14 Angstroms Module Integration

Informazioni relative al progetto

14AMI

ID dell’accordo di sovvenzione: 101111948

DOI

10.3030/101111948

Data della firma CE 10 Maggio 2023

Data di avvio 1 Maggio 2023

Data di completamento 30 Aprile 2026

Finanziato da

• Digital, Industry and Space

Costo totale

€ 108 924 981,90

Contributo UE

€ 24 954 145,00

Coordinato da

ASML NETHERLANDS B.V.
Netherlands

CORDIS fornisce collegamenti ai risultati finali pubblici e alle pubblicazioni dei progetti ORIZZONTE.

I link ai risultati e alle pubblicazioni dei progetti del 7° PQ, così come i link ad alcuni tipi di risultati specifici come dataset e software, sono recuperati dinamicamente da .OpenAIRE .

Pubblicazioni

Conference proceedings (16)

Optimization of deformable mirror actuator geometry using machine learning methods

Autori: Oleg Soloviev
Pubblicato in: Proceedings Volume 13328, Adaptive Optics and Wavefront Control for Biological Systems XI, 2025
Editore: SPIE
DOI: 10.1117/12.3042094

Time-resolved characterization and analysis of pulsed ion sources by synchronized oaTOF-MS

Autori: Franziska Schuler, Joshua Rieger, Maja Hammelrath, Sanna Benter, Hendrik Kersten, Thorsten Benter
Pubblicato in: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA, 2024
Editore: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA

Detection of ions generated in an intense pulsed EUV-light beam using different interfaces to a high-resolution TOF-MS

Autori: Niklas Pengemann, Sanna Benter, Maja Hammelrath, Joshua Rieger, Franziska Schuler, Adelind Elshani, Linus Nagel, Ismael Gisch, Hendrik Kersten, Sascha Brose, Carlo Holly, Peter Gust, Thorsten Benter
Pubblicato in: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA, 2024
Editore: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA

Analysis of EUV-induced plasma ions using an ion transfer upstream a high resolution TOF-MS

Autori: Niklas Pengemann, Sanna Benter, Laura Lehmann, Lena Mokros, Franziska Schuler, Linus Nagel, Adelind Elshani, Sascha Brose, Hendrik Kersten, Peter Gust, Thorsten Benter
Pubblicato in: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Editore: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

Scatterometry-informed machine learning study to determine bi-directional intercorrelation of adjacent patterning steps

Autori: Padraig R. Timoney, Stefan Schoeche, Daniel Schmidt, Will Parkin, Aron Cepler, Ilya Osherov, Amit Godel, Igor Turovets
Pubblicato in: Metrology, Inspection, and Process Control XXXIX, 2025
Editore: SPIE
DOI: 10.1117/12.3051497

Development and Characterization of Pulsed Ion Sources Coupled to oaTOFs

Autori: Franziska Schuler, Joshua Rieger, Maja Hammelrath, Sanna Benter, Hendrik Kersten, Thorsten Benter
Pubblicato in: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany, 2024
Editore: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany

Detection of Ions generated in an intense pulsed EUV-light beam using different interfaces to a high resolution TOF-MS

Autori: Niklas Pengemann, Sanna Benter, Maja Hammelrath, Joshua Rieger, Franziska Schuler, Adelind Elshani, Linus Nagel, Ismael Gisch, Hendrik Kersten, Sascha Brose, Carlo Holly, Peter Gust, Thorsten Benter
Pubblicato in: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany, 2024
Editore: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany

Probing ions from deeply embedded plasmas: From simulation to realization Investigation of a novel long distance ion transfer unit

Autori: Sanna Benter, Lena Mokros, Markus Langner, Niklas Pengemann, Hendrik Kersten, Thorsten Benter
Pubblicato in: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA, 2024
Editore: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA

Probing Ions from deeply embedded plasmas: Energy Distribution Analysis and Comparison of Ion Transfer

Autori: Sanna Benter, Niklas Pengemann, Hendrik Kersten, Thorsten Benter
Pubblicato in: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Editore: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

A Comparison between the Simulation Efficiency of a Poisson and Coulomb based Particle

Autori: Markus Hübner, Walter Wißdorf, Franziska Schuler, Hendrik Kersten, Thorsten Benter
Pubblicato in: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Editore: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

Intercomparison Study of two High-Resolution TOF-MS for Ultra-Trace Detection

Autori: Lena Mokros, Niklas Pengemann, Sanna Benter, Joshua Rieger, Hendrik Kersten, Thorsten Benter
Pubblicato in: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA, 2024
Editore: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA

Temporally Resolved Characterization of a Pulsed Ion Source using a Synchronized oaTOF-MS

Autori: Franziska Schuler, Maja Hammelrath, Markus Hübner, Niklas Pengemann, Hendrik Kersten, Thorsten Benter
Pubblicato in: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Editore: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

Further Development and Optimization of a Successfully Implemented Accumulation Ion Source

Autori: Laura Lehmann, Niklas Pengemann, Hendrik Kersten, Thorsten Benter
Pubblicato in: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Editore: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

Intercomparison Study of two High-Resolution TOF-MS for Ultra-Trace

Autori: Lena Mokros, Niklas Pengemann, Joshua Rieger, Franziska Schuler, Hendrik Kersten, Thorsten Benter
Pubblicato in: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany, 2024
Editore: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany

A Plasma/Electron Ionization Calibration Source for Absolute Ion Counting and Ion Density Measurements

Autori: Lena Mokros, Niklas Pengemann, Sanna Benter, Michelle Rajkovic, Hendrik Kersten, Thorsten Benter
Pubblicato in: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Editore: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

Deformable mirror characterization using novel Phase Tilted Interferometry method

Autori: Oleg Soloviev
Pubblicato in: Proceedings Volume 13329, Quantitative Phase Imaging XI, 2025
Editore: SPIE
DOI: 10.1117/12.3041952

Peer reviewed articles (1)

Sequential wafer map inspection via feedback loop with reinforcement learning

Autori: Aleksandr Dekhovich, Oleg Soloviev, Michel Verhaegen
Pubblicato in: Expert Systems with Applications, 2025, ISSN 0957-4174
Editore: Elsevier
DOI: 10.1016/J.ESWA.2025.126996