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Magnetic alignment for high precision 3D assembly

Project description

Magnetic alignment could boost performance of 3D integrated circuits

Three-dimensional (3D) integrated circuits offer a way to continue the trend of compact and powerful microelectronic devices by stacking 2D dies and connecting them in the third dimension. 3D integration promises many significant benefits including heterogeneous integration of components and increased data transfer bandwidth in a memory device stacked on top of the processor. In the chip-to-wafer bonding process, the number of interchip interconnects is limited by the accuracy of the alignment process. Current alignment methods rely on optical alignment techniques that have poor resolution and therefore limit the bandwidth of interchip communication. The EU-funded MAGALIGN project plans to use a novel magnetic alignment approach based on nanomagnetism and spin electronics that could yield unprecedented alignment accuracy during wafer bonding.

Objective

In microelectronics, 3D integration and assembly definitely appears as a very efficient option to achieve highly integrated chips. It offers major benefits such as combining heterogeneous technologies, combining high-performance and low-power chips, increasing data transfer bandwidth in memory above logic circuits, etc. 3D assembly is realized by bonding two wafers or chips face to face on a wafer. In this bonding process, the number of interchips interconnects is limited by the accuracy of the alignment process. Presently, alignment methods rely on optical alignment techniques which offer ±0.2m resolution for wafer-to-wafer bonding or only ±1m resolution for die-to-wafer bonding. This is relatively poor and limit the density of interconnects and therefore the bandwidth of interchip communication. In this ERC PoC project, we intend to establish the viability of a novel magnetic alignment approach based on nanomagnetism and spin electronics which could yield unprecedented accuracy in alignment during wafer bonding.
The goals of MAGALIGN are i) to make a proof of concept of this novel alignment method, ii) optimize it and develop the design tools to exploit it, iii) Develop industrialization strategy.

Host institution

COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
Net EU contribution
€ 150 000,00
Address
RUE LEBLANC 25
75015 PARIS 15
France

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Region
Ile-de-France Ile-de-France Paris
Activity type
Research Organisations
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Total cost
No data

Beneficiaries (1)