14 Angstroms Module Integration

Informacje na temat projektu

14AMI

Identyfikator umowy o grant: 101111948

DOI

10.3030/101111948

Data podpisania przez KE 10 Maja 2023

Data rozpoczęcia 1 Maja 2023

Data zakończenia 30 Kwietnia 2026

Finansowanie w ramach

• Digital, Industry and Space

Koszt całkowity

€ 108 924 981,90

Wkład UE

€ 24 954 145,00

Koordynowany przez

ASML NETHERLANDS B.V.
Netherlands

CORDIS oferuje możliwość skorzystania z odnośników do publicznie dostępnych publikacji i rezultatów projektów realizowanych w ramach programów ramowych HORYZONT.

Odnośniki do rezultatów i publikacji związanych z poszczególnymi projektami 7PR, a także odnośniki do niektórych konkretnych kategorii wyników, takich jak zbiory danych i oprogramowanie, są dynamicznie pobierane z systemu OpenAIRE .

Publikacje

Conference proceedings (16)

Optimization of deformable mirror actuator geometry using machine learning methods

Autorzy: Oleg Soloviev
Opublikowane w: Proceedings Volume 13328, Adaptive Optics and Wavefront Control for Biological Systems XI, 2025
Wydawca: SPIE
DOI: 10.1117/12.3042094

Time-resolved characterization and analysis of pulsed ion sources by synchronized oaTOF-MS

Autorzy: Franziska Schuler, Joshua Rieger, Maja Hammelrath, Sanna Benter, Hendrik Kersten, Thorsten Benter
Opublikowane w: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA, 2024
Wydawca: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA

Detection of ions generated in an intense pulsed EUV-light beam using different interfaces to a high-resolution TOF-MS

Autorzy: Niklas Pengemann, Sanna Benter, Maja Hammelrath, Joshua Rieger, Franziska Schuler, Adelind Elshani, Linus Nagel, Ismael Gisch, Hendrik Kersten, Sascha Brose, Carlo Holly, Peter Gust, Thorsten Benter
Opublikowane w: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA, 2024
Wydawca: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA

Analysis of EUV-induced plasma ions using an ion transfer upstream a high resolution TOF-MS

Autorzy: Niklas Pengemann, Sanna Benter, Laura Lehmann, Lena Mokros, Franziska Schuler, Linus Nagel, Adelind Elshani, Sascha Brose, Hendrik Kersten, Peter Gust, Thorsten Benter
Opublikowane w: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Wydawca: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

Scatterometry-informed machine learning study to determine bi-directional intercorrelation of adjacent patterning steps

Autorzy: Padraig R. Timoney, Stefan Schoeche, Daniel Schmidt, Will Parkin, Aron Cepler, Ilya Osherov, Amit Godel, Igor Turovets
Opublikowane w: Metrology, Inspection, and Process Control XXXIX, 2025
Wydawca: SPIE
DOI: 10.1117/12.3051497

Development and Characterization of Pulsed Ion Sources Coupled to oaTOFs

Autorzy: Franziska Schuler, Joshua Rieger, Maja Hammelrath, Sanna Benter, Hendrik Kersten, Thorsten Benter
Opublikowane w: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany, 2024
Wydawca: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany

Detection of Ions generated in an intense pulsed EUV-light beam using different interfaces to a high resolution TOF-MS

Autorzy: Niklas Pengemann, Sanna Benter, Maja Hammelrath, Joshua Rieger, Franziska Schuler, Adelind Elshani, Linus Nagel, Ismael Gisch, Hendrik Kersten, Sascha Brose, Carlo Holly, Peter Gust, Thorsten Benter
Opublikowane w: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany, 2024
Wydawca: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany

Probing ions from deeply embedded plasmas: From simulation to realization Investigation of a novel long distance ion transfer unit

Autorzy: Sanna Benter, Lena Mokros, Markus Langner, Niklas Pengemann, Hendrik Kersten, Thorsten Benter
Opublikowane w: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA, 2024
Wydawca: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA

Probing Ions from deeply embedded plasmas: Energy Distribution Analysis and Comparison of Ion Transfer

Autorzy: Sanna Benter, Niklas Pengemann, Hendrik Kersten, Thorsten Benter
Opublikowane w: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Wydawca: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

A Comparison between the Simulation Efficiency of a Poisson and Coulomb based Particle

Autorzy: Markus Hübner, Walter Wißdorf, Franziska Schuler, Hendrik Kersten, Thorsten Benter
Opublikowane w: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Wydawca: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

Intercomparison Study of two High-Resolution TOF-MS for Ultra-Trace Detection

Autorzy: Lena Mokros, Niklas Pengemann, Sanna Benter, Joshua Rieger, Hendrik Kersten, Thorsten Benter
Opublikowane w: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA, 2024
Wydawca: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA

Temporally Resolved Characterization of a Pulsed Ion Source using a Synchronized oaTOF-MS

Autorzy: Franziska Schuler, Maja Hammelrath, Markus Hübner, Niklas Pengemann, Hendrik Kersten, Thorsten Benter
Opublikowane w: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Wydawca: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

Further Development and Optimization of a Successfully Implemented Accumulation Ion Source

Autorzy: Laura Lehmann, Niklas Pengemann, Hendrik Kersten, Thorsten Benter
Opublikowane w: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Wydawca: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

Intercomparison Study of two High-Resolution TOF-MS for Ultra-Trace

Autorzy: Lena Mokros, Niklas Pengemann, Joshua Rieger, Franziska Schuler, Hendrik Kersten, Thorsten Benter
Opublikowane w: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany, 2024
Wydawca: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany

A Plasma/Electron Ionization Calibration Source for Absolute Ion Counting and Ion Density Measurements

Autorzy: Lena Mokros, Niklas Pengemann, Sanna Benter, Michelle Rajkovic, Hendrik Kersten, Thorsten Benter
Opublikowane w: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Wydawca: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

Deformable mirror characterization using novel Phase Tilted Interferometry method

Autorzy: Oleg Soloviev
Opublikowane w: Proceedings Volume 13329, Quantitative Phase Imaging XI, 2025
Wydawca: SPIE
DOI: 10.1117/12.3041952

Peer reviewed articles (1)

Sequential wafer map inspection via feedback loop with reinforcement learning

Autorzy: Aleksandr Dekhovich, Oleg Soloviev, Michel Verhaegen
Opublikowane w: Expert Systems with Applications, 2025, ISSN 0957-4174
Wydawca: Elsevier
DOI: 10.1016/J.ESWA.2025.126996