Deliverables
First pillars on SiO2 island layers available by DSA (free surface)
First pillars on SiO2 island layer available (20–50 nm) by EBDW
Functional characterization of CMOS-SET demonstrators
First delivery of wafer-scale pillars with Si nanodots for device fabrication
Report on predicted optimum device specifications for demonstrator fabrication
Report on stability studies of nanopillars under ion irradiation
Report on optimum processing conditions in planar stacks with HIM
Report on process simulation of single Si dot self-assembly
First data from ion beam mixing simulations as input for kinetic Monte-Carlo simulations
Electrical characterization of functional nano-pillars
Report on simulation of electrical performance of silicon nanodot single electron devices
Assessment of silicon nanodot SETs as low-energy dissipation devices
Structural characterization of Si nanodot self-assembly
Report on process definition
Structural characterization of functional nano-pillars
Electrical characterization of Si nanodot self-assembly
Report on Si nanodot self-assembly in Si/SiO2/Si nanopillar stacks
Plan for fabrication of Si nanodot self-assem-bly by ion processing
Report on the first version of process simulator of ion implantation and mixing in Si/SiO2 nanostructures
Assessment of IETS and DA-SDT investiga-tion of defects at the Si/SiO2 interface
Organization and realization Workshop 1: Tunneling devices: Theory and experiment
Final version of process simulator of ion im-plantation and mixing in 3D Si/SiO2 nano-structures with the graphical user interface
Organization and realization Workshop 2: DSA: Block Co-Polymer and Beyond
Specification of process and device parameters
Project web-page established and launched
Installation of an external industry board
Searching for OpenAIRE data...
Publications
Author(s): F. J. Klupfel, P. Pichler
Published in: 2017 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), 2017, Page(s) 77-80
DOI: 10.23919/SISPAD.2017.8085268
Author(s): Gabriel Reynaud, Ahmed Gharbi, Patricia Pimenta-Barros, Olivia Saouaf, Laurent Pain, Raluca Tiron, Christophe Navarro, Célia Nicolet, Ian Cayrefourcq, Michele Perego, Francesc Pérez-Murano, Esteve Amat, Marta Fernández-Regúlez
Published in: Advances in Patterning Materials and Processes XXXV, 2018, Page(s) 25
DOI: 10.1117/12.2297414
Author(s): F. J. Klupfel, A. Burenkov, J. Lorenz
Published in: 2016 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), 2016, Page(s) 237-240
DOI: 10.1109/SISPAD.2016.7605191
Author(s): Patricia Pimenta Barros, Ahmed Gharbi, Antoine Fouquet, Sandra Bos, Jérôme Hazart, Florian Delachat, Xavier Chevalier, Ian Cayrefourcq, Laurent Pain, Raluca Tiron
Published in: Macromolecular Materials and Engineering, Issue 302/11, 2017, Page(s) 1700285, ISSN 1438-7492
DOI: 10.1002/mame.201700285
Author(s): S Zhang, O H Pakarinen, M Backholm, F Djurabekova, K Nordlund, J Keinonen, T S Wang
Published in: Journal of Physics: Condensed Matter, Issue 30/1, 2018, Page(s) 015403, ISSN 0953-8984
DOI: 10.1088/1361-648x/aa9868
Author(s): Esteve Amat, Joan Bausells, Francesc Perez-Murano
Published in: IEEE Transactions on Electron Devices, Issue 64/12, 2017, Page(s) 5172-5180, ISSN 0018-9383
DOI: 10.1109/ted.2017.2765003
Author(s): Xiaomo Xu, Thomas Prüfer, Daniel Wolf, Hans-Jürgen Engelmann, Lothar Bischoff, René Hübner, Karl-Heinz Heinig, Wolfhard Möller, Stefan Facsko, Johannes von Borany, Gregor Hlawacek
Published in: Beilstein Journal of Nanotechnology, Issue 9, 2018, Page(s) 2883-2892, ISSN 2190-4286
DOI: 10.3762/bjnano.9.267
Author(s): Gabriele Seguini, Fabio Zanenga, Michele Laus, Michele Perego
Published in: Physical Review Materials, Issue 2/5, 2018, Page(s) from 055605-1 to 055605-6, ISSN 2475-9953
DOI: 10.1103/physrevmaterials.2.055605
Author(s): Elena Cianci, Daniele Nazzari, Gabriele Seguini, Michele Perego
Published in: Advanced Materials Interfaces, Issue 5/20, 2018, Page(s) 1801016, ISSN 2196-7350
DOI: 10.1002/admi.201801016
Author(s): Florian Delachat, Ahmed Gharbi, Patricia Pimenta-Barros, Antoine Fouquet, Guillaume Claveau, Nicolas Posseme, Laurent Pain, Célia Nicolet, Christophe Navarro, Ian Cayrefourcq, Raluca Tiron
Published in: Nanoscale, Issue 10/23, 2018, Page(s) 10900-10910, ISSN 2040-3364
DOI: 10.1039/c8nr00123e
Author(s): E. AMAT, R. CANAL, A. CALOMARDE, A. RUBIO
Published in: International Journal of the Society of Materials Engineering for Resources, Issue 23/1, 2018, Page(s) 22-29, ISSN 1347-9725
DOI: 10.5188/ijsmer.23.22
Author(s): Jacopo Frascaroli, Elena Cianci, Sabina Spiga, Gabriele Seguini, Michele Perego
Published in: ACS Applied Materials & Interfaces, Issue 8/49, 2016, Page(s) 33933-33942, ISSN 1944-8244
DOI: 10.1021/acsami.6b11340
Author(s): C. Fridlund, J. Laakso, K. Nordlund, F. Djurabekova
Published in: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Issue 409, 2017, Page(s) 14-18, ISSN 0168-583X
DOI: 10.1016/j.nimb.2017.04.034
Author(s): Serim Ilday, F. Ömer Ilday, René Hübner, Ty J. Prosa, Isabelle Martin, Gizem Nogay, Ismail Kabacelik, Zoltan Mics, Mischa Bonn, Dmitry Turchinovich, Hande Toffoli, Daniele Toffoli, David Friedrich, Bernd Schmidt, Karl-Heinz Heinig, Rasit Turan
Published in: Nano Letters, Issue 16/3, 2016, Page(s) 1942-1948, ISSN 1530-6984
DOI: 10.1021/acs.nanolett.5b05158
Author(s): K. Nordlund, F. Djurabekova, G. Hobler
Published in: Physical Review B, Issue 94/21, 2016, Page(s) from 214109-1 to 214109-20, ISSN 1098-0121
DOI: 10.1103/PhysRevB.94.214109
Author(s): Christoffer Fridlund
Published in: 2016, Page(s) 1 - 65
