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Automated Maskless Laser Lithography Platform for First Time Right Mixed Scale Patterning

Descrizione del progetto

I laser per una produzione industriale più sostenibile

Le tecnologie basate sul laser che producono strutture di dimensioni comprese tra i nanometri e i millimetri possono essere impiegate in diverse applicazioni, tra cui la fotonica, le superfici multifunzionali e i laboratori su chip. La litografia laser viene utilizzata per produrre queste strutture molto sottili, ma i suoi processi presentano diverse limitazioni. Il progetto OPTIMAL, finanziato dall’UE, combinerà per la prima volta diverse tecnologie di litografia laser e sistemi di monitoraggio della qualità in un’unica piattaforma per sviluppare determinate strutture. L’obiettivo è accelerare e migliorare la procedura di strutturazione. Ciò dovrebbe aumentare l’efficienza del processo e la resa, riducendo al minimo il consumo di energia, evitando gli sprechi di materiale, abbassando i costi e riducendo i tempi di realizzazione in molte applicazioni.

Obiettivo

Laser-based technologies for creating structures in the range from nanometer up to millimeter size find many applications such as free form optics, photonics, multifunctional surfaces, lab-on-chip, etc. with a global market volume of > 200 billion euros. The original structures know as masters are the first step in the making of tools for key-enabling technologies like injection molding or nanoimprinting. Some of the current limitations in the laser lithography processes are the limited depth of the structures, small area and low speed at process level, high-power consumption in the laser interference lithography, and multiple and expensive processes required for the development of hierarchical multifunctional structures at industrial level.
The OPTIMAL project will integrate for the first-time different laser lithography technologies, quality monitoring systems and processes in one platform for the development of structures with (i) high depth (150 micrometer), ii) dimensions in the range from 100 nm to sub-mm in XYZ, iii) 2D&3D shape on flat surface, (iv) combining parallel & serial patterning, (v) no need for external treatments on samples; vi) increased speed (1 cm2/min) and large area (up to 2000 cm2), vii) > 40% of reduction in the consumption of resources for the whole manufacturing process. The OPTIMAL project uses self-learning algorithms to optimize the virtual photomask as well as integrates methods for an inline control of the laser patterning.
By accelerating and upscaling the structuring process, the OPTIMAL project will increase the process efficiency and yield, which will reduce the energy consumption, avoid material waste, decrease costs, and lead time in many applications. The platform will potentiate the possibilities in the sustainable making of high quality, versatile, less costly masters for industrial manufacturing, as demonstrated in 4 use cases (optical lenses, multifunctional riblet structures, virtual reality lens, microfluidic chips).

Coordinatore

JOANNEUM RESEARCH FORSCHUNGSGESELLSCHAFT MBH
Contribution nette de l'UE
€ 1 652 264,59
Indirizzo
LEONHARDSTRASSE 59
8010 Graz
Austria

Mostra sulla mappa

Regione
Südösterreich Steiermark Graz
Tipo di attività
Research Organisations
Collegamenti
Costo totale
€ 1 652 264,59

Partecipanti (9)