Metrology for future 3D-technologies

Projektinformationen

METRO4-3D

ID Finanzhilfevereinbarung: 688225

DOI 10.3030/688225

Projekt abgeschlossen

EK-Unterschriftsdatum 25 November 2015

Startdatum 1 Februar 2016

Enddatum 31 Januar 2019

Finanziert unter

• INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies - Information and Communication Technologies (ICT)

Gesamtkosten € 3 349 813,75

EU-Beitrag € 2 689 035,00

Koordiniert durch

INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium

Leistungen

Documents, reports (5)

Report on organized training on the instrument
Report on dissemination activities
Summary of the access time on the instruments
Report 2 on dissemination activities

Report on dissemination activities

Report documenting the detailed technical specifications of the individual components

Websites, patent fillings, videos etc. (1)

Set-up of the website and strategic board

Veröffentlichungen

Peer reviewed articles (1)

Accretion Detection via Scanning Acoustic Microscopy in Microelectronic Components - Considering Symmetry Breaking Effects

Autoren: Eva Grünwald, René Hammer, Jördis Rose, Bernhard Sartory, Roland Brunner
Veröffentlicht in: Microscopy and Microanalysis, Ausgabe 23/S1, 2017, Seite(n) 1466-1467, ISSN 1431-9276
Herausgeber: Cambridge University Press
DOI: 10.1017/S1431927617007991