Project description DEENESFRITPL Building efficient pilot production line for 3-nanometre transistors Over the past decades, computer chips have gotten smaller thanks to advances in materials science and manufacturing technologies. In the electronics industry this is denoted as Moore’s Law saying that 'on average there is a 2x increase in functionality every 2 years'. In semiconductor manufacturing after the 5-nanometre node which is presently being developed, 3-nanometre is the next. Reducing the size of transistors enables a new class of products that outperform state-of-the-art systems in terms of functionality, speed and power consumption. Tightly connecting with large European equipment developers and academic institutions, the EU-funded PIn3S project aims to launch a pilot production line of 3-nanometre semiconductor technology. The focus will be on optimizing process integration, and developing new lithography, mask repair and metrology tools. This new technological breakthrough will significantly impact diverse industries including communication, mobility, healthcare, energy, and safety and security. Show the project objective Hide the project objective Objective The overall objective of the PIn3S project is to realize Pilot Integration of 3nm Semiconductor technology. This covers Process Integration, creation of Lithography Equipment, EUV Mask Repair Equipment and Metrology tools capable to deal with 3D structures, defects analysis, overlay and feature size evaluation.Each of these objectives will be achieved by cooperation between key European equipment developers like; ASML, Zeiss, Thermo Fisher, Applied Materials, Nova, KTI involved with their suppliers, involvement of a strong knowledge network based on Universities of Germany, Heidelberg University Hospital, and the Netherland, TU Delft and the University of Twente, complemented with key Technology Institutes such as imec and Fraunhofer.The project addresses Section 15 “Electronics Components & Systems Process Technology, Equipment, Materials and Manufacturing”, Major Challenge 4 “Maintaining world leadership in Semiconductor Equipment, Materials and Manufacturing solutions” and Major Challenge 1 “Developing advanced logic and memory technology for nanoscale integration and application-driven performance” of the ECSEL JU Annual Work Plan 2018.As set out in the Multi Annual Strategic Plan 2018, PIn3S addresses the ambition for the European Equipment & Manufacturing industry for advanced semiconductor technologies to lead the world in miniaturization by supplying new equipment and materials approximately two years ahead of introduction of volume production of advanced semiconductor manufacturers. With the results of the Pin3S project the consortium builds on realizing IC manufacturers to migrate to the 3nm Technology node which enables a class of new products which have more functionality, more performance and are more power efficient. As such it will form the bases for innovations yet to come enabling solutions that address the societal challenges in communication, mobility, health care, security, energy and safety & security. Fields of science natural sciencesphysical scienceselectromagnetism and electronicssemiconductivity Keywords Semiconductor process equipment Nano Technology and materials Programme(s) H2020-EU.2.1.1. - INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies - Information and Communication Technologies (ICT) Main Programme H2020-EU.2.1.1.7. - ECSEL Topic(s) ECSEL-2018-1-IA - ECSEL-2018-1-IA Call for proposal H2020-ECSEL-2018-1-IA-two-stage See other projects for this call Funding Scheme IA - Innovation action Coordinator ASML NETHERLANDS B.V. Net EU contribution € 4 445 476,65 Address De run 6501 5504DR Veldhoven Netherlands See on map Region Zuid-Nederland Noord-Brabant Zuidoost-Noord-Brabant Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 17 781 906,60 Participants (27) Sort alphabetically Sort by Net EU contribution Expand all Collapse all APPLIED MATERIALS BELGIUM Belgium Net EU contribution € 51 187,50 Address Kapeldreef 75 bus c1 3001 Leuven See on map Region Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 230 062,50 APPLIED MATERIALS ISRAEL LTD Israel Net EU contribution € 1 001 149,95 Address Oppenheimer street 9 76705 Rehovot See on map Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 4 752 589,39 ASML BERLIN GMBH Germany Net EU contribution € 1 422 687,50 Address Waldkraiburger strasse 5 12347 Berlin See on map Region Berlin Berlin Berlin Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 5 690 750,00 SIOUX TECHNOLOGIES BV Netherlands Net EU contribution € 703 930,75 Address Esp 405 5633 AJ Eindhoven See on map Region Zuid-Nederland Noord-Brabant Zuidoost-Noord-Brabant Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 2 815 723,00 COVENTOR SARL France Net EU contribution € 223 446,25 Address Avenue du quebec 3 91140 Villebon sur yvette See on map Region Ile-de-France Ile-de-France Essonne Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 893 785,00 Third-party Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure. LAM RESEARCH BELGIUM Belgium Net EU contribution € 36 250,00 Address Kapeldreef 75 3001 Leuven See on map Region Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 145 000,00 FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV Germany Net EU contribution € 932 445,56 Address Hansastrasse 27c 80686 Munchen See on map Region Bayern Oberbayern München, Kreisfreie Stadt Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 1 731 684,60 ION BEAM SERVICES France Net EU contribution € 265 795,00 Address Rue gaston imbert prolongee 13790 Rousset See on map SME The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed. Yes Region Provence-Alpes-Côte d’Azur Provence-Alpes-Côte d’Azur Bouches-du-Rhône Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 797 385,00 INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM Belgium Net EU contribution € 5 779 129,57 Address Kapeldreef 75 3001 Leuven See on map Region Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven Activity type Research Organisations Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 12 365 702,93 KLA-Tencor MIE GmbH Participation ended Germany Net EU contribution € 0,00 Address Kubacher weg 4 35781 Weilburg See on map Region Hessen Gießen Limburg-Weilburg Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 0,00 KLA-TENCOR CORPORATION (ISRAEL) Israel Net EU contribution € 1 508 325,00 Address Hatikshoret st. 23100 Migdal haemek See on map Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 6 279 175,00 NOVA LTD Israel Net EU contribution € 796 478,00 Address 5 david fikes st 76100 Rehovot See on map Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 3 579 772,00 PFEIFFER VACUUM France Net EU contribution € 196 909,00 Address 98 avenue de brogny 74000 Annecy See on map Region Auvergne-Rhône-Alpes Rhône-Alpes Haute-Savoie Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 787 636,00 PRODRIVE TECHNOLOGIES BV Netherlands Net EU contribution € 414 375,00 Address Science park eindhoven 5501 5692 EM Son See on map Region Zuid-Nederland Noord-Brabant Zuidoost-Noord-Brabant Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 1 657 500,00 Third-party Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure. PRODRIVE TECHNOLOGIES INNOVATION SERVICES B.V. Netherlands Net EU contribution € 414 375,00 Address Science park eindhoven 5501 5692 EM Son en breugel See on map Region Zuid-Nederland Noord-Brabant Zuidoost-Noord-Brabant Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 1 657 500,00 RECIF TECHNOLOGIES France Net EU contribution € 99 108,75 Address Rue des briquetiers 9 31700 Blagnac See on map SME The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed. Yes Region Occitanie Midi-Pyrénées Haute-Garonne Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 297 326,25 REDEN B.V. Netherlands Net EU contribution € 79 827,50 Address F hazemeijerstraat 800 7555 RJ Hengelo ov See on map SME The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed. Yes Region Oost-Nederland Overijssel Twente Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 239 482,50 SCIA SYSTEMS GMBH Germany Net EU contribution € 121 442,12 Address Annaberger strasse 240 09125 Chemnitz See on map Region Sachsen Chemnitz Chemnitz Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 545 821,63 SOLMATES BV Netherlands Net EU contribution € 151 437,50 Address Auke vleerstraat 3 7521 PE Enschede See on map SME The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed. Yes Region Oost-Nederland Overijssel Twente Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 454 312,50 FEI ELECTRON OPTICS BV Netherlands Net EU contribution € 690 250,00 Address Achtseweg noord gebouw aae 5 5651 GG Eindhoven See on map Region Zuid-Nederland Noord-Brabant Zuidoost-Noord-Brabant Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 2 761 000,00 TECHNISCHE UNIVERSITEIT DELFT Netherlands Net EU contribution € 296 175,69 Address Stevinweg 1 2628 CN Delft See on map Region West-Nederland Zuid-Holland Delft en Westland Activity type Higher or Secondary Education Establishments Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 550 040,56 UNIVERSITEIT TWENTE Netherlands Net EU contribution € 975 166,25 Address Drienerlolaan 5 7522 NB Enschede See on map Region Oost-Nederland Overijssel Twente Activity type Higher or Secondary Education Establishments Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 1 811 396,25 UNIVERSITATEA POLITEHNICA DIN BUCURESTI Romania Net EU contribution € 0,00 Address Splaiul independentei 313 sect 6 060042 Bucharest See on map Region Macroregiunea Trei Bucureşti-Ilfov Bucureşti Activity type Higher or Secondary Education Establishments Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 0,00 VDL ETG TECHNOLOGY & DEVELOPMENT BV Netherlands Net EU contribution € 33 870,00 Address Schakel 22 5651 GH Eindhoven See on map Region Zuid-Nederland Noord-Brabant Zuidoost-Noord-Brabant Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 135 480,00 Third-party Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure. VDL ETG TECHNOLOGY AND DEVELOPMENT HENGELO BV Netherlands Net EU contribution € 200 000,00 Address Industrieplein 1 7553 LL Hengelo See on map Region Oost-Nederland Overijssel Twente Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 800 000,00 CARL ZEISS SMT GMBH Germany Net EU contribution € 5 885 232,75 Address Rudolf eber strasse 2 73447 Oberkochen See on map Region Baden-Württemberg Stuttgart Ostalbkreis Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 23 540 931,00 Third-party Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure. CARL ZEISS MICROSCOPY GMBH Germany Net EU contribution € 27 943,50 Address Carl zeiss promenade 10 07745 Jena See on map Region Thüringen Thüringen Jena, Kreisfreie Stadt Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Other funding € 111 774,00