SiC_Scope is a cutting-edge inspection equipment designed to detect internal defects in raw, unprocessed SiC crystals. SiC is an essential material for producing green electronics, and its unique properties make it more efficient and sustainable than traditional silicon-based materials. The SiC crystal possesses higher breakdown voltage and thermal conductivity, making it perfect for high-temperature and high-voltage applications like electric vehicles.
However, ensuring that SiC crystals are free of defects is a major challenge in using SiC for electronics. SiC_Scope addresses this issue by providing an innovative 3D scanning tool that enables inspection of raw SiC crystals for revealing defects before wafer processing. The SiC_Scope employs index-matching fluids, confocal tomography, and specialized software to extract defects and automate the inspection process. The early-stage defects detection not only saves time and resources but also guarantees that only high-quality material is used in the production process, reducing costs and enhancing the efficiency of semiconductor manufacturing.
Before the SiC_Scope, traditional SiC inspection methods required slicing the crystal into wafers and then visualizing defects in each wafer using chemical etching or a wafer inspection technique. This was a costly and time-consuming process, and determining the location of defects was not feasible without pre-processing. The SiC_Scope eliminates pre-processing by detecting defects before wafering, saving time and resources while ensuring that only the highest quality material enters the costly wafering stage.
The data collected by the SiC_Scope is objective and does not require human intervention, allowing crystal growers and furnace manufacturers to establish the relationship between furnace parameters and the number, location, and type of crystal defects. This information can be used to optimize the production process and reduce the number of defective crystals.
The scanner can inspect SiC pucks from 4" to 12" in diameter, covering over 95% of the world's SiC production. The use of SiC_Scope enables the production of higher quality SiC at an affordable cost, improving the performance and efficiency of electronic devices, reducing energy consumption and carbon emissions. In addition, optimising the production process can reduce waste and lower the overall cost of green electronics, making them more accessible to a wider range of consumers.
