This report describes the progress at M48 of the 2D Experimental Pilot Line (2D-EPL) project, which is the project’s fourth and final year. After the close of the Core 3 Graphene Flagship project in September 2023, the 2D-EPL was integrated into the Graphene Flagship in Horizon Europe, connected via the GrapheneEU CSA.
During this period, we have progressed in our activities to meet the project’s overall objectives. We kept building on the foundations to realise a European ecosystem for prototype production of Graphene Related Materials (GRM) based electronics, sensors and photonics, and took steps to ensure a sustainable future of the project.
To reach this goal, tool vendors have fabricated the designed tools, which have been installed at IMEC to be used for GRM integration. Another tool is in preparation for shipment to the pilot line site IMEC and one more tool is being finalized for delivery to GSEMI. Recognised materials suppliers have continued to supply their standard materials and newly developed materials to mature the process further. The use of the new tools and materials are being tested, evaluated, and are undergoing continuous improvement within the framework of the project. These iterations for improvement allow us to further transition from lab to fab in accordance with semiconductor industry standards.
Wafer-level integration solutions are in continuous development and their progress is being mapped by wafer mapping protocols. The relevant new processes are embedded in the new prototyping service offerings. The 2D-EPL has offered tailored, designed GRM integration services and has delivered the fabricated chips from the first three multi project wafer (MPW) runs. Wafers from two other MPW runs are still in fabrication, and one MPW run remains open after the close of the project. Due to its success, two additional calls were launched in addition to the four planned at the project start.
