Skip to main content

Metrology for future 3D-technologies

Deliverables

Report on organized training on the instrument

Report on organized training on the instrument

Report on dissemination activities

Report on dissemination activities

Summary of the access time on the instruments

Summary of the access time on the instruments

Report 2 on dissemination activities

Report on dissemination activities

Report documenting the detailed technical specifications of the individual components

Report documenting the detailed technical specifications of the individual components

Searching for OpenAIRE data...

Publications

Accretion Detection via Scanning Acoustic Microscopy in Microelectronic Components - Considering Symmetry Breaking Effects

Author(s): Eva Grünwald, René Hammer, Jördis Rose, Bernhard Sartory, Roland Brunner
Published in: Microscopy and Microanalysis, Issue 23/S1, 2017, Page(s) 1466-1467, ISSN 1431-9276
DOI: 10.1017/S1431927617007991