Metrology for future 3D-technologies

Deliverables

Documents, reports (5)

Report on organized training on the instrument

Report on dissemination activities

Summary of the access time on the instruments

Report 2 on dissemination activities

Report on dissemination activities

Report documenting the detailed technical specifications of the individual components

Websites, patent fillings, videos etc. (1)

Set-up of the website and strategic board

Publications

Peer reviewed articles (1)

Accretion Detection via Scanning Acoustic Microscopy in Microelectronic Components - Considering Symmetry Breaking Effects

Author(s): Eva Grünwald, René Hammer, Jördis Rose, Bernhard Sartory, Roland Brunner
Published in: Microscopy and Microanalysis, 23/S1, 2017, Page(s) 1466-1467, ISSN 1431-9276
Publisher: Cambridge University Press
DOI: 10.1017/S1431927617007991