Metrology for future 3D-technologies

Informations projet

METRO4-3D

N° de convention de subvention: 688225

DOI 10.3030/688225

Projet clôturé

Date de signature de la CE 25 Novembre 2015

Date de début 1 Février 2016

Date de fin 31 Janvier 2019

Financé au titre de

• INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies - Information and Communication Technologies (ICT)

Coût total € 3 349 813,75

Contribution de l’UE € 2 689 035,00

Coordonné par

INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium

Livrables

Documents, reports (5)

Report on organized training on the instrument
Report on dissemination activities
Summary of the access time on the instruments
Report 2 on dissemination activities

Report on dissemination activities

Report documenting the detailed technical specifications of the individual components

Websites, patent fillings, videos etc. (1)

Set-up of the website and strategic board

Publications

Peer reviewed articles (1)

Accretion Detection via Scanning Acoustic Microscopy in Microelectronic Components - Considering Symmetry Breaking Effects

Auteurs: Eva Grünwald, René Hammer, Jördis Rose, Bernhard Sartory, Roland Brunner
Publié dans: Microscopy and Microanalysis, Numéro 23/S1, 2017, Page(s) 1466-1467, ISSN 1431-9276
Éditeur: Cambridge University Press
DOI: 10.1017/S1431927617007991