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Copper Interconnects for Advanced Performance and Reliability

Description du projet


Next-Generation Nanoelectronics Components and Electronics Integration
The objective of CopPeR was to develop a seed-less copper deposition process and 300 mm wafer prototype equipment for sub-32 nm semiconductor interconnect manufacturing.

Appel à propositions

FP7-ICT-2007-1
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Coordinateur

TECHNIKON FORSCHUNGS- UND PLANUNGSGESELLSCHAFT MBH
Adresse
Burgplatz 3A
9500 Villach
Autriche
Type d’activité
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contribution de l’UE
€ 251 016
Contact administratif
Klaus-Michael KOCH (Dr.)

Participants (7)

LAM RESEARCH AG
Autriche
Contribution de l’UE
€ 779 351
Adresse
Sez-strasse 1
9500 Villach
Type d’activité
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contact administratif
Fritz Pertl (Mr.)
TECHNISCHE UNIVERSITAET GRAZ
Autriche
Contribution de l’UE
€ 525 452
Adresse
Rechbauerstrasse 12
8010 Graz
Type d’activité
Higher or Secondary Education Establishments
Contact administratif
Gerald Kothleitner (Prof.)
ELSYCA NV
Belgique
Contribution de l’UE
€ 359 502
Adresse
Vaartdijk 3 Bus 603
3018 Wijgmaal
Type d’activité
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contact administratif
Tania Van Cauwenberghe (Ms)
KATHOLIEKE UNIVERSITEIT LEUVEN
Belgique
Contribution de l’UE
€ 641 930
Adresse
Oude Markt 13
3000 Leuven
Type d’activité
Higher or Secondary Education Establishments
Contact administratif
Marion Wolpers (Ms)
VRIJE UNIVERSITEIT BRUSSEL
Belgique
Contribution de l’UE
€ 158 841
Adresse
Pleinlaan 2
1050 Brussel
Type d’activité
Higher or Secondary Education Establishments
Contact administratif
Martina Follet (Ms.)
INFINEON TECHNOLOGIES AG
Allemagne
Contribution de l’UE
€ 245 918
Adresse
Am Campeon 1-15
85579 Neubiberg
Type d’activité
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contact administratif
Bernhard Scholz (Mr)
CORMET OY
Finlande
Contribution de l’UE
€ 187 990
Adresse
Luutnantintie 3 A
00410 Helsinki
Type d’activité
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contact administratif
Juha Piippo (Dr.)