Objective A proof of concept project is proposed to assess a new TXRF module for integration in a VPD preparation system for wafers up to 300 mm. This integrated VPD - TXRF system is the first instrument of its kind to be introduced in 2000. It targets the application of contamination monitoring in device manufacturing with special emphasis on 300 mm wafers. As a result of the project the tool should be ready for site evaluation. Programme(s) FP5-IST - Programme for research, technological development and demonstration on a "User-friendly information society, 1998-2002" Topic(s) 1.1.2.-4.8.3 - Processes, equipment and materials Call for proposal Data not available Funding Scheme ACM - Preparatory, accompanying and support measures Coordinator GEMETEC GESELLSCHAFT FUER MESSTECHNIK UND TECHNOLOGIE MBH EU contribution No data Address GERETSRIEDER STRASSE 81379 MUENCHEN Germany See on map Total cost No data Participants (2) Sort alphabetically Sort by EU Contribution Expand all Collapse all INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM VZW Belgium EU contribution No data Address KAPELDREEF 75 3001 LEUVEN See on map Total cost No data STMICROELECTRONICS SA France EU contribution No data Address 29 BOULEVARD ROMAIN ROLLAND 92120 MONTROUGE See on map Total cost No data