Rezultaty
Functional characterization of CMOS-SET demonstrators
First delivery of wafer-scale pillars with Si nanodots for device fabricationReport on predicted optimum device specifications for demonstrator fabrication
Report on stability studies of nanopillars
Report on stability studies of nanopillars under ion irradiation
Report on optimum processing conditions in planar stacks with HIMReport on process simulation of single Si dot self-assembly
First data from ion beam mixing simulations as input for kinetic Monte-Carlo simulations
Electrical characterization of functional nano-pillars
Report on simulation of electrical performance of silicon nanodot single electron devices
Assessment of silicon nanodot SETs as low-energy dissipation devices
Structural characterization of Si nanodot self-assembly
Report on process definition
Structural characterization of functional nano-pillars
Electrical characterization of Si nanodot self-assembly
Report on Si nanodot self-assembly in Si/SiO2/Si nanopillar stacks
Plan for fabrication of Si nanodot self-assem-bly by ion processing
Report on the first version of process simulator of ion implantation and mixing in Si/SiO2 nanostructures
Assessment of IETS and DA-SDT investiga-tion of defects at the Si/SiO2 interface
Publikacje
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F. Djurabekova, C. Fridlund, K. Nordlund
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Physical Review Materials, Numer 4/1, 2020, Strona(/y) 013601-1 to 013601-12, ISSN 2475-9953
Wydawca:
American Physical Society
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10.1103/physrevmaterials.4.013601
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Opublikowane w:
Soft Matter, Numer 16/23, 2020, Strona(/y) 5525-5533, ISSN 1744-683X
Wydawca:
Royal Society of Chemistry
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Opublikowane w:
Beilstein Journal of Nanotechnology, Numer 11, 2020, Strona(/y) 1272-1279, ISSN 2190-4286
Wydawca:
Beilstein-Institut Zur Forderung der Chemischen Wissenschaften
DOI:
10.3762/bjnano.11.111
Autorzy:
E. Amat, F. Klupfel, J. Bausells, F. Perez-Murano
Opublikowane w:
IEEE Transactions on Electron Devices, Numer 66/10, 2019, Strona(/y) 4461-4467, ISSN 0018-9383
Wydawca:
Institute of Electrical and Electronics Engineers
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Autorzy:
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Opublikowane w:
Materials Research Letters, Numer 8/3, 2020, Strona(/y) 110-116, ISSN 2166-3831
Wydawca:
Taylor & Francis
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Journal of Applied Physics, Numer 125/22, 2019, Strona(/y) 225708, ISSN 0021-8979
Wydawca:
American Institute of Physics
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Micro and Nano Engineering, Numer 9, 2020, Strona(/y) 100074, ISSN 2590-0072
Wydawca:
Elsevier
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10.1016/j.mne.2020.100074
Autorzy:
Fabian J. Klupfel
Opublikowane w:
IEEE Access, Numer 7, 2019, Strona(/y) 84053-84065, ISSN 2169-3536
Wydawca:
Institute of Electrical and Electronics Engineers Inc.
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Opublikowane w:
Advanced Materials Interfaces, Numer 6/12, 2019, Strona(/y) 1900503, ISSN 2196-7350
Wydawca:
Wiley
DOI:
10.1002/admi.201900503
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Patricia Pimenta Barros, Ahmed Gharbi, Antoine Fouquet, Sandra Bos, Jérôme Hazart, Florian Delachat, Xavier Chevalier, Ian Cayrefourcq, Laurent Pain, Raluca Tiron
Opublikowane w:
Macromolecular Materials and Engineering, Numer 302/11, 2017, Strona(/y) 1700285, ISSN 1438-7492
Wydawca:
John Wiley & Sons Ltd.
DOI:
10.1002/mame.201700285
Autorzy:
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Opublikowane w:
Journal of Physics: Condensed Matter, Numer 30/1, 2018, Strona(/y) 015403, ISSN 0953-8984
Wydawca:
Institute of Physics Publishing
DOI:
10.1088/1361-648x/aa9868
Autorzy:
Esteve Amat, Joan Bausells, Francesc Perez-Murano
Opublikowane w:
IEEE Transactions on Electron Devices, Numer 64/12, 2017, Strona(/y) 5172-5180, ISSN 0018-9383
Wydawca:
Institute of Electrical and Electronics Engineers
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10.1109/ted.2017.2765003
Autorzy:
Xiaomo Xu, Thomas Prüfer, Daniel Wolf, Hans-Jürgen Engelmann, Lothar Bischoff, René Hübner, Karl-Heinz Heinig, Wolfhard Möller, Stefan Facsko, Johannes von Borany, Gregor Hlawacek
Opublikowane w:
Beilstein Journal of Nanotechnology, Numer 9, 2018, Strona(/y) 2883-2892, ISSN 2190-4286
Wydawca:
Beilstein-Institut Zur Forderung der Chemischen Wissenschaften
DOI:
10.3762/bjnano.9.267
Autorzy:
Gabriele Seguini, Fabio Zanenga, Michele Laus, Michele Perego
Opublikowane w:
Physical Review Materials, Numer 2/5, 2018, Strona(/y) from 055605-1 to 055605-6, ISSN 2475-9953
Wydawca:
American Physical Society (APS)
DOI:
10.1103/physrevmaterials.2.055605
Autorzy:
Elena Cianci, Daniele Nazzari, Gabriele Seguini, Michele Perego
Opublikowane w:
Advanced Materials Interfaces, Numer 5/20, 2018, Strona(/y) 1801016, ISSN 2196-7350
Wydawca:
John Wiley & Sons
DOI:
10.1002/admi.201801016
Autorzy:
Florian Delachat, Ahmed Gharbi, Patricia Pimenta-Barros, Antoine Fouquet, Guillaume Claveau, Nicolas Posseme, Laurent Pain, Célia Nicolet, Christophe Navarro, Ian Cayrefourcq, Raluca Tiron
Opublikowane w:
Nanoscale, Numer 10/23, 2018, Strona(/y) 10900-10910, ISSN 2040-3364
Wydawca:
Royal Society of Chemistry
DOI:
10.1039/c8nr00123e
Autorzy:
E. AMAT, R. CANAL, A. CALOMARDE, A. RUBIO
Opublikowane w:
International Journal of the Society of Materials Engineering for Resources, Numer 23/1, 2018, Strona(/y) 22-29, ISSN 1347-9725
Wydawca:
Society of Materials Engineering for Resources for Japan
DOI:
10.5188/ijsmer.23.22
Autorzy:
Jacopo Frascaroli, Elena Cianci, Sabina Spiga, Gabriele Seguini, Michele Perego
Opublikowane w:
ACS Applied Materials & Interfaces, Numer 8/49, 2016, Strona(/y) 33933-33942, ISSN 1944-8244
Wydawca:
American Chemical Society
DOI:
10.1021/acsami.6b11340
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Opublikowane w:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Numer 409, 2017, Strona(/y) 14-18, ISSN 0168-583X
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Opublikowane w:
Nano Letters, Numer 16/3, 2016, Strona(/y) 1942-1948, ISSN 1530-6984
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American Chemical Society
DOI:
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K. Nordlund, F. Djurabekova, G. Hobler
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Physical Review B, Numer 94/21, 2016, Strona(/y) from 214109-1 to 214109-20, ISSN 1098-0121
Wydawca:
American Physical Society
DOI:
10.1103/PhysRevB.94.214109
Autorzy:
Xiaomo Xu, Karl-Heinz Heinig, Wolfhard Möller, Hans-Jürgen Engelmann, Nico Klingner, Ahmed Gharbi, Raluca Tiron, Johannes von Borany, Gregor Hlawacek
Opublikowane w:
Semiconductor Science and Technology, Numer 35/1, 2020, Strona(/y) 015021, ISSN 0268-1242
Wydawca:
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DOI:
10.1088/1361-6641/ab57ba
Autorzy:
Amat, Esteve; Moral, Alberto del; Bausells, Joan; Perez-Murano, Francesc; Klüpfel, Fabian
Opublikowane w:
Proc. Conference on Design of Circuits and Integrated Systems (DCIS), Numer IEEE Xplore, April 2019, 2019
Wydawca:
IEEE
DOI:
10.1109/dcis.2018.8681478
Autorzy:
F. J. Klupfel, P. Pichler
Opublikowane w:
2017 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), 2017, Strona(/y) 77-80, ISBN 978-4-86348-610-2
Wydawca:
IEEE
DOI:
10.23919/SISPAD.2017.8085268
Autorzy:
Gabriel Reynaud, Ahmed Gharbi, Patricia Pimenta-Barros, Olivia Saouaf, Laurent Pain, Raluca Tiron, Christophe Navarro, Célia Nicolet, Ian Cayrefourcq, Michele Perego, Francesc Pérez-Murano, Esteve Amat, Marta Fernández-Regúlez
Opublikowane w:
Advances in Patterning Materials and Processes XXXV, 2018, Strona(/y) 25, ISBN 9781-510616653
Wydawca:
SPIE
DOI:
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F. J. Klupfel, A. Burenkov, J. Lorenz
Opublikowane w:
2016 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), 2016, Strona(/y) 237-240, ISBN 978-1-5090-0818-6
Wydawca:
IEEE
DOI:
10.1109/SISPAD.2016.7605191
Autorzy:
Christoffer Fridlund
Opublikowane w:
2016, Strona(/y) 1 - 65
Wydawca:
Faculty of Science, University of Helsinki
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