14 Angstroms Module Integration

Projektinformationen

14AMI

ID Finanzhilfevereinbarung: 101111948

DOI

10.3030/101111948

EK-Unterschriftsdatum 10 Mai 2023

Startdatum 1 Mai 2023

Enddatum 30 April 2026

Finanziert unter

• Digital, Industry and Space

Gesamtkosten

€ 108 924 981,90

EU-Beitrag

€ 24 954 145,00

Koordiniert durch

ASML NETHERLANDS B.V.
Netherlands

CORDIS bietet Links zu öffentlichen Ergebnissen und Veröffentlichungen von HORIZONT-Projekten.

Links zu Ergebnissen und Veröffentlichungen von RP7-Projekten sowie Links zu einigen Typen spezifischer Ergebnisse wie Datensätzen und Software werden dynamisch von OpenAIRE abgerufen.

Veröffentlichungen

Conference proceedings (16)

Optimization of deformable mirror actuator geometry using machine learning methods

Autoren: Oleg Soloviev
Veröffentlicht in: Proceedings Volume 13328, Adaptive Optics and Wavefront Control for Biological Systems XI, 2025
Herausgeber: SPIE
DOI: 10.1117/12.3042094

Time-resolved characterization and analysis of pulsed ion sources by synchronized oaTOF-MS

Autoren: Franziska Schuler, Joshua Rieger, Maja Hammelrath, Sanna Benter, Hendrik Kersten, Thorsten Benter
Veröffentlicht in: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA, 2024
Herausgeber: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA

Detection of ions generated in an intense pulsed EUV-light beam using different interfaces to a high-resolution TOF-MS

Autoren: Niklas Pengemann, Sanna Benter, Maja Hammelrath, Joshua Rieger, Franziska Schuler, Adelind Elshani, Linus Nagel, Ismael Gisch, Hendrik Kersten, Sascha Brose, Carlo Holly, Peter Gust, Thorsten Benter
Veröffentlicht in: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA, 2024
Herausgeber: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA

Analysis of EUV-induced plasma ions using an ion transfer upstream a high resolution TOF-MS

Autoren: Niklas Pengemann, Sanna Benter, Laura Lehmann, Lena Mokros, Franziska Schuler, Linus Nagel, Adelind Elshani, Sascha Brose, Hendrik Kersten, Peter Gust, Thorsten Benter
Veröffentlicht in: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Herausgeber: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

Scatterometry-informed machine learning study to determine bi-directional intercorrelation of adjacent patterning steps

Autoren: Padraig R. Timoney, Stefan Schoeche, Daniel Schmidt, Will Parkin, Aron Cepler, Ilya Osherov, Amit Godel, Igor Turovets
Veröffentlicht in: Metrology, Inspection, and Process Control XXXIX, 2025
Herausgeber: SPIE
DOI: 10.1117/12.3051497

Development and Characterization of Pulsed Ion Sources Coupled to oaTOFs

Autoren: Franziska Schuler, Joshua Rieger, Maja Hammelrath, Sanna Benter, Hendrik Kersten, Thorsten Benter
Veröffentlicht in: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany, 2024
Herausgeber: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany

Detection of Ions generated in an intense pulsed EUV-light beam using different interfaces to a high resolution TOF-MS

Autoren: Niklas Pengemann, Sanna Benter, Maja Hammelrath, Joshua Rieger, Franziska Schuler, Adelind Elshani, Linus Nagel, Ismael Gisch, Hendrik Kersten, Sascha Brose, Carlo Holly, Peter Gust, Thorsten Benter
Veröffentlicht in: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany, 2024
Herausgeber: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany

Probing ions from deeply embedded plasmas: From simulation to realization Investigation of a novel long distance ion transfer unit

Autoren: Sanna Benter, Lena Mokros, Markus Langner, Niklas Pengemann, Hendrik Kersten, Thorsten Benter
Veröffentlicht in: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA, 2024
Herausgeber: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA

Probing Ions from deeply embedded plasmas: Energy Distribution Analysis and Comparison of Ion Transfer

Autoren: Sanna Benter, Niklas Pengemann, Hendrik Kersten, Thorsten Benter
Veröffentlicht in: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Herausgeber: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

A Comparison between the Simulation Efficiency of a Poisson and Coulomb based Particle

Autoren: Markus Hübner, Walter Wißdorf, Franziska Schuler, Hendrik Kersten, Thorsten Benter
Veröffentlicht in: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Herausgeber: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

Intercomparison Study of two High-Resolution TOF-MS for Ultra-Trace Detection

Autoren: Lena Mokros, Niklas Pengemann, Sanna Benter, Joshua Rieger, Hendrik Kersten, Thorsten Benter
Veröffentlicht in: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA, 2024
Herausgeber: Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA

Temporally Resolved Characterization of a Pulsed Ion Source using a Synchronized oaTOF-MS

Autoren: Franziska Schuler, Maja Hammelrath, Markus Hübner, Niklas Pengemann, Hendrik Kersten, Thorsten Benter
Veröffentlicht in: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Herausgeber: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

Further Development and Optimization of a Successfully Implemented Accumulation Ion Source

Autoren: Laura Lehmann, Niklas Pengemann, Hendrik Kersten, Thorsten Benter
Veröffentlicht in: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Herausgeber: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

Intercomparison Study of two High-Resolution TOF-MS for Ultra-Trace

Autoren: Lena Mokros, Niklas Pengemann, Joshua Rieger, Franziska Schuler, Hendrik Kersten, Thorsten Benter
Veröffentlicht in: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany, 2024
Herausgeber: 55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany

A Plasma/Electron Ionization Calibration Source for Absolute Ion Counting and Ion Density Measurements

Autoren: Lena Mokros, Niklas Pengemann, Sanna Benter, Michelle Rajkovic, Hendrik Kersten, Thorsten Benter
Veröffentlicht in: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
Herausgeber: 56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany

Deformable mirror characterization using novel Phase Tilted Interferometry method

Autoren: Oleg Soloviev
Veröffentlicht in: Proceedings Volume 13329, Quantitative Phase Imaging XI, 2025
Herausgeber: SPIE
DOI: 10.1117/12.3041952

Peer reviewed articles (1)

Sequential wafer map inspection via feedback loop with reinforcement learning

Autoren: Aleksandr Dekhovich, Oleg Soloviev, Michel Verhaegen
Veröffentlicht in: Expert Systems with Applications, 2025, ISSN 0957-4174
Herausgeber: Elsevier
DOI: 10.1016/J.ESWA.2025.126996