Attosecond time-and angle resolved PhotoEmission Spectroscopy (AttoPES)

Project Information

AttoPES

Grant agreement ID: 101032241

DOI

10.3030/101032241

Project closed

EC signature date 15 March 2021

Start date 1 March 2022

End date 29 February 2024

Funded under

• EXCELLENT SCIENCE - Marie Skłodowska-Curie Actions

Total cost

€ 166 320,00

EU contribution

€ 166 320,00

Coordinated by

INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium

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Publications

Conference proceedings (2)

Actinic photoemission spectroscopy of litho materials using a table-top ultrafast EUV source

Author(s): D. P. Singh, K. M. Dorney, F. Holzmeier, E. W. Larsen, L. Galleni, C. Mokhtarzadeh, M. J. van Setten, T. Conard, J. S. Petersen, P. A. W. van der Heide
Published in: Proc. SPIE 12955, Metrology, Inspection, and Process Control XXXVIII, Issue 12955, 2024, 2024, Page(s) 1295504
Publisher: SPIE
DOI: 10.1117/12.3010751

Actinic inspection of the EUV optical parameters of lithographic materials with lab-based radiometry and reflectometry

Author(s): Kevin M. Dorney, Nicola N. Kissoon, Fabian Holzmeier, Esben W. Larsen, Dhirendra P. Singh, Shikhar Arvind, Sayantani Santra, Roberto Fallica, Igor Makhotkin, Vicky Philipsen, Stefan De Gendt, Claudia Fleischmann, Paul A. W. van der Heide, John S. Petersen
Published in: Proceedings of SPIE, Volume 12494, Optical and EUV Nanolithography XXXVI, Issue 12494, 2023, 2023, Page(s) 1249407
Publisher: SPIE
DOI: 10.1117/12.2658359

Peer reviewed articles (2)

Photoemission spectroscopy on photoresist materials: A protocol for analysis of radiation sensitive materials

Author(s): Faegheh S. Sajjadian; Laura Galleni; Kevin M. Dorney; Dhirendra P. Singh; Fabian Holzmeier; Michiel J. van Setten; Stefan De Gendt; Thierry Conard
Published in: J. Vac. Sci. Technol. A, Issue 41, 2023, 2023, Page(s) 53206, ISSN 0734-2101
Publisher: American Institute of Physics
DOI: 10.1116/6.0002808

Peak Broadening in Photoelectron Spectroscopy of Amorphous Polymers: The Leading Role of the Electrostatic Landscape

Author(s): Laura Galleni, Arne Meulemans, Faegheh S. Sajjadian, Dhirendra P. Singh, Shikhar Arvind, Kevin M. Dorney, Thierry Conard, Gabriele D’Avino, Geoffrey Pourtois, Daniel Escudero, and Michiel J. van Setten
Published in: J. Phys. Chem. Lett., Issue 15,3, 2024, 2024, Page(s) 834-839, ISSN 1948-7185
Publisher: American Chemical Society
DOI: 10.1021/acs.jpclett.3c02640