Project description
Novel metrology technologies to revolutionise the European semiconductor industry
Metrology is the eyes and ears of many industries including the semiconductor. For any electronic measurement system, there is a trade-off between the sensitivity, precision and accuracy. The EU-funded MADEin4 project will develop novel solutions Industry 4.0 solutions for the European semiconductor manufacturing industry to overcome this barrier. Connecting nearly 50 European manufacturers and research and technology organisations, the project is working on advanced and highly connected cyber physical systems using a novel Industry 4.0 approach that combines metrology data analysis and design with machine learning methodologies and digital twinning. Designed to drive European semiconductor and automotive industry growth, MADEin4 will facilitate manufacturers’ pre-commercial access to test samples by connecting them with large research and technology organisations.
Objective
The metrology domain (which could be considered as the ‘eyes and ears’ for both R&D&I and production) is a key enabler for productivity enhancements in many industries across the electronic components and system (ECS) value chain and have to be an integral part of any Cyber Physical Systems (CPS) which consist of metrology equipment, virtual metrology or Industrial internet of things (IIoT) sensors, edge and high-performance computing (HPC). The requirements from the metrology is to support ALL process steps toward the final product. However, for any given ECS technology, there is a significant trade-off between the metrology sensitivity, precision and accuracy to its productivity. MADEin4 address this deficiency by focusing on two productivity boosters which are independent from the sensitivity, precision and accuracy requirements: • Productivity booster 1: High throughput, next generation metrology and inspection tools development for the nanoelectronics industry (all nodes down to 5nm). This booster will be developed by the metrology equipment’s manufacturers and demonstrated in an industry 4.0 pilot line at imec and address the ECS equipment, materials and manufacturing major challenges (MASP Chapter 15, major challenges 1 – 3). • Productivity booster 2: CPS development which combines Machine Learning (ML) of design (EDA) and metrology data for predictive diagnostics of the process and tools performances predictive diagnostics of the process and tools performances (predictive yield and tools performance). This booster will be developed and demonstrated in an industry 4.0 pilot line at imec, for the 5nm node, by the EDA, computing and metrology partners (MASP Chapter 15, major challenge 4). The same CPS concept will be demonstrated for the ‘digital industries’ two major challenges of the nanoelectronics (all nodes down to 5nm) and automotive end user’s partners (MASP Chapter 9, major challenges 1and 3).
Fields of science
- natural sciencescomputer and information sciencesinternet
- social scienceseconomics and businesseconomicsproduction economicsproductivity
- engineering and technologyelectrical engineering, electronic engineering, information engineeringelectronic engineeringsensors
- natural sciencescomputer and information sciencesartificial intelligencemachine learning
- engineering and technologynanotechnologynanoelectronics
Keywords
Programme(s)
Topic(s)
Funding Scheme
IA - Innovation actionCoordinator
76705 Rehovot
Israel
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Participants (48)
92700 Colombes
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90556 Cadolzburg
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8020 Graz
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9438311 Jerusalem
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
2306990 Migdal Haemek
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75794 Paris
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10095 Grugliasco
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75015 PARIS 15
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00185 Roma
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34000 Montpellier
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
164 40 Kista
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
5651 GG Eindhoven
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10135 Torino
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Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.
10043 Orbassano
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2628 AK Delft
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
01109 Dresden
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3001 Heverlee
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91120 Palaiseau
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85551 Heimstetten
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3001 Leuven
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31500 Toulouse
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
23100 Migdal Haemek
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8010 Graz
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
20692 Yokneam
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92360 Meudon La Foret
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20692 Yokneam
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3047 AT Rotterdam
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
2595 DA Den Haag
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76100 REHOVOT
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75002 Paris
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
74000 Annecy
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38116 Braunschweig
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10129 Torino
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5692 EM Son
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73463 Westhausen
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10587 Berlin
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
1117 BUDAPEST
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38920 Crolles
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Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.
37100 Tours
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13790 Rousset
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20864 Agrate Brianza
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2628 CN Delft
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5612 AE Eindhoven
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28199 Bremen
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23105 Migdal Haemek
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13284 Marseille
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38330 Montbonnot-Saint-Martin
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
060042 Bucharest
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