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Metrology for future 3D-technologies

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Accretion Detection via Scanning Acoustic Microscopy in Microelectronic Components - Considering Symmetry Breaking Effects

Author(s): Eva Grünwald, René Hammer, Jördis Rose, Bernhard Sartory, Roland Brunner
Published in: Microscopy and Microanalysis, Issue 23/S1, 2017, Page(s) 1466-1467, ISSN 1431-9276
Publisher: Cambridge University Press
DOI: 10.1017/S1431927617007991

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