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Zawartość zarchiwizowana w dniu 2024-05-28

High Voltage amplifier for MEMS-based Active Flow Control (AFC) Actuators

Final Report Summary - HIVOLA (High Voltage amplifier for MEMS-based Active Flow Control (AFC) Actuators)

Executive Summary:

Introduction:

In today’s green aircraft technology development active flow control techniques are used to reduce noise, COx/ NOx emission and fuel consumption. MEMS based piezoelectric actuators for active flow control have strong requirements with respect to the actuation voltage level and the capacitive load which has to be controlled. Commercial high voltage amplifier components are mostly large and heavy or can only drive moderate capacitive loads. This work has been carried out within the 7th Framework program of the JTI Clean Sky. An integrated high-voltage circuit (HV-ASIC) consisting of six high-voltage amplifier stages together with integrated electronics for temperature monitoring and phase shift control has been developed and characterized.
1. Design Approach and Implementation
The focus of this development was the demonstration of the actuation of micro-pulsed jet actuator (µPJA) elements by integrated high voltage amplifier stages. An output stage design based on high-voltage PMOS and DMOS devices has been implemented in a 1 µm technology- XDH10 of XFAB foundry AG. Each output stage is able to drive capacitive loads up to 100 nF at a level of 300 V with an operation frequency of 500 Hz or 2.5 nF with 20 kHz, respectively. In order to reduce the maximum peak current a phase shift circuitry has been implemented whereas the output signal of each HV stage can be shifted by 60 °. In a first iteration three different HV output stage topologies have been designed, simulated, fabricated and measured on a test chip in order to judge the performance of these output stages. The best approach could be identified with the PMOS/ DMOS output stage (Figure 1). The evaluation has been carried out using CoB (Chip on Board) assemblies of two different carrier materials (FR4/ Aluminum). Based on the results of the test chip a final HV ASIC could be developed and fabricated. The methodology of this HV ASIC design follows the ideas of:
o Accessibility to each relevant subcircuit in order to enable a single characterization
o Decoupling of subsystem functionalities by turn_off features in order to ensure full system functionality even in case of single malfunctions which may be fixed by external circuitries.
o Each HV stage can be powered separately and can drive a maximum load of 100 nF parallel to 50 kOhm.
o Energy saving/ Power management by phase shift unit
o HV operation emergency stop in case of excessive heating by integrated temperature control with automatic turn_off
o Simulations were done with respect to save start-up, technology tolerances, temperature range and functionalities.
2. Results
The mock-up panel consists of three basic modules whereas the HV ASIC module and the actuator module are the main elements. The third module is designed to provide a useful common 230 V AC/ 24 V DC and 24 V DC/ HV DC conversion for easy use and demonstration by SFWA partners. In a final aircraft implementation it may be easy to be replaced by an optimized solution with respect to the board voltage supply capabilities. Exemplary the results of all six HV output stages with applied full load of 100 nF with 300 V/ 500 Hz and the related output signals could be shown.

3. Summary
An integrated high voltage circuit has been developed in order to drive high capacitive loads up to 600 nF and enable operation voltages up to 300 V. Due to the reduction of space, weight and power consumption this solution enables active flow control by MEMS based piezoelectric actuators for aircraft applications.

Project Context and Objectives:
The main objectives of this project were the development, the manufacturing and the test of a high voltage amplifier module for MEMS based AFC actuators, such as Micro Synthetic Jet Actuators (µSJA) or MEMS based Micro Pulsed Jet Actuators (µPJA).
The main activities were:
- Development of a system concept
- Development of a detailed design adapted to the space allocation of a pulsed jet actuation panel (30 x 20 x 3 cm³, panel includes 30 separate actuators (e.g. micro valves))
- Development of a demonstrator (hardware) and manufacturing of that demonstrator for system
validation

The system met the following conditions:
- Capacitance of the piezoelectric transducer up to 20nF per single element
- Driving Voltage up to 300V
- Driving Frequency up to 500Hz for µPJA type
- Minimal space allocation – an integrated solution (ASIC based) has been preferred
- Minimal energy consumption or a concept to minimize the energy consumption of the system

Work progress and achievements
Technically the project can be stated to be successful according to the objectives and achievements.
Some minor changes to optimize the output of the project have been taken. Especially the additional early development, fabrication and characterization of a test chip containing three different options of a high-voltage output stage was very beneficial with respect to confirmed functionality of the core element of the high-voltage ASIC and an early characterization of the heat transfer properties.

Project Results:
An integrated high voltage circuit has been developed in order to drive high capacitive loads up to 600 nF and enable operation voltages up to 300 V. Due to the reduction of space, weight and power consumption this solution enables active flow control by MEMS based piezoelectric actuators for aircraft applications.

For details please see attachment.

Potential Impact:
The final results of this research project can be summarized with:
- all requirements of the call could be reached
- the demonstrator panel has been delivered

Due to the successful development of this kind of HV ASIC many similar applications may be addressed as well. Those applications will gain in the same way as aircraft applications from the reduction space, weight and energy consumption achieved in this project. Therefore the CleanSky policy may be transferred in all this areas further and extends partially towards 'CleanWorld'.

Dissemination of the results of this research project will be carried out by presentions on scientific conference (e.g. Smart System Integration 2014/ Vienna; Greener Aviation 2014/ Brussels) as wel as on meetings with our customers and by publication to potentially interested institutions and companies.
Follower projects and supplementary activities are already in discussion.
List of Websites:
webseite: http://www.ed-chemnitz.de/(odnośnik otworzy się w nowym oknie)
author contact:
Daniel Koehler/ Ralf Seidel
EDC Electronic Design Chemnitz GmbH
Technologie Campus 4
09126 Chemnitz, Germany
daniel.koehler@ed-chemnitz.de; ralf.seidel@ed-chemnitz.de