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Pre-standardisation of incremental FIB micro-milling for intrinsic stress evaluation at the sub-micron scale

Objective

"Intrinsic (or residual) stresses, resulting from manufacturing or processing steps, mostly define the performance and limit the lifetime of nanostructured materials, thin films, coatings and MEMS devices.
The established techniques for micron-scale measurement of residual stress still have strong limitations, e.g. in terms of spatial resolution, lack of depth sensing, their applicability on non-crystalline materials or accessibility to industry.
In this project, a European consortium is established to develop an innovative, highly reproducible and automated measurement protocol for the analysis of residual stress on a sub-micron scale, based on incremental focused ion beam (FIB) milling, along with high-resolution in situ Scanning Electron Microscopy (SEM) imaging and full field strain analysis by digital image correlation (DIC).
The activities will focus on the implementation and pre-standardisation of automated FIB-SEM, DIC and inverse stress calculation procedures, under official project liaisons with both CEN and VAMAS, together with the analysis and modelling of FIB induced artefacts and stress-structure-properties relationship for the selected materials and devices.
The final aim of the project will be the development of innovative design rules, implemented into simulation and optimization tools under coordination of industry partners, for the production of residual stress-controlled nanostructured materials, with specific focus on (i) multi-layered nano-coatings, (ii) micro/nano-crystalline and amorphous materials, (iii) MEMS and 3D metal interconnects.
The project is expected to realize a breakthrough in measurement, standardization and modelling ability of the residual stress distribution at the sub-micron scale.
The measurement techniques and the simulation tools will provide SMEs in particular with enabling technologies for the design and efficient production of innovative micro-devices with improved performance and substantially reduce development costs."

Call for proposal

FP7-NMP-2013-LARGE-7
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Coordinator

UNIVERSITA DEGLI STUDI ROMA TRE
Address
Via Ostiense 133
00154 Roma
Italy

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Activity type
Higher or Secondary Education Establishments
Administrative Contact
Marco Sebastiani (Dr.)
EU contribution
€ 1 077 525,68

Participants (13)

NPL MANAGEMENT LIMITED
United Kingdom
EU contribution
€ 478 879
Address
Hampton Road Teddington
TW11 0LW Middlesex

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Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Jerry Lord (Dr.)
THE CHANCELLOR, MASTERS AND SCHOLARS OF THE UNIVERSITY OF OXFORD
United Kingdom
EU contribution
€ 700 457,20
Address
Wellington Square University Offices
OX1 2JD Oxford

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Activity type
Higher or Secondary Education Establishments
Administrative Contact
Gill Wells (Ms.)
FRIEDRICH-ALEXANDER-UNIVERSITAET ERLANGEN-NUERNBERG
Germany
EU contribution
€ 511 450
Address
Schlossplatz 4
91054 Erlangen

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Activity type
Higher or Secondary Education Establishments
Administrative Contact
Ulrike Hoffmann (Mrs.)
MONTANUNIVERSITAET LEOBEN
Austria
EU contribution
€ 549 812,50
Address
Franz Josef Strasse 18
8700 Leoben

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Activity type
Higher or Secondary Education Establishments
Administrative Contact
Rostislav Daniel (Dr.)
FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV
Germany
EU contribution
€ 1 236 120,62
Address
Hansastrasse 27c
80686 Munchen

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Activity type
Research Organisations
Administrative Contact
Christoph Schulte (Mr.)
EIDGENOESSISCHE TECHNISCHE HOCHSCHULE ZUERICH
Switzerland
EU contribution
€ 213 480
Address
Raemistrasse 101
8092 Zuerich

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Activity type
Higher or Secondary Education Establishments
Administrative Contact
Ralph Spolenak (Prof.)
UNIVERSITA DEGLI STUDI DI BRESCIA
Italy
EU contribution
€ 197 390
Address
Piazza Mercato 15
25121 Brescia

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Activity type
Higher or Secondary Education Establishments
Administrative Contact
Laura Depero (Prof.)
ROBERT BOSCH GMBH
Germany
EU contribution
€ 110 176
Address
Robert-bosch-platz 1
70839 Gerlingen-schillerhoehe

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Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Sandra Lehmann (Ms.)
BERLINER NANOTEST UND DESIGN GMBH
Germany
EU contribution
€ 165 150
Address
Volmerstrasse 9 B
12489 Berlin

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Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Thomas Winkler (Dr.)
TESCAN BRNO SRO
Czechia
EU contribution
€ 355 327
Address
Libusina Trida 816/1 816
623 00 Brno Kohoutovice

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Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Zora Střelcová
TESCAN AS

Participation ended

Czechia
Address
Libusina Tr 21
62300 Brno

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Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Zora Strelcova (Ms.)
THALES
France
EU contribution
€ 282 400
Address
Tour Carpe Diem Place Des Corolles Esplanade Nord
92400 Courbevoie

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Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Olivier Prevotat (Mr.)
TECHNISCHE UNIVERSITAT DARMSTADT
Germany
EU contribution
€ 257 700
Address
Karolinenplatz 5
64289 Darmstadt

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Activity type
Higher or Secondary Education Establishments
Administrative Contact
Melanie Meermann-Zimmermann (Dr.)