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Pilot Integration of 3nm Semiconducter technology

Project description

Building efficient pilot production line for 3-nanometre transistors

Over the past decades, computer chips have gotten smaller thanks to advances in materials science and manufacturing technologies. In the electronics industry this is denoted as Moore’s Law saying that 'on average there is a 2x increase in functionality every 2 years'. In semiconductor manufacturing after the 5-nanometre node which is presently being developed, 3-nanometre is the next. Reducing the size of transistors enables a new class of products that outperform state-of-the-art systems in terms of functionality, speed and power consumption. Tightly connecting with large European equipment developers and academic institutions, the EU-funded PIn3S project aims to launch a pilot production line of 3-nanometre semiconductor technology. The focus will be on optimizing process integration, and developing new lithography, mask repair and metrology tools. This new technological breakthrough will significantly impact diverse industries including communication, mobility, healthcare, energy, and safety and security.

Field of science

  • /natural sciences/physical sciences/electromagnetism and electronics/electrical conductivity/semiconductor

Call for proposal

H2020-ECSEL-2018-1-IA-two-stage
See other projects for this call

Funding Scheme

ECSEL-IA - ECSEL Innovation Action

Coordinator

ASML NETHERLANDS B.V.
Address
De Run 6501
5504DR Veldhoven
Netherlands
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
EU contribution
€ 4 500 000

Participants (23)

APPLIED MATERIALS BELGIUM
Belgium
EU contribution
€ 116 875
Address
Kapeldreef 75 Bus C1
3001 Leuven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
APPLIED MATERIALS ISRAEL LTD
Israel
EU contribution
€ 984 188
Address
Oppenheimer Street 9
76705 Rehovot
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
BERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO
Germany
EU contribution
€ 1 422 687,50
Address
Waldkraiburger Strasse 5
12347 Berlin
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
SIOUX CCM BV
Netherlands
EU contribution
€ 703 930,75
Address
De Pinckart 24
5674 CC Nuenen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
COVENTOR SARL
France
EU contribution
€ 259 696,25
Address
Avenue Du Quebec 3
91140 Villebon Sur Yvette
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Germany
EU contribution
€ 903 068,69
Address
Hansastrasse 27C
80686 Munchen
Activity type
Research Organisations
ION BEAM SERVICES
France
EU contribution
€ 265 795
Address
Rue Gaston Imbert Prolongee
13790 Rousset
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium
EU contribution
€ 5 734 108
Address
Kapeldreef 75
3001 Leuven
Activity type
Research Organisations
KLA-Tencor MIE GmbH
Germany
EU contribution
€ 1 164 750
Address
Kubacher Weg 4
35781 Weilburg
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
KLA-TENCOR CORPORATION (ISRAEL)
Israel
EU contribution
€ 368 550
Address
Hatikshoret St.
23100 Migdal Haemek
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
NOVA MEASURING INSTRUMENTS LTD
Israel
EU contribution
€ 796 478
Address
Weizmann Science Park Building 22
76100 Rehovot
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
PFEIFFER VACUUM
France
EU contribution
€ 196 909
Address
98 Avenue De Brogny
74000 Annecy
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
PRODRIVE TECHNOLOGIES BV
Netherlands
EU contribution
€ 828 750
Address
Science Park Eindhoven 5501
5692 EM Son
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
RECIF TECHNOLOGIES
France
EU contribution
€ 99 108,75
Address
Rue Des Briquetiers 9
31700 Blagnac
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
REDEN B.V.
Netherlands
EU contribution
€ 79 827,50
Address
F Hazemeijerstraat 800
7555 RJ Hengelo Ov
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
SCIA SYSTEMS GMBH
Germany
EU contribution
€ 157 644
Address
Annaberger Strasse 240
09125 Chemnitz
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
SOLMATES BV
Netherlands
EU contribution
€ 151 437,50
Address
Auke Vleerstraat 3
7521 PE Enschede
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
FEI ELECTRON OPTICS BV
Netherlands
EU contribution
€ 690 250
Address
Achtseweg Noord Gebouw Aae 5
5651 GG Eindhoven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
TECHNISCHE UNIVERSITEIT DELFT
Netherlands
EU contribution
€ 241 652,25
Address
Stevinweg 1
2628 CN Delft
Activity type
Higher or Secondary Education Establishments
UNIVERSITEIT TWENTE
Netherlands
EU contribution
€ 975 166,25
Address
Drienerlolaan 5
7522 NB Enschede
Activity type
Higher or Secondary Education Establishments
UNIVERSITATEA POLITEHNICA DIN BUCURESTI
Romania
EU contribution
€ 0
Address
Splaiul Independentei 313 Sect 6
060042 Bucharest
Activity type
Higher or Secondary Education Establishments
VDL ETG TECHNOLOGY & DEVELOPMENT BV
Netherlands
EU contribution
€ 233 870
Address
Schakel 22
5651 GH Eindhoven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
CARL ZEISS SMT GMBH
Germany
EU contribution
€ 5 913 176,25
Address
Rudolf Eber Strasse 2
73447 Oberkochen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)