CORDIS provides links to public deliverables and publications of HORIZON projects.
Links to deliverables and publications from FP7 projects, as well as links to some specific result types such as dataset and software, are dynamically retrieved from OpenAIRE .
Deliverables
Properties of lithographic patterning for a positive & a negative tone resist series to generate binary (2D), grayscale 2.5D and 3D patterns by using 1) a mask aligner process, 2) one photon laser & a two/ multi photon process and 3) interference lithography process, Summary of chemical, optical, mechanical, and thermal properties of resist patterns.
Plan for Dissemination and Communication (opens in new window)The Plan for Dissemination and Communication is a working document where the dissemination strategy and tools to be used during the life of the project are described.
Publications
Author(s):
Christine Schuster, Gerda Ekindorf, Anja Voigt, Arne Schleunitz, Gabi Grützner
Published in:
Proceedings Volume 12497, Novel Patterning Technologies, Issue Volume 12497, 2023
Publisher:
SPIE - Proceedings Volume 12497, Novel Patterning Technologies 2023; 124970P (2023)
DOI:
10.1117/12.2661526
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