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Pilot Integration of 3nm Semiconducter technology

Project description

Building efficient pilot production line for 3-nanometre transistors

Over the past decades, computer chips have gotten smaller thanks to advances in materials science and manufacturing technologies. In the electronics industry this is denoted as Moore’s Law saying that 'on average there is a 2x increase in functionality every 2 years'. In semiconductor manufacturing after the 5-nanometre node which is presently being developed, 3-nanometre is the next. Reducing the size of transistors enables a new class of products that outperform state-of-the-art systems in terms of functionality, speed and power consumption. Tightly connecting with large European equipment developers and academic institutions, the EU-funded PIn3S project aims to launch a pilot production line of 3-nanometre semiconductor technology. The focus will be on optimizing process integration, and developing new lithography, mask repair and metrology tools. This new technological breakthrough will significantly impact diverse industries including communication, mobility, healthcare, energy, and safety and security.

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Coordinator

ASML NETHERLANDS B.V.
Net EU contribution
€ 4 445 476,65
Address
De Run 6501
5504DR Veldhoven
Netherlands
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 17 781 906,60

Participants (26)

APPLIED MATERIALS BELGIUM
Belgium
Net EU contribution
€ 68 149,45
Address
Kapeldreef 75 Bus C1
3001 Leuven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 306 298,05
Region
Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven
 
APPLIED MATERIALS ISRAEL LTD
Israel
Net EU contribution
€ 984 188,00
Address
Oppenheimer Street 9
76705 Rehovot
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 4 672 062,00
ASML BERLIN GMBH
Germany
Net EU contribution
€ 1 422 687,50
Address
Waldkraiburger Strasse 5
12347 Berlin
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 5 690 750,00
SIOUX TECHNOLOGIES BV
Netherlands
Net EU contribution
€ 703 930,75
Address
Esp 405
5633 AJ Eindhoven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 2 815 723,00
Region
Noord-Brabant Zuidoost-Noord-Brabant
 
COVENTOR SARL
France
Net EU contribution
€ 223 446,25
Address
Avenue Du Quebec 3
91140 Villebon Sur Yvette
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 893 785,00
Third-party

Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.

LAM RESEARCH BELGIUM
Belgium
Net EU contribution
€ 36 250,00
Address
Kapeldreef 75
3001 Leuven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 145 000,00
Region
Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven
 
FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV
Germany
Net EU contribution
€ 903 068,69
Address
Hansastrasse 27C
80686 Munchen
Activity type
Research Organisations
Non-EU contribution
€ 1 677 127,56
ION BEAM SERVICES
France
Net EU contribution
€ 265 795,00
SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Address
Rue Gaston Imbert Prolongee
13790 Rousset
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 797 385,00
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium
Net EU contribution
€ 5 779 129,57
Address
Kapeldreef 75
3001 Leuven
Activity type
Research Organisations
Non-EU contribution
€ 12 365 702,93
Region
Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven
KLA-Tencor MIE GmbH

Participation ended

Germany
Net EU contribution
€ 0,00
Address
Kubacher Weg 4
35781 Weilburg
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 0,00
KLA-TENCOR CORPORATION (ISRAEL)
Israel
Net EU contribution
€ 1 508 325,00
Address
Hatikshoret St.
23100 Migdal Haemek
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 6 279 175,00
NOVA LTD
Israel
Net EU contribution
€ 796 478,00
Address
5 David Fikes St
76100 Rehovot
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 3 579 772,00
PFEIFFER VACUUM
France
Net EU contribution
€ 196 909,00
Address
98 Avenue De Brogny
74000 Annecy
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 787 636,00
Region
Auvergne-Rhône-Alpes Rhône-Alpes Haute-Savoie
PRODRIVE TECHNOLOGIES BV
Netherlands
Net EU contribution
€ 828 750,00
Address
Science Park Eindhoven 5501
5692 EM Son
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 3 315 000,00
RECIF TECHNOLOGIES
France
Net EU contribution
€ 99 108,75
SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Address
Rue Des Briquetiers 9
31700 Blagnac
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 297 326,25
REDEN B.V.
Netherlands
Net EU contribution
€ 79 827,50
SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Address
F Hazemeijerstraat 800
7555 RJ Hengelo Ov
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 239 482,50
SCIA SYSTEMS GMBH
Germany
Net EU contribution
€ 150 818,99
Address
Annaberger Strasse 240
09125 Chemnitz
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 677 856,01
Region
Sachsen Chemnitz Chemnitz
 
SOLMATES BV
Netherlands
Net EU contribution
€ 151 437,50
SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Address
Auke Vleerstraat 3
7521 PE Enschede
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 454 312,50
FEI ELECTRON OPTICS BV
Netherlands
Net EU contribution
€ 690 250,00
Address
Achtseweg Noord Gebouw Aae 5
5651 GG Eindhoven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 2 761 000,00
TECHNISCHE UNIVERSITEIT DELFT
Netherlands
Net EU contribution
€ 296 175,69
Address
Stevinweg 1
2628 CN Delft
Activity type
Higher or Secondary Education Establishments
Non-EU contribution
€ 550 040,56
Region
West-Nederland Zuid-Holland Delft en Westland
UNIVERSITEIT TWENTE
Netherlands
Net EU contribution
€ 975 166,25
Address
Drienerlolaan 5
7522 NB Enschede
Activity type
Higher or Secondary Education Establishments
Non-EU contribution
€ 1 811 396,25
UNIVERSITATEA POLITEHNICA DIN BUCURESTI
Romania
Net EU contribution
€ 0,00
Address
Splaiul Independentei 313 Sect 6
060042 Bucharest
Activity type
Higher or Secondary Education Establishments
Non-EU contribution
€ 0,00
Region
Macroregiunea Trei Bucureşti-Ilfov Bucureşti
VDL ETG TECHNOLOGY & DEVELOPMENT BV
Netherlands
Net EU contribution
€ 33 870,00
Address
Schakel 22
5651 GH Eindhoven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 135 480,00
Region
Noord-Brabant Zuidoost-Noord-Brabant
 
Third-party

Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.

VDL ETG TECHNOLOGY AND DEVELOPMENT HENGELO BV
Netherlands
Net EU contribution
€ 200 000,00
Address
Industrieplein 1
7553 LL Hengelo
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 800 000,00
Region
Oost-Nederland Overijssel Twente
 
CARL ZEISS SMT GMBH
Germany
Net EU contribution
€ 5 885 232,75
Address
Rudolf Eber Strasse 2
73447 Oberkochen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 23 540 931,00
Region
Baden-Württemberg Stuttgart Ostalbkreis
 
Third-party

Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.

CARL ZEISS MICROSCOPY GMBH
Germany
Net EU contribution
€ 27 943,50
Address
Carl Zeiss Promenade 10
07745 Jena
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 111 774,00
Region
Thüringen Thüringen Jena, Kreisfreie Stadt