Silicon-Rich Materials for Advanced Semiconductor Fabrication

Project Information

IO-PR

Grant agreement ID: 190163952

DOI

10.3030/190163952

Project closed

EC signature date 24 July 2023

Start date 1 August 2023

End date 31 December 2025

Funded under

• The European Innovation Council (EIC)

Total cost

€ 3 553 200,00

EU contribution

€ 2 487 240,00

Coordinated by

PIBOND OY
Finland

CORDIS provides links to public deliverables and publications of HORIZON projects.

Links to deliverables and publications from FP7 projects, as well as links to some specific result types such as dataset and software, are dynamically retrieved from OpenAIRE .

Publications

Conference proceedings (3)

Designing EUV negative tone resist and underlayer approaches exhibiting 14nm half-pitch resolution

Author(s): Luong Nguyen Dang, Li-Ting Tseng, Anil Rajak, Thomas Gädda, Markus Laukkanen, Jagadish Salunke, Shima Moosakkani, Jyri Paulasaari, Juha Rantala, Michaela Vockenhuber, Dimitrios Kazazis, Yasin Ekinci
Publisher: SPIE
DOI: 10.1117/12.3014297

Designing EUV negative tone resist and underlayer approaches exhibiting 14nm half-pitch resolution

Author(s): Dang, Luong Nguyen; Tseng, Li-Ting; Rajak, Anil; Gädda, Thomas; Laukkanen, Markus; Salunke, Jagadish; Moosakkani, Shima; Paulasaari, Jyri; Rantala, Juha; Vockenhuber, Michaela; Kazazis, Dimitrios; Ekinci, Yasin
Published in: Advances in Patterning Materials and Processes XLI
Publisher: SPIE
DOI: 10.1117/12.3014297

Semiconductor Chips Enabling the Era of AI and Advanced Photonic Applications

Author(s): Thomas Gädda, Anton Anisimov, Lily Tseng, Kimmo Karaste, Lauri Manner, Neha Thakur, Uula Kantojärvi, Juha Rantala
Publisher: European Photonics Industry Consortium