Livrables
Synthesis of He* prototype resist to be supplied to WP5
Helium Ion Beam ResistSynthesis of Helium Ion Beam Resist
Mask for 50 nm lithographyFabrication of masks for lithography in the resolution range 50 nm
Public website available online and logo of the project created
Report outlining which part of the data will be accessible only to the partners and which part will be open to others in full compliance with an Open-Access policy.
Publications
Auteurs:
Johannes Fiedler, Adriá Salvador Palau, Eivind Kristen Osestad, Pekka Parviainen and Bodil Holst
Publié dans:
Machine Learning: Science and Technology, 2023, ISSN 2632-2153
Éditeur:
IOP Publishing
DOI:
10.1088/2632-2153/acd988
Auteurs:
Johannes Fiedler; Bodil Holst
Publié dans:
Journal of Physics B: Atomic, Molecular and Optical Physics, Numéro 00223700, 2022, ISSN 0022-3700
Éditeur:
Institute of Physics
DOI:
10.1088/1361-6455/ac4b41
Recherche de données OpenAIRE...
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