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Metrology for future 3D-technologies

Leistungen

Report on organized training on the instrument

Report on organized training on the instrument

Report on dissemination activities

Report on dissemination activities

Summary of the access time on the instruments

Summary of the access time on the instruments

Report 2 on dissemination activities

Report on dissemination activities

Report documenting the detailed technical specifications of the individual components

Report documenting the detailed technical specifications of the individual components

Veröffentlichungen

Accretion Detection via Scanning Acoustic Microscopy in Microelectronic Components - Considering Symmetry Breaking Effects

Autoren: Eva Grünwald, René Hammer, Jördis Rose, Bernhard Sartory, Roland Brunner
Veröffentlicht in: Microscopy and Microanalysis, Issue 23/S1, 2017, Page(s) 1466-1467, ISSN 1431-9276
DOI: 10.1017/S1431927617007991

Datensätze