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Supersonic material ablation at THz repetition rates for ultra-efficient laser micromachining

CORDIS provides links to public deliverables and publications of HORIZON projects.

Links to deliverables and publications from FP7 projects, as well as links to some specific result types such as dataset and software, are dynamically retrieved from OpenAIRE .

Publications

In-Volume Laser Direct Writing of Silicon—Challenges and Opportunities (opens in new window)

Author(s): M. Chambonneau, D. Grojo, O. Tokel, F. Ö. Ilday, S. Tzortzakis, S. Nolte
Published in: Laser Photonics Rev., 2021, ISSN 1863-8880
Publisher: Wiley - VCH Verlag GmbH & CO. KGaA
DOI: 10.1002/lpor.202100140

Intellectual Property Rights

AN OPTICAL ISOLATION METHOD

Application/Publication number: 20 910176
Date: 2020-12-22
Applicant(s): BILKENT UNIVERSITESI VAKIF

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