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CORDIS

14 Angstroms Module Integration

CORDIS proporciona enlaces a los documentos públicos y las publicaciones de los proyectos de los programas marco HORIZONTE.

Los enlaces a los documentos y las publicaciones de los proyectos del Séptimo Programa Marco, así como los enlaces a algunos tipos de resultados específicos, como conjuntos de datos y «software», se obtienen dinámicamente de OpenAIRE .

Publicaciones

Optimization of deformable mirror actuator geometry using machine learning methods (se abrirá en una nueva ventana)

Autores: Oleg Soloviev
Publicado en: Proceedings Volume 13328, Adaptive Optics and Wavefront Control for Biological Systems XI, 2025
Editor: SPIE
DOI: 10.1117/12.3042094

Time-resolved characterization and analysis of pulsed ion sources by synchronized oaTOF-MS

Autores: Franziska Schuler, Joshua Rieger, Maja Hammelrath, Sanna Benter, Hendrik Kersten, Thorsten Benter
Publicado en: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA, 2024
Editor: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA

Detection of ions generated in an intense pulsed EUV-light beam using different interfaces to a high-resolution TOF-MS

Autores: Niklas Pengemann, Sanna Benter, Maja Hammelrath, Joshua Rieger, Franziska Schuler, Adelind Elshani, Linus Nagel, Ismael Gisch, Hendrik Kersten, Sascha Brose, Carlo Holly, Peter Gust, Thorsten Benter
Publicado en: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA, 2024
Editor: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA

Analysis of EUV-induced plasma ions using an ion transfer upstream a high resolution TOF-MS

Autores: Niklas Pengemann, Sanna Benter, Laura Lehmann, Lena Mokros, Franziska Schuler, Linus Nagel, Adelind Elshani, Sascha Brose, Hendrik Kersten, Peter Gust, Thorsten Benter
Publicado en: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Editor: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

Scatterometry-informed machine learning study to determine bi-directional intercorrelation of adjacent patterning steps (se abrirá en una nueva ventana)

Autores: Padraig R. Timoney, Stefan Schoeche, Daniel Schmidt, Will Parkin, Aron Cepler, Ilya Osherov, Amit Godel, Igor Turovets
Publicado en: Metrology, Inspection, and Process Control XXXIX, 2025
Editor: SPIE
DOI: 10.1117/12.3051497

Development and Characterization of Pulsed Ion Sources Coupled to oaTOFs

Autores: Franziska Schuler, Joshua Rieger, Maja Hammelrath, Sanna Benter, Hendrik Kersten, Thorsten Benter
Publicado en: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany, 2024
Editor: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany

Detection of Ions generated in an intense pulsed EUV-light beam using different interfaces to a high resolution TOF-MS

Autores: Niklas Pengemann, Sanna Benter, Maja Hammelrath, Joshua Rieger, Franziska Schuler, Adelind Elshani, Linus Nagel, Ismael Gisch, Hendrik Kersten, Sascha Brose, Carlo Holly, Peter Gust, Thorsten Benter
Publicado en: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany, 2024
Editor: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany

Probing ions from deeply embedded plasmas: From simulation to realization Investigation of a novel long distance ion transfer unit

Autores: Sanna Benter, Lena Mokros, Markus Langner, Niklas Pengemann, Hendrik Kersten, Thorsten Benter
Publicado en: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA, 2024
Editor: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA

Probing Ions from deeply embedded plasmas: Energy Distribution Analysis and Comparison of Ion Transfer

Autores: Sanna Benter, Niklas Pengemann, Hendrik Kersten, Thorsten Benter
Publicado en: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Editor: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

A Comparison between the Simulation Efficiency of a Poisson and Coulomb based Particle

Autores: Markus Hübner, Walter Wißdorf, Franziska Schuler, Hendrik Kersten, Thorsten Benter
Publicado en: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Editor: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

Intercomparison Study of two High-Resolution TOF-MS for Ultra-Trace Detection

Autores: Lena Mokros, Niklas Pengemann, Sanna Benter, Joshua Rieger, Hendrik Kersten, Thorsten Benter
Publicado en: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA, 2024
Editor: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA

Temporally Resolved Characterization of a Pulsed Ion Source using a Synchronized oaTOF-MS

Autores: Franziska Schuler, Maja Hammelrath, Markus Hübner, Niklas Pengemann, Hendrik Kersten, Thorsten Benter
Publicado en: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Editor: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

Further Development and Optimization of a Successfully Implemented Accumulation Ion Source

Autores: Laura Lehmann, Niklas Pengemann, Hendrik Kersten, Thorsten Benter
Publicado en: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Editor: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

Intercomparison Study of two High-Resolution TOF-MS for Ultra-Trace

Autores: Lena Mokros, Niklas Pengemann, Joshua Rieger, Franziska Schuler, Hendrik Kersten, Thorsten Benter
Publicado en: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany, 2024
Editor: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany

A Plasma/Electron Ionization Calibration Source for Absolute Ion Counting and Ion Density Measurements

Autores: Lena Mokros, Niklas Pengemann, Sanna Benter, Michelle Rajkovic, Hendrik Kersten, Thorsten Benter
Publicado en: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Editor: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

Deformable mirror characterization using novel Phase Tilted Interferometry method (se abrirá en una nueva ventana)

Autores: Oleg Soloviev
Publicado en: Proceedings Volume 13329, Quantitative Phase Imaging XI, 2025
Editor: SPIE
DOI: 10.1117/12.3041952

Sequential wafer map inspection via feedback loop with reinforcement learning (se abrirá en una nueva ventana)

Autores: Aleksandr Dekhovich, Oleg Soloviev, Michel Verhaegen
Publicado en: Expert Systems with Applications, 2025, ISSN 0957-4174
Editor: Elsevier
DOI: 10.1016/J.ESWA.2025.126996

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