Resultado final
Functional characterization of CMOS-SET demonstrators
First delivery of wafer-scale pillars with Si nanodots for device fabricationReport on predicted optimum device specifications for demonstrator fabrication
Report on stability studies of nanopillars
Report on stability studies of nanopillars under ion irradiation
Report on optimum processing conditions in planar stacks with HIMReport on process simulation of single Si dot self-assembly
First data from ion beam mixing simulations as input for kinetic Monte-Carlo simulations
Electrical characterization of functional nano-pillars
Report on simulation of electrical performance of silicon nanodot single electron devices
Assessment of silicon nanodot SETs as low-energy dissipation devices
Structural characterization of Si nanodot self-assembly
Report on process definition
Structural characterization of functional nano-pillars
Electrical characterization of Si nanodot self-assembly
Report on Si nanodot self-assembly in Si/SiO2/Si nanopillar stacks
Plan for fabrication of Si nanodot self-assem-bly by ion processing
Report on the first version of process simulator of ion implantation and mixing in Si/SiO2 nanostructures
Assessment of IETS and DA-SDT investiga-tion of defects at the Si/SiO2 interface
Publicaciones
Autores:
F. Djurabekova, C. Fridlund, K. Nordlund
Publicado en:
Physical Review Materials, Edición 4/1, 2020, Página(s) 013601-1 to 013601-12, ISSN 2475-9953
Editor:
American Physical Society
DOI:
10.1103/physrevmaterials.4.013601
Autores:
Gabriele Seguini, Fabio Zanenga, Gianluca Cannetti, Michele Perego
Publicado en:
Soft Matter, Edición 16/23, 2020, Página(s) 5525-5533, ISSN 1744-683X
Editor:
Royal Society of Chemistry
DOI:
10.1039/d0sm00441c
Autores:
Santiago H Andany, Gregor Hlawacek, Stefan Hummel, Charlène Brillard, Mustafa Kangül, Georg E Fantner
Publicado en:
Beilstein Journal of Nanotechnology, Edición 11, 2020, Página(s) 1272-1279, ISSN 2190-4286
Editor:
Beilstein-Institut Zur Forderung der Chemischen Wissenschaften
DOI:
10.3762/bjnano.11.111
Autores:
E. Amat, F. Klupfel, J. Bausells, F. Perez-Murano
Publicado en:
IEEE Transactions on Electron Devices, Edición 66/10, 2019, Página(s) 4461-4467, ISSN 0018-9383
Editor:
Institute of Electrical and Electronics Engineers
DOI:
10.1109/ted.2019.2937141
Autores:
A. Lopez-Cazalilla, F. Djurabekova, A. Ilinov, C. Fridlund, K. Nordlund
Publicado en:
Materials Research Letters, Edición 8/3, 2020, Página(s) 110-116, ISSN 2166-3831
Editor:
Taylor & Francis
DOI:
10.1080/21663831.2019.1711458
Autores:
Thomas Prüfer, Wolfhard Möller, Karl-Heinz Heinig, Daniel Wolf, Hans-Jürgen Engelmann, Xiaomo Xu, Johannes von Borany
Publicado en:
Journal of Applied Physics, Edición 125/22, 2019, Página(s) 225708, ISSN 0021-8979
Editor:
American Institute of Physics
DOI:
10.1063/1.5096451
Autores:
M.-L. Pourteau, A. Gharbi, P. Brianceau, J.-A. Dallery, F. Laulagnet, G. Rademaker, R. Tiron, H.-J. Engelmann, J. von Borany, K.-H. Heinig, M. Rommel, L. Baier
Publicado en:
Micro and Nano Engineering, Edición 9, 2020, Página(s) 100074, ISSN 2590-0072
Editor:
Elsevier
DOI:
10.1016/j.mne.2020.100074
Autores:
Fabian J. Klupfel
Publicado en:
IEEE Access, Edición 7, 2019, Página(s) 84053-84065, ISSN 2169-3536
Editor:
Institute of Electrical and Electronics Engineers Inc.
DOI:
10.1109/access.2019.2924913
Autores:
Federica E. Caligiore, Daniele Nazzari, Elena Cianci, Katia Sparnacci, Michele Laus, Michele Perego, Gabriele Seguini
Publicado en:
Advanced Materials Interfaces, Edición 6/12, 2019, Página(s) 1900503, ISSN 2196-7350
Editor:
Wiley
DOI:
10.1002/admi.201900503
Autores:
Patricia Pimenta Barros, Ahmed Gharbi, Antoine Fouquet, Sandra Bos, Jérôme Hazart, Florian Delachat, Xavier Chevalier, Ian Cayrefourcq, Laurent Pain, Raluca Tiron
Publicado en:
Macromolecular Materials and Engineering, Edición 302/11, 2017, Página(s) 1700285, ISSN 1438-7492
Editor:
John Wiley & Sons Ltd.
DOI:
10.1002/mame.201700285
Autores:
S Zhang, O H Pakarinen, M Backholm, F Djurabekova, K Nordlund, J Keinonen, T S Wang
Publicado en:
Journal of Physics: Condensed Matter, Edición 30/1, 2018, Página(s) 015403, ISSN 0953-8984
Editor:
Institute of Physics Publishing
DOI:
10.1088/1361-648x/aa9868
Autores:
Esteve Amat, Joan Bausells, Francesc Perez-Murano
Publicado en:
IEEE Transactions on Electron Devices, Edición 64/12, 2017, Página(s) 5172-5180, ISSN 0018-9383
Editor:
Institute of Electrical and Electronics Engineers
DOI:
10.1109/ted.2017.2765003
Autores:
Xiaomo Xu, Thomas Prüfer, Daniel Wolf, Hans-Jürgen Engelmann, Lothar Bischoff, René Hübner, Karl-Heinz Heinig, Wolfhard Möller, Stefan Facsko, Johannes von Borany, Gregor Hlawacek
Publicado en:
Beilstein Journal of Nanotechnology, Edición 9, 2018, Página(s) 2883-2892, ISSN 2190-4286
Editor:
Beilstein-Institut Zur Forderung der Chemischen Wissenschaften
DOI:
10.3762/bjnano.9.267
Autores:
Gabriele Seguini, Fabio Zanenga, Michele Laus, Michele Perego
Publicado en:
Physical Review Materials, Edición 2/5, 2018, Página(s) from 055605-1 to 055605-6, ISSN 2475-9953
Editor:
American Physical Society (APS)
DOI:
10.1103/physrevmaterials.2.055605
Autores:
Elena Cianci, Daniele Nazzari, Gabriele Seguini, Michele Perego
Publicado en:
Advanced Materials Interfaces, Edición 5/20, 2018, Página(s) 1801016, ISSN 2196-7350
Editor:
John Wiley & Sons
DOI:
10.1002/admi.201801016
Autores:
Florian Delachat, Ahmed Gharbi, Patricia Pimenta-Barros, Antoine Fouquet, Guillaume Claveau, Nicolas Posseme, Laurent Pain, Célia Nicolet, Christophe Navarro, Ian Cayrefourcq, Raluca Tiron
Publicado en:
Nanoscale, Edición 10/23, 2018, Página(s) 10900-10910, ISSN 2040-3364
Editor:
Royal Society of Chemistry
DOI:
10.1039/c8nr00123e
Autores:
E. AMAT, R. CANAL, A. CALOMARDE, A. RUBIO
Publicado en:
International Journal of the Society of Materials Engineering for Resources, Edición 23/1, 2018, Página(s) 22-29, ISSN 1347-9725
Editor:
Society of Materials Engineering for Resources for Japan
DOI:
10.5188/ijsmer.23.22
Autores:
Jacopo Frascaroli, Elena Cianci, Sabina Spiga, Gabriele Seguini, Michele Perego
Publicado en:
ACS Applied Materials & Interfaces, Edición 8/49, 2016, Página(s) 33933-33942, ISSN 1944-8244
Editor:
American Chemical Society
DOI:
10.1021/acsami.6b11340
Autores:
C. Fridlund, J. Laakso, K. Nordlund, F. Djurabekova
Publicado en:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Edición 409, 2017, Página(s) 14-18, ISSN 0168-583X
Editor:
Elsevier BV
DOI:
10.1016/j.nimb.2017.04.034
Autores:
Serim Ilday, F. Ömer Ilday, René Hübner, Ty J. Prosa, Isabelle Martin, Gizem Nogay, Ismail Kabacelik, Zoltan Mics, Mischa Bonn, Dmitry Turchinovich, Hande Toffoli, Daniele Toffoli, David Friedrich, Bernd Schmidt, Karl-Heinz Heinig, Rasit Turan
Publicado en:
Nano Letters, Edición 16/3, 2016, Página(s) 1942-1948, ISSN 1530-6984
Editor:
American Chemical Society
DOI:
10.1021/acs.nanolett.5b05158
Autores:
K. Nordlund, F. Djurabekova, G. Hobler
Publicado en:
Physical Review B, Edición 94/21, 2016, Página(s) from 214109-1 to 214109-20, ISSN 1098-0121
Editor:
American Physical Society
DOI:
10.1103/PhysRevB.94.214109
Autores:
Xiaomo Xu, Karl-Heinz Heinig, Wolfhard Möller, Hans-Jürgen Engelmann, Nico Klingner, Ahmed Gharbi, Raluca Tiron, Johannes von Borany, Gregor Hlawacek
Publicado en:
Semiconductor Science and Technology, Edición 35/1, 2020, Página(s) 015021, ISSN 0268-1242
Editor:
Institute of Physics Publishing
DOI:
10.1088/1361-6641/ab57ba
Autores:
Amat, Esteve; Moral, Alberto del; Bausells, Joan; Perez-Murano, Francesc; Klüpfel, Fabian
Publicado en:
Proc. Conference on Design of Circuits and Integrated Systems (DCIS), Edición IEEE Xplore, April 2019, 2019
Editor:
IEEE
DOI:
10.1109/dcis.2018.8681478
Autores:
F. J. Klupfel, P. Pichler
Publicado en:
2017 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), 2017, Página(s) 77-80, ISBN 978-4-86348-610-2
Editor:
IEEE
DOI:
10.23919/SISPAD.2017.8085268
Autores:
Gabriel Reynaud, Ahmed Gharbi, Patricia Pimenta-Barros, Olivia Saouaf, Laurent Pain, Raluca Tiron, Christophe Navarro, Célia Nicolet, Ian Cayrefourcq, Michele Perego, Francesc Pérez-Murano, Esteve Amat, Marta Fernández-Regúlez
Publicado en:
Advances in Patterning Materials and Processes XXXV, 2018, Página(s) 25, ISBN 9781-510616653
Editor:
SPIE
DOI:
10.1117/12.2297414
Autores:
F. J. Klupfel, A. Burenkov, J. Lorenz
Publicado en:
2016 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), 2016, Página(s) 237-240, ISBN 978-1-5090-0818-6
Editor:
IEEE
DOI:
10.1109/SISPAD.2016.7605191
Autores:
Christoffer Fridlund
Publicado en:
2016, Página(s) 1 - 65
Editor:
Faculty of Science, University of Helsinki
Buscando datos de OpenAIRE...
Se ha producido un error en la búsqueda de datos de OpenAIRE
No hay resultados disponibles