Pilot Integration of 3nm Semiconducter technology

Project description

Building efficient pilot production line for 3-nanometre transistors

Over the past decades, computer chips have gotten smaller thanks to advances in materials science and manufacturing technologies. In the electronics industry this is denoted as Moore’s Law saying that 'on average there is a 2x increase in functionality every 2 years'. In semiconductor manufacturing after the 5-nanometre node which is presently being developed, 3-nanometre is the next. Reducing the size of transistors enables a new class of products that outperform state-of-the-art systems in terms of functionality, speed and power consumption. Tightly connecting with large European equipment developers and academic institutions, the EU-funded PIn3S project aims to launch a pilot production line of 3-nanometre semiconductor technology. The focus will be on optimizing process integration, and developing new lithography, mask repair and metrology tools. This new technological breakthrough will significantly impact diverse industries including communication, mobility, healthcare, energy, and safety and security.

Fields of science

• natural sciences › physical sciences › electromagnetism and electronics › electrical conductivity › semiconductor

Programme(s)

• H2020-EU.2.1.1.7. - ECSEL

Topic(s)

• ECSEL-2018-1-IA - ECSEL-2018-1-IA

Call for proposal

H2020-ECSEL-2018-1-IA-two-stage
See other projects for this call

Funding Scheme

ECSEL-IA - ECSEL Innovation Action

Coordinator

ASML NETHERLANDS B.V.

Address

De Run 6501
5504DR Veldhoven
Netherlands

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

EU contribution

€ 4 500 000

Participants (23)

APPLIED MATERIALS BELGIUM

Belgium

EU contribution

€ 68 149,45

Address

Kapeldreef 75 Bus C1
3001 Leuven

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

APPLIED MATERIALS ISRAEL LTD

Israel

EU contribution

€ 984 188

Address

Oppenheimer Street 9
76705 Rehovot

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

BERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO

Germany

EU contribution

€ 1 422 687,50

Address

Waldkraiburger Strasse 5
12347 Berlin

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

SIOUX TECHNOLOGIES BV

Netherlands

EU contribution

€ 703 930,75

Address

Esp 405
5633 AJ Eindhoven

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

COVENTOR SARL

France

EU contribution

€ 259 696,25

Address

Avenue Du Quebec 3
91140 Villebon Sur Yvette

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

Germany

EU contribution

€ 903 068,69

Address

Hansastrasse 27C
80686 Munchen

Activity type

Research Organisations

ION BEAM SERVICES

France

EU contribution

€ 265 795

Address

Rue Gaston Imbert Prolongee
13790 Rousset

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM

Belgium

EU contribution

€ 5 779 129,57

Address

Kapeldreef 75
3001 Leuven

Activity type

Research Organisations

KLA-Tencor MIE GmbH

Participation ended

Germany

EU contribution

€ 0

Address

Kubacher Weg 4
35781 Weilburg

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

KLA-TENCOR CORPORATION (ISRAEL)

Israel

EU contribution

€ 1 508 325

Address

Hatikshoret St.
23100 Migdal Haemek

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

NOVA MEASURING INSTRUMENTS LTD

Israel

EU contribution

€ 796 478

Address

Weizmann Science Park Building 22
76100 Rehovot

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

PFEIFFER VACUUM

France

EU contribution

€ 196 909

Address

98 Avenue De Brogny
74000 Annecy

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

PRODRIVE TECHNOLOGIES BV

Netherlands

EU contribution

€ 828 750

Address

Science Park Eindhoven 5501
5692 EM Son

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

RECIF TECHNOLOGIES

France

EU contribution

€ 99 108,75

Address

Rue Des Briquetiers 9
31700 Blagnac

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

REDEN B.V.

Netherlands

EU contribution

€ 79 827,50

Address

F Hazemeijerstraat 800
7555 RJ Hengelo Ov

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

SCIA SYSTEMS GMBH

Germany

EU contribution

€ 157 644

Address

Annaberger Strasse 240
09125 Chemnitz

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

SOLMATES BV

Netherlands

EU contribution

€ 151 437,50

Address

Auke Vleerstraat 3
7521 PE Enschede

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

FEI ELECTRON OPTICS BV

Netherlands

EU contribution

€ 690 250

Address

Achtseweg Noord Gebouw Aae 5
5651 GG Eindhoven

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

TECHNISCHE UNIVERSITEIT DELFT

Netherlands

EU contribution

€ 241 652,25

Address

Stevinweg 1
2628 CN Delft

Activity type

Higher or Secondary Education Establishments

UNIVERSITEIT TWENTE

Netherlands

EU contribution

€ 975 166,25

Address

Drienerlolaan 5
7522 NB Enschede

Activity type

Higher or Secondary Education Establishments

UNIVERSITATEA POLITEHNICA DIN BUCURESTI

Romania

EU contribution

€ 0

Address

Splaiul Independentei 313 Sect 6
060042 Bucharest

Activity type

Higher or Secondary Education Establishments

VDL ETG TECHNOLOGY & DEVELOPMENT BV

Netherlands

EU contribution

€ 233 870

Address

Schakel 22
5651 GH Eindhoven

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

CARL ZEISS SMT GMBH

Germany

EU contribution

€ 5 913 176,25

Address

Rudolf Eber Strasse 2
73447 Oberkochen

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)