Final Report Summary - CHARPAN (Charged particle nanotech)
- fabrication of leading edge complex masks, fabrication of 3D nanoimprint templates for 'Above IC' (Above Integrated circuits) nanoimprinting of microlenses for imager chips, as well as ion multi-beam nanopatterning for industry-driven applications in the fields of nanophotonics, nanomagnetics, energy conversion and nanobiotechnology.