14 Angstroms Module Integration

Informations projet

14AMI

N° de convention de subvention: 101111948

DOI

10.3030/101111948

Date de signature de la CE 10 Mai 2023

Date de début 1 Mai 2023

Date de fin 30 Avril 2026

Financé au titre de

• Digital, Industry and Space

Coût total

€ 108 924 981,90

Contribution de l’UE

€ 24 954 145,00

Coordonné par

ASML NETHERLANDS B.V.
Netherlands

CORDIS fournit des liens vers les livrables publics et les publications des projets HORIZON.

Les liens vers les livrables et les publications des projets du 7e PC, ainsi que les liens vers certains types de résultats spécifiques tels que les jeux de données et les logiciels, sont récupérés dynamiquement sur OpenAIRE .

Publications

Conference proceedings (16)

Optimization of deformable mirror actuator geometry using machine learning methods

Auteurs: Oleg Soloviev
Publié dans: Proceedings Volume 13328, Adaptive Optics and Wavefront Control for Biological Systems XI, 2025
Éditeur: SPIE
DOI: 10.1117/12.3042094

Time-resolved characterization and analysis of pulsed ion sources by synchronized oaTOF-MS

Auteurs: Franziska Schuler, Joshua Rieger, Maja Hammelrath, Sanna Benter, Hendrik Kersten, Thorsten Benter
Publié dans: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA, 2024
Éditeur: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA

Detection of ions generated in an intense pulsed EUV-light beam using different interfaces to a high-resolution TOF-MS

Auteurs: Niklas Pengemann, Sanna Benter, Maja Hammelrath, Joshua Rieger, Franziska Schuler, Adelind Elshani, Linus Nagel, Ismael Gisch, Hendrik Kersten, Sascha Brose, Carlo Holly, Peter Gust, Thorsten Benter
Publié dans: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA, 2024
Éditeur: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA

Analysis of EUV-induced plasma ions using an ion transfer upstream a high resolution TOF-MS

Auteurs: Niklas Pengemann, Sanna Benter, Laura Lehmann, Lena Mokros, Franziska Schuler, Linus Nagel, Adelind Elshani, Sascha Brose, Hendrik Kersten, Peter Gust, Thorsten Benter
Publié dans: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Éditeur: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

Scatterometry-informed machine learning study to determine bi-directional intercorrelation of adjacent patterning steps

Auteurs: Padraig R. Timoney, Stefan Schoeche, Daniel Schmidt, Will Parkin, Aron Cepler, Ilya Osherov, Amit Godel, Igor Turovets
Publié dans: Metrology, Inspection, and Process Control XXXIX, 2025
Éditeur: SPIE
DOI: 10.1117/12.3051497

Development and Characterization of Pulsed Ion Sources Coupled to oaTOFs

Auteurs: Franziska Schuler, Joshua Rieger, Maja Hammelrath, Sanna Benter, Hendrik Kersten, Thorsten Benter
Publié dans: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany, 2024
Éditeur: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany

Detection of Ions generated in an intense pulsed EUV-light beam using different interfaces to a high resolution TOF-MS

Auteurs: Niklas Pengemann, Sanna Benter, Maja Hammelrath, Joshua Rieger, Franziska Schuler, Adelind Elshani, Linus Nagel, Ismael Gisch, Hendrik Kersten, Sascha Brose, Carlo Holly, Peter Gust, Thorsten Benter
Publié dans: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany, 2024
Éditeur: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany

Probing ions from deeply embedded plasmas: From simulation to realization Investigation of a novel long distance ion transfer unit

Auteurs: Sanna Benter, Lena Mokros, Markus Langner, Niklas Pengemann, Hendrik Kersten, Thorsten Benter
Publié dans: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA, 2024
Éditeur: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA

Probing Ions from deeply embedded plasmas: Energy Distribution Analysis and Comparison of Ion Transfer

Auteurs: Sanna Benter, Niklas Pengemann, Hendrik Kersten, Thorsten Benter
Publié dans: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Éditeur: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

A Comparison between the Simulation Efficiency of a Poisson and Coulomb based Particle

Auteurs: Markus Hübner, Walter Wißdorf, Franziska Schuler, Hendrik Kersten, Thorsten Benter
Publié dans: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Éditeur: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

Intercomparison Study of two High-Resolution TOF-MS for Ultra-Trace Detection

Auteurs: Lena Mokros, Niklas Pengemann, Sanna Benter, Joshua Rieger, Hendrik Kersten, Thorsten Benter
Publié dans: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA, 2024
Éditeur: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA

Temporally Resolved Characterization of a Pulsed Ion Source using a Synchronized oaTOF-MS

Auteurs: Franziska Schuler, Maja Hammelrath, Markus Hübner, Niklas Pengemann, Hendrik Kersten, Thorsten Benter
Publié dans: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Éditeur: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

Further Development and Optimization of a Successfully Implemented Accumulation Ion Source

Auteurs: Laura Lehmann, Niklas Pengemann, Hendrik Kersten, Thorsten Benter
Publié dans: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Éditeur: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

Intercomparison Study of two High-Resolution TOF-MS for Ultra-Trace

Auteurs: Lena Mokros, Niklas Pengemann, Joshua Rieger, Franziska Schuler, Hendrik Kersten, Thorsten Benter
Publié dans: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany, 2024
Éditeur: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany

A Plasma/Electron Ionization Calibration Source for Absolute Ion Counting and Ion Density Measurements

Auteurs: Lena Mokros, Niklas Pengemann, Sanna Benter, Michelle Rajkovic, Hendrik Kersten, Thorsten Benter
Publié dans: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Éditeur: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

Deformable mirror characterization using novel Phase Tilted Interferometry method

Auteurs: Oleg Soloviev
Publié dans: Proceedings Volume 13329, Quantitative Phase Imaging XI, 2025
Éditeur: SPIE
DOI: 10.1117/12.3041952

Peer reviewed articles (1)

Sequential wafer map inspection via feedback loop with reinforcement learning

Auteurs: Aleksandr Dekhovich, Oleg Soloviev, Michel Verhaegen
Publié dans: Expert Systems with Applications, 2025, ISSN 0957-4174
Éditeur: Elsevier
DOI: 10.1016/J.ESWA.2025.126996