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Metrology for future 3D-technologies

Risultati finali

Report on organized training on the instrument

Report on organized training on the instrument

Report on dissemination activities

Report on dissemination activities

Summary of the access time on the instruments

Summary of the access time on the instruments

Report 2 on dissemination activities

Report on dissemination activities

Report documenting the detailed technical specifications of the individual components

Report documenting the detailed technical specifications of the individual components

Pubblicazioni

Accretion Detection via Scanning Acoustic Microscopy in Microelectronic Components - Considering Symmetry Breaking Effects

Autori: Eva Grünwald, René Hammer, Jördis Rose, Bernhard Sartory, Roland Brunner
Pubblicato in: Microscopy and Microanalysis, 23/S1, 2017, Page(s) 1466-1467, ISSN 1431-9276
Editore: Cambridge University Press
DOI: 10.1017/S1431927617007991

Set di dati

Software

Met4FoF/Code v0.1.0

Autori: Björn Ludwig; Sascha Eichstädt
DOI: 10.5281/zenodo.3733057
Editore: Zenodo