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Pre-standardisation of incremental FIB micro-milling for intrinsic stress evaluation at the sub-micron scale

Obiettivo

"Intrinsic (or residual) stresses, resulting from manufacturing or processing steps, mostly define the performance and limit the lifetime of nanostructured materials, thin films, coatings and MEMS devices.
The established techniques for micron-scale measurement of residual stress still have strong limitations, e.g. in terms of spatial resolution, lack of depth sensing, their applicability on non-crystalline materials or accessibility to industry.
In this project, a European consortium is established to develop an innovative, highly reproducible and automated measurement protocol for the analysis of residual stress on a sub-micron scale, based on incremental focused ion beam (FIB) milling, along with high-resolution in situ Scanning Electron Microscopy (SEM) imaging and full field strain analysis by digital image correlation (DIC).
The activities will focus on the implementation and pre-standardisation of automated FIB-SEM, DIC and inverse stress calculation procedures, under official project liaisons with both CEN and VAMAS, together with the analysis and modelling of FIB induced artefacts and stress-structure-properties relationship for the selected materials and devices.
The final aim of the project will be the development of innovative design rules, implemented into simulation and optimization tools under coordination of industry partners, for the production of residual stress-controlled nanostructured materials, with specific focus on (i) multi-layered nano-coatings, (ii) micro/nano-crystalline and amorphous materials, (iii) MEMS and 3D metal interconnects.
The project is expected to realize a breakthrough in measurement, standardization and modelling ability of the residual stress distribution at the sub-micron scale.
The measurement techniques and the simulation tools will provide SMEs in particular with enabling technologies for the design and efficient production of innovative micro-devices with improved performance and substantially reduce development costs."

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FP7-NMP-2013-LARGE-7
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Coordinatore

UNIVERSITA DEGLI STUDI ROMA TRE
Indirizzo
Via Ostiense 133
00154 Roma
Italia
Tipo di attività
Higher or Secondary Education Establishments
Contributo UE
€ 1 077 525,68
Contatto amministrativo
Marco Sebastiani (Dr.)

Partecipanti (13)

NPL MANAGEMENT LIMITED
United Kingdom
Contributo UE
€ 478 879
Indirizzo
Hampton Road Teddington
TW11 0LW Middlesex
Tipo di attività
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo
Jerry Lord (Dr.)
THE CHANCELLOR, MASTERS AND SCHOLARS OF THE UNIVERSITY OF OXFORD
United Kingdom
Contributo UE
€ 700 457,20
Indirizzo
Wellington Square University Offices
OX1 2JD Oxford
Tipo di attività
Higher or Secondary Education Establishments
Contatto amministrativo
Gill Wells (Ms.)
FRIEDRICH-ALEXANDER-UNIVERSITAET ERLANGEN-NUERNBERG
Germania
Contributo UE
€ 511 450
Indirizzo
Schlossplatz 4
91054 Erlangen
Tipo di attività
Higher or Secondary Education Establishments
Contatto amministrativo
Ulrike Hoffmann (Mrs.)
MONTANUNIVERSITAET LEOBEN
Austria
Contributo UE
€ 549 812,50
Indirizzo
Franz Josef Strasse 18
8700 Leoben
Tipo di attività
Higher or Secondary Education Establishments
Contatto amministrativo
Rostislav Daniel (Dr.)
FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Germania
Contributo UE
€ 1 236 120,62
Indirizzo
Hansastrasse 27C
80686 Munchen
Tipo di attività
Research Organisations
Contatto amministrativo
Christoph Schulte (Mr.)
EIDGENOESSISCHE TECHNISCHE HOCHSCHULE ZUERICH
Svizzera
Contributo UE
€ 213 480
Indirizzo
Raemistrasse 101
8092 Zuerich
Tipo di attività
Higher or Secondary Education Establishments
Contatto amministrativo
Ralph Spolenak (Prof.)
UNIVERSITA DEGLI STUDI DI BRESCIA
Italia
Contributo UE
€ 197 390
Indirizzo
Piazza Mercato 15
25121 Brescia
Tipo di attività
Higher or Secondary Education Establishments
Contatto amministrativo
Laura Depero (Prof.)
ROBERT BOSCH GMBH
Germania
Contributo UE
€ 110 176
Indirizzo
Robert-bosch-platz 1
70839 Gerlingen-schillerhoehe
Tipo di attività
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo
Sandra Lehmann (Ms.)
BERLINER NANOTEST UND DESIGN GMBH
Germania
Contributo UE
€ 165 150
Indirizzo
Volmerstrasse 9 B
12489 Berlin
Tipo di attività
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo
Thomas Winkler (Dr.)
TESCAN BRNO SRO
Cechia
Contributo UE
€ 355 327
Indirizzo
Libusina Trida 816/1 816
623 00 Brno Kohoutovice
Tipo di attività
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo
Zora Střelcová
TESCAN AS

Partecipazione conclusa

Cechia
Indirizzo
Libusina Tr 21
62300 Brno
Tipo di attività
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo
Zora Strelcova (Ms.)
THALES
Francia
Contributo UE
€ 282 400
Indirizzo
Tour Carpe Diem Place Des Corolles Esplanade Nord
92400 Courbevoie
Tipo di attività
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo
Olivier Prevotat (Mr.)
TECHNISCHE UNIVERSITAT DARMSTADT
Germania
Contributo UE
€ 257 700
Indirizzo
Karolinenplatz 5
64289 Darmstadt
Tipo di attività
Higher or Secondary Education Establishments
Contatto amministrativo
Melanie Meermann-Zimmermann (Dr.)