10 Angstrom CMOS exploration

Project Information

10ACe

Grant agreement ID: 101139972

DOI 10.3030/101139972

EC signature date 17 May 2024

Start date 1 May 2024

End date 30 April 2027

Funded under

• Digital, Industry and Space

Total cost € 97 951 886,50

EU contribution € 23 912 755,63

Coordinated by

ASML NETHERLANDS B.V.
Netherlands

CORDIS provides links to public deliverables and publications of HORIZON projects.

Links to deliverables and publications from FP7 projects, as well as links to some specific result types such as dataset and software, are dynamically retrieved from OpenAIRE .

Publications

Peer reviewed articles (1)

"Influence of water background pressure on removal rates of SiO<mml:math xmlns:mml=""http://www.w3.org/1998/Math/MathML"" altimg=""si5.svg"" display=""inline"" id=""d1e651""><mml:msub><mml:mrow/><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msub></mml:math>, Si and photo resist in reactive ion beam etching"

Author(s): Peter Birtel, Erik Rohkamm, Jens Bauer, Frank Frost
Published in: Surfaces and Interfaces, Issue 64, 2025, ISSN 2468-0230
Publisher: Elsevier BV
DOI: 10.1016/J.SURFIN.2025.106306