Deliverables
Functional characterization of CMOS-SET demonstrators
First delivery of wafer-scale pillars with Si nanodots for device fabricationReport on predicted optimum device specifications for demonstrator fabrication
Report on stability studies of nanopillars
Report on stability studies of nanopillars under ion irradiation
Report on optimum processing conditions in planar stacks with HIMReport on process simulation of single Si dot self-assembly
First data from ion beam mixing simulations as input for kinetic Monte-Carlo simulations
Electrical characterization of functional nano-pillars
Report on simulation of electrical performance of silicon nanodot single electron devices
Assessment of silicon nanodot SETs as low-energy dissipation devices
Structural characterization of Si nanodot self-assembly
Report on process definition
Structural characterization of functional nano-pillars
Electrical characterization of Si nanodot self-assembly
Report on Si nanodot self-assembly in Si/SiO2/Si nanopillar stacks
Plan for fabrication of Si nanodot self-assem-bly by ion processing
Report on the first version of process simulator of ion implantation and mixing in Si/SiO2 nanostructures
Assessment of IETS and DA-SDT investiga-tion of defects at the Si/SiO2 interface
Publications
Author(s):
F. Djurabekova, C. Fridlund, K. Nordlund
Published in:
Physical Review Materials, Issue 4/1, 2020, Page(s) 013601-1 to 013601-12, ISSN 2475-9953
Publisher:
American Physical Society
DOI:
10.1103/physrevmaterials.4.013601
Author(s):
Gabriele Seguini, Fabio Zanenga, Gianluca Cannetti, Michele Perego
Published in:
Soft Matter, Issue 16/23, 2020, Page(s) 5525-5533, ISSN 1744-683X
Publisher:
Royal Society of Chemistry
DOI:
10.1039/d0sm00441c
Author(s):
Santiago H Andany, Gregor Hlawacek, Stefan Hummel, Charlène Brillard, Mustafa Kangül, Georg E Fantner
Published in:
Beilstein Journal of Nanotechnology, Issue 11, 2020, Page(s) 1272-1279, ISSN 2190-4286
Publisher:
Beilstein-Institut Zur Forderung der Chemischen Wissenschaften
DOI:
10.3762/bjnano.11.111
Author(s):
E. Amat, F. Klupfel, J. Bausells, F. Perez-Murano
Published in:
IEEE Transactions on Electron Devices, Issue 66/10, 2019, Page(s) 4461-4467, ISSN 0018-9383
Publisher:
Institute of Electrical and Electronics Engineers
DOI:
10.1109/ted.2019.2937141
Author(s):
A. Lopez-Cazalilla, F. Djurabekova, A. Ilinov, C. Fridlund, K. Nordlund
Published in:
Materials Research Letters, Issue 8/3, 2020, Page(s) 110-116, ISSN 2166-3831
Publisher:
Taylor & Francis
DOI:
10.1080/21663831.2019.1711458
Author(s):
Thomas Prüfer, Wolfhard Möller, Karl-Heinz Heinig, Daniel Wolf, Hans-Jürgen Engelmann, Xiaomo Xu, Johannes von Borany
Published in:
Journal of Applied Physics, Issue 125/22, 2019, Page(s) 225708, ISSN 0021-8979
Publisher:
American Institute of Physics
DOI:
10.1063/1.5096451
Author(s):
M.-L. Pourteau, A. Gharbi, P. Brianceau, J.-A. Dallery, F. Laulagnet, G. Rademaker, R. Tiron, H.-J. Engelmann, J. von Borany, K.-H. Heinig, M. Rommel, L. Baier
Published in:
Micro and Nano Engineering, Issue 9, 2020, Page(s) 100074, ISSN 2590-0072
Publisher:
Elsevier
DOI:
10.1016/j.mne.2020.100074
Author(s):
Fabian J. Klupfel
Published in:
IEEE Access, Issue 7, 2019, Page(s) 84053-84065, ISSN 2169-3536
Publisher:
Institute of Electrical and Electronics Engineers Inc.
DOI:
10.1109/access.2019.2924913
Author(s):
Federica E. Caligiore, Daniele Nazzari, Elena Cianci, Katia Sparnacci, Michele Laus, Michele Perego, Gabriele Seguini
Published in:
Advanced Materials Interfaces, Issue 6/12, 2019, Page(s) 1900503, ISSN 2196-7350
Publisher:
Wiley
DOI:
10.1002/admi.201900503
Author(s):
Patricia Pimenta Barros, Ahmed Gharbi, Antoine Fouquet, Sandra Bos, Jérôme Hazart, Florian Delachat, Xavier Chevalier, Ian Cayrefourcq, Laurent Pain, Raluca Tiron
Published in:
Macromolecular Materials and Engineering, Issue 302/11, 2017, Page(s) 1700285, ISSN 1438-7492
Publisher:
John Wiley & Sons Ltd.
DOI:
10.1002/mame.201700285
Author(s):
S Zhang, O H Pakarinen, M Backholm, F Djurabekova, K Nordlund, J Keinonen, T S Wang
Published in:
Journal of Physics: Condensed Matter, Issue 30/1, 2018, Page(s) 015403, ISSN 0953-8984
Publisher:
Institute of Physics Publishing
DOI:
10.1088/1361-648x/aa9868
Author(s):
Esteve Amat, Joan Bausells, Francesc Perez-Murano
Published in:
IEEE Transactions on Electron Devices, Issue 64/12, 2017, Page(s) 5172-5180, ISSN 0018-9383
Publisher:
Institute of Electrical and Electronics Engineers
DOI:
10.1109/ted.2017.2765003
Author(s):
Xiaomo Xu, Thomas Prüfer, Daniel Wolf, Hans-Jürgen Engelmann, Lothar Bischoff, René Hübner, Karl-Heinz Heinig, Wolfhard Möller, Stefan Facsko, Johannes von Borany, Gregor Hlawacek
Published in:
Beilstein Journal of Nanotechnology, Issue 9, 2018, Page(s) 2883-2892, ISSN 2190-4286
Publisher:
Beilstein-Institut Zur Forderung der Chemischen Wissenschaften
DOI:
10.3762/bjnano.9.267
Author(s):
Gabriele Seguini, Fabio Zanenga, Michele Laus, Michele Perego
Published in:
Physical Review Materials, Issue 2/5, 2018, Page(s) from 055605-1 to 055605-6, ISSN 2475-9953
Publisher:
American Physical Society (APS)
DOI:
10.1103/physrevmaterials.2.055605
Author(s):
Elena Cianci, Daniele Nazzari, Gabriele Seguini, Michele Perego
Published in:
Advanced Materials Interfaces, Issue 5/20, 2018, Page(s) 1801016, ISSN 2196-7350
Publisher:
John Wiley & Sons
DOI:
10.1002/admi.201801016
Author(s):
Florian Delachat, Ahmed Gharbi, Patricia Pimenta-Barros, Antoine Fouquet, Guillaume Claveau, Nicolas Posseme, Laurent Pain, Célia Nicolet, Christophe Navarro, Ian Cayrefourcq, Raluca Tiron
Published in:
Nanoscale, Issue 10/23, 2018, Page(s) 10900-10910, ISSN 2040-3364
Publisher:
Royal Society of Chemistry
DOI:
10.1039/c8nr00123e
Author(s):
E. AMAT, R. CANAL, A. CALOMARDE, A. RUBIO
Published in:
International Journal of the Society of Materials Engineering for Resources, Issue 23/1, 2018, Page(s) 22-29, ISSN 1347-9725
Publisher:
Society of Materials Engineering for Resources for Japan
DOI:
10.5188/ijsmer.23.22
Author(s):
Jacopo Frascaroli, Elena Cianci, Sabina Spiga, Gabriele Seguini, Michele Perego
Published in:
ACS Applied Materials & Interfaces, Issue 8/49, 2016, Page(s) 33933-33942, ISSN 1944-8244
Publisher:
American Chemical Society
DOI:
10.1021/acsami.6b11340
Author(s):
C. Fridlund, J. Laakso, K. Nordlund, F. Djurabekova
Published in:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Issue 409, 2017, Page(s) 14-18, ISSN 0168-583X
Publisher:
Elsevier BV
DOI:
10.1016/j.nimb.2017.04.034
Author(s):
Serim Ilday, F. Ömer Ilday, René Hübner, Ty J. Prosa, Isabelle Martin, Gizem Nogay, Ismail Kabacelik, Zoltan Mics, Mischa Bonn, Dmitry Turchinovich, Hande Toffoli, Daniele Toffoli, David Friedrich, Bernd Schmidt, Karl-Heinz Heinig, Rasit Turan
Published in:
Nano Letters, Issue 16/3, 2016, Page(s) 1942-1948, ISSN 1530-6984
Publisher:
American Chemical Society
DOI:
10.1021/acs.nanolett.5b05158
Author(s):
K. Nordlund, F. Djurabekova, G. Hobler
Published in:
Physical Review B, Issue 94/21, 2016, Page(s) from 214109-1 to 214109-20, ISSN 1098-0121
Publisher:
American Physical Society
DOI:
10.1103/PhysRevB.94.214109
Author(s):
Xiaomo Xu, Karl-Heinz Heinig, Wolfhard Möller, Hans-Jürgen Engelmann, Nico Klingner, Ahmed Gharbi, Raluca Tiron, Johannes von Borany, Gregor Hlawacek
Published in:
Semiconductor Science and Technology, Issue 35/1, 2020, Page(s) 015021, ISSN 0268-1242
Publisher:
Institute of Physics Publishing
DOI:
10.1088/1361-6641/ab57ba
Author(s):
Amat, Esteve; Moral, Alberto del; Bausells, Joan; Perez-Murano, Francesc; Klüpfel, Fabian
Published in:
Proc. Conference on Design of Circuits and Integrated Systems (DCIS), Issue IEEE Xplore, April 2019, 2019
Publisher:
IEEE
DOI:
10.1109/dcis.2018.8681478
Author(s):
F. J. Klupfel, P. Pichler
Published in:
2017 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), 2017, Page(s) 77-80, ISBN 978-4-86348-610-2
Publisher:
IEEE
DOI:
10.23919/SISPAD.2017.8085268
Author(s):
Gabriel Reynaud, Ahmed Gharbi, Patricia Pimenta-Barros, Olivia Saouaf, Laurent Pain, Raluca Tiron, Christophe Navarro, Célia Nicolet, Ian Cayrefourcq, Michele Perego, Francesc Pérez-Murano, Esteve Amat, Marta Fernández-Regúlez
Published in:
Advances in Patterning Materials and Processes XXXV, 2018, Page(s) 25, ISBN 9781-510616653
Publisher:
SPIE
DOI:
10.1117/12.2297414
Author(s):
F. J. Klupfel, A. Burenkov, J. Lorenz
Published in:
2016 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), 2016, Page(s) 237-240, ISBN 978-1-5090-0818-6
Publisher:
IEEE
DOI:
10.1109/SISPAD.2016.7605191
Author(s):
Christoffer Fridlund
Published in:
2016, Page(s) 1 - 65
Publisher:
Faculty of Science, University of Helsinki
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