering, Volume 8: Advances in Manufacturing Technology XXXII, 2018, Page(s) 33 - 38, ISSN 2352-751X
Éditeur: IOS Press
DOI: 10.3233/978-1-61499-902-7-33