Metrology for future 3D-technologies

Leistungen

Documents, reports (5)

Report on organized training on the instrument

Report on dissemination activities

Summary of the access time on the instruments

Report 2 on dissemination activities

Report on dissemination activities

Report documenting the detailed technical specifications of the individual components

Websites, patent fillings, videos etc. (1)

Set-up of the website and strategic board

Veröffentlichungen

Peer reviewed articles (1)

Accretion Detection via Scanning Acoustic Microscopy in Microelectronic Components - Considering Symmetry Breaking Effects

Autoren: Eva Grünwald, René Hammer, Jördis Rose, Bernhard Sartory, Roland Brunner
Veröffentlicht in: Microscopy and Microanalysis, 23/S1, 2017, Page(s) 1466-1467, ISSN 1431-9276
Herausgeber: Cambridge University Press
DOI: 10.1017/S1431927617007991

Datensätze

Datensätze via OpenAIRE (1)

MPU9250 MEMS IMU Sine wave acceleration excitation along the Z axis

Autoren: Seeger,Benedikt
Veröffentlicht in: Zenodo

Software

Software über OpenAIRE (1)

Met4FoF/Code v0.2.0

Autoren: Björn Ludwig; Sascha Eichstädt
DOI: 10.5281/zenodo.3776038; 10.5281/zenodo.3955120; 10.5281/zenodo.3733057; 10.5281/zenodo.3896952; 10.5281/zenodo.3959026; 10.5281/zenodo.3956654; 10.5281/zenodo.3906587; 10.5281/zenodo.3887138; 10.5281/zenodo.3688077; 10.5281/zenodo.3906645
Herausgeber: Zenodo